MS54XX
Miniature SMD Pressure Sensor
SPECIFICATIONS
1, 7, 12, and 70 bar absolute pressure range
Uncompensated
Piezoresistive silicon micromachined sensor
Miniature surface mount
Ceramic carrier
Low noise, high sensitivity, high linearity
The MS54XX SMD pressure sensor series is designed for
pressure sensor systems with highest demands on resolution and
accuracy. The device consists of a silicon micromachined
pressure sensor die mounted on a
6.2 x 6.4 mm ceramic carrier. The MS54XX can be delivered in a
high sensitivity version giving a maximal output voltage or in a
high linearity version. Both versions provide an output voltage
directly proportional to the applied pressure
Carrier
Full scale
pressure
1 bar
High Sensitivity Versions
Full
Product
scale
Linearity
code
span
MS5401-AM 240 mV ±0.20 % FS
MS5407-AM
MS5470-AM
392 mV
310 mV
±0.20 % FS
High Linearity Versions
Full
Product
scale
Linearity
code
span
MS5401-BM 150 mV ±0.05 % FS
MS5412-BM
150 mV
±0.05 % FS
Ceramic
7 bar
12 bar
70 bar
±0.25 % FS
SENSOR SOLUTIONS
///MS54XX
06/2017
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MS54XX
Miniature SMD Pressure Sensor
FEATURES
Low cost SMD package
Small size
High reliability, low drift
-40 °C to +125 °C operation range
Gel protection against humidity and water
APPLICATIONS
Brake systems
High resolution altimeters, variometers
Barometers
Engine management
Waterproof watches and diving computers
SENSOR SOLUTIONS
///MS54XX
06/2017
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MS54XX
Miniature SMD Pressure Sensor
PIN CONFIGURATION
3: VS+
4: OUT+
1: OUT-
2: GND
PIN DESCRIPTION
Pin Name
OUT-
GND
VS+
OUT+
Pin No
1
2
3
4
Function
Negative output voltage of Wheatstone bridge
Ground
Supply voltage of Wheatstone bridge
Positive output voltage of Wheatstone bridge
ABSOLUTE MAXIMUM RATINGS
Parameter
Supply voltage
Storage temperature
Overpressure MS5401-AM
MS5401-BM (1)
MS5407-AM (2)
MS5412-BM
MS5470-AM
Symbol
VS+
T
S
Conditions
Ta = 25 °C
Min
-
-40
-
-
-
-
-
Max
20
+125
5
10
21
30
180
Unit
V
°C
P
Ta = 25 °C
bar
NOTES
1) The MS5401-BM is qualified referring to ISO Standard 2281 and can withstand an absolute pressure of 11 bar
in salt water or 100 m water respectively.
2) The MS5407-AM is qualified referring to ISO Standard 2281 and can withstand an absolute pressure of 21 bar
in salt water or 200 m water specifically.
SENSOR SOLUTIONS
///MS54XX
06/2017
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MS54XX
Miniature SMD Pressure Sensor
ELECTRICAL CHARACTERISTICS
HIGH SENSITIVITY VERSION
Parameter
Operating pressure range
Full-scale span (FS)
Sensitivity
Linearity
Operating pressure range
Full-scale span (FS)
Sensitivity
Linearity
Operating pressure range
Full-scale span (FS)
Sensitivity
Linearity
Operating temperature range
Zero pressure offset
Pressure hysteresis
Temperature hysteresis
Repeatability
Bridge resistance
Temperature coefficient of resistance
Temperature coefficient of span
Temperature coefficient of offset
Min
0
190
190
-
0
322
46
0
250
3.6
-40
-40
-
-
-
3.0
+2'400
-1'500
-80
Typ
-
240
240
±0.15
-
392
56
±0.15
-
310
4.4
±0.25
-
0
-
0.3
-
3.4
2'900
-1'900
-
Max
1
290
290
±0.40
7
462
66
±040
70
370
5.3
±0.50
125
40
±0.20
0.8
±0.20
3.8
+3'300
-2'300
+80
(Vs+ = 5 V; Ta = 25 °C)
Unit
Notes
bar
mV
mV/bar
% FS
1, 6
bar
mV
mV/bar
% FS
1, 6
bar
mV
mV/bar
% FS
1, 6
°C
mV
% FS
2, 6
% FS
3, 6
% FS
4, 6
kΩ
ppm/°C
5, 6
ppm/°C
5, 6
µV/°C
5, 6
MS5401-AM
MS5407-AM
MS5470-AM
All Ranges
NOTES
1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range.
2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating pressure
range.
3) Maximum difference in offset after one thermal cycle from -40°C to +125°C.
4) Same as 2) after 10 pressure cycles.
5) Slope of the end-point straight line from 25°C to 60°C.
6) Not 100% tested.
SENSOR SOLUTIONS
///MS54XX
06/2017
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MS54XX
Miniature SMD Pressure Sensor
ELECTRICAL CHARACTERISTICS (CONT.)
HIGH LINEARITY VERSIONS
Parameter
Operating pressure range
Full-scale span (FS)
Sensitivity
Linearity
Operating pressure range
Full-scale span (FS)
Sensitivity
Linearity
Operating temperature range
Zero pressure offset
Pressure hysteresis
Temperature hysteresis
Repeatability
Bridge resistance
Temperature coefficient of resistance
Temperature coefficient of span
Temperature coefficient of offset
Min
0
120
120
-
0
120
10
-40
-40
-
-
-
3.0
+2'400
-1'500
-80
Typ
-
150
150
±0.05
-
150
12.5
±0.05
-
0
-
0.3
-
3.4
2'900
-1'900
-
Max
1
180
180
±0.20
12
180
15
±0.15
125
40
±0.20
0.8
±0.20
3.8
+3'300
-2'300
+80
(Vs+ = 5 V; Ta = 25 °C)
Unit
Notes
bar
8
mV
mV/bar
% FS
1, 6
bar
8
mV
mV/bar
% FS
1, 6
°C
mV
% FS
2, 6
% FS
3, 6
% FS
4, 6, 7
kΩ
ppm/°C
5, 6
ppm/°C
5, 6
µV/°C
5, 6
MS5401-BM
MS5412-BM
All Ranges
NOTES
1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range.
2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating pressure
range.
3) Maximum difference in offset after one thermal cycle from -40°C to +125°C.
4) Same as 2) after 10 pressure cycles.
5) Slope of the end-point straight line from 25°C to 60°C.
6) Not 100% tested.
7) MS5412-BM: Max. 0.3% FS
8) This sensor family is optimized for the linearity; it is suitable for applications with higher pressure where the
linearity requirement is less critical.
SENSOR SOLUTIONS
///MS54XX
06/2017
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