Pressure
Freescale Semiconductor
100 kPa On-Chip Temperature
Compensated Silicon
Pressure Sensors
The MPX2102 series devices are silicon piezoresistive pressure sensors
providing a highly accurate and linear voltage output directly proportional to the
applied pressure. The sensor is a single, monolithic silicon diaphragm with the
strain gauge and a thin-film resistor network integrated on chip. The chip is laser
trimmed for precise span and offset calibration and temperature compensation.
Document Number: MPX2102
Rev 9, 01/2012
MPX2102
Series
0 to 100 kPa (0 to 14.5 psi)
40 mV Full Scale
(Typical)
Application Examples
•
•
•
•
•
•
•
Pump/Motor Control
Robotics
Level Detectors
Medical Diagnostics
Pressure Switching
Barometers
Altimeters
Features
•
•
•
•
Temperature Compensated Over 0°C to +85°C
Easy-to-Use Chip Carrier Package Options
Available in Absolute, Differential and Gauge Configurations
Absolute, Differential and Gauge Options
ORDERING INFORMATION
Package
Options
Unibody Package (MPX2102 Series)
MPX2102A
Tray
MPX2102AP
Tray
Device Name
MPX2102ASX
MPX2102DP
MPX2102GP
MPX2102GVP
Tray
Tray
Tray
Case
No.
344
344B
344F
344C
344B
None
# of Ports
Single
Dual
Pressure Type
Gauge
Differential Absolute
Device Marking
MPX2102A
MPX2102AP
MPX2102A
MPX2102DP
MPX2102GP
MPX2102GVP
MPXV2102GP
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
Tray
344D
Small Outline Package (MPXV2102G Series)
MPXV2102GP
Tray
1369
MPAK Package (MPXM2102 Series)
MPXM2102A
Rail
1320
MPXM2102AT1
Tape and Reel
1320
MPXM2102AS
MPXM2102AST1
MPXM2102D
MPXM2102DT1
MPXM2102GS
MPXM2102GST1
Rail
Tape and Reel
Rail
Tape and Reel
Rail
Tape and Reel
1320A
1320A
1320
1320
1320A
1320A
•
•
•
•
MPXM2102A
MPXM2102A
MPXM2102AS
MPXM2102AS
MPXM2102D
MPXM2102D
MPXM2102GS
MPXM2102GS
© 2005-2008, 2010, 2012 Freescale Semiconductor, Inc. All rights reserved.
Pressure
UNIBODY PACKAGES
MPX2102A
CASE 344
MPX2102AP/GP
CASE 344B
MPX2102DP
CASE 344C
MPX2102GVP
CASE 344D
MPX2102ASX
CASE 344F
SMALL OUTLINE PACKAGE
MPAK
MPXV2102GP
CASE 1369
MPXM2102A/ATI
MPXM2102D/DT1
CASE 1320
MPXM2102AS/AST1
MPXM2102GS/AS
CASE 1320A
MPX2102
2
Sensors
Freescale Semiconductor, Inc.
Pressure
Operating Characteristics
Table 1. Operating Characteristics
(V
S
= 10 V
DC
, T
A
= 25
°
C unless otherwise noted, P1 > P2)
Characteristic
Pressure Range
(1)
Absolute Pressure Range MPX2102A
Differential Pressure Range MPX2102D
Supply Voltage
(2)
Supply Current
Full Scale Span
(3)
Offset
(4)
MPX2102D Series
MPX2102A Series
MPXM2102D/G Series
MPXM2102A Series
Sensitivity
Linearity
(5)
MPX2102D Series
MPX2102A Series
MPXM2102D/G Series
MPXM2102A Series
Pressure Hysteresis
(5)
(0 to 100 kPa)
Temperature Hysteresis
(5)
(-40°C to +125°C)
Temperature Coefficient of Full Scale Span
(5)
Temperature Coefficient of Offset
(5)
Input Impedance
Output Impedance
Response Time
(6)
(10% to 90%)
Warm-Up Time
Offset Stability
(7)
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self-heating.
3. Full Scale Span (V
FSS
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum related pressure.
4. Offset (V
OFF
) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range.
Temperature Hysteresis:Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and
from the minimum or maximum operating temperature points, with zero differential pressure applied.
Pressure Hysteresis: Output deviation at any pressure with the specified range, when this pressure is cycled to and from the minimum or
maximum rated pressure at 25°C.
TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative to 25°C.
6. Response Time is defined as the time from the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
—
—
—
—
—
—
TCV
FSS
TCV
OFF
Z
IN
Z
OUT
t
R
—
—
-0.6
-1.0
-0.6
-1.0
—
—
-2.0
-1.0
1000
1400
—
—
—
—
—
—
—
±0.1
±0.5
—
—
—
—
1.0
20
±0.5
0.4
1.0
0.4
1.0
—
—
2.0
1.0
2500
3000
—
—
—
%V
FSS
%V
FSS
%V
FSS
%V
FSS
%V
FSS
mV
W
W
ms
ms
%V
FSS
V
OFF
V
OFF
ΔV/ΔΡ
-1.0
-2.0
-1.0
-2.0
—
—
—
—
—
0.4
1.0
2.0
1.0
2.0
—
mV
mV
P
OP
P
OP
V
S
I
O
V
FSS
20
0
—
—
38.5
—
—
10
6.0
40
100
100
16
—
41.5
kPa
kPa
V
DC
mAdc
mV
Symbol
Min
Typ
Max
Units
mV/kPa
MPX2102
Sensors
Freescale Semiconductor, Inc.
3
Pressure
Maximum Ratings
Table 2. Maximum Ratings
(1)
Rating
Maximum Pressure (P1 > P2)
Storage Temperature
Operating Temperature
Symbol
P
MAX
T
STG
T
A
Value
400
-40 to +125
-40 to +125
Unit
kPa
°C
°C
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
Voltage Output vs. Applied Differential
The differential voltage output of the sensor is directly
proportional to the differential pressure applied.
The absolute sensor has a built-in reference vacuum. The
output voltage will decrease as vacuum, relative to ambient,
is drawn on the pressure (P1) side.
The output voltage of the differential or gauge sensor
increases with increasing pressure applied to the pressure
(P1) side relative to the vacuum (P2) side. Similarly, output
voltage increases as increasing vacuum is applied to the
vacuum (P2) side relative to the pressure (P1) side.
Figure 1
illustrates a block diagram of the internal circuitry
on the stand-alone pressure sensor chip.
V
S
3
X-ducer
Sensing
Element
Thin Film
Temperature
Compensation
and
Calibration
Circuitry
1
GND
2 +V
OUT
4 -V
OUT
Figure 1. Temperature Compensated Pressure Sensor Schematic
MPX2102
4
Sensors
Freescale Semiconductor, Inc.
Pressure
On-Chip Temperature Compensation and Calibration
Figure 2
shows the output characteristics of the MPX2102
series at 25°C. The output is directly proportional to the
differential pressure and is essentially a straight line.
40
35
30
25
Output (mV
DC
)
20
15
10
5
0
kPa
PSI
-5
0
25
3.62
50
7.25
75
10.88
14.5
Offset
(TYP)
MIN
MAX
VS = 10 V
DC
TA = 25°C
MPX2102
P1 > P2
The effects of temperature on Full Scale Span and Offset
are very small and are shown under Operating
Characteristics.
TYP
Span
Range
(TYP)
100
Figure 2. Output vs. Pressure Differential
Silicone Gel
Die Coat
Differential/Gauge
Die
P1
Stainless Steel
Metal Cover
Epoxy
Case
Silicone Gel
Die Coat
Wire Bond
Absolute
Die
P1
Stainless Steel
Metal Cover
Epoxy
Case
Wire Bond
Lead Frame
Differential/GaugeElement
P2
Bond
Die
Lead Frame
Absolute Element
P2
Die
Bond
Figure 3. Cross Sectional Diagrams (Not to Scale)
Figure 3
illustrates the absolute sensing configuration
(right) and the differential or gauge configuration in the basic
chip carrier (Case 344). A silicone gel isolates the die surface
and wire bonds from the environment, while allowing the
pressure signal to be transmitted to the silicon diaphragm.
The MPX2102 series pressure sensor operating
characteristics and internal reliability and qualification tests
are based on use of dry air as the pressure media. Media
other than dry air may have adverse effects on sensor
performance and long term reliability. Contact the factory for
information regarding media compatibility in your application.
LINEARITY
Linearity refers to how well a transducer's output follows
the equation: V
OUT
= V
OFF
+ sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see
Figure 4)
or (2)
a least squares best line fit. While a least squares fit gives the
“best case” linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user.
Freescale’s specified pressure sensor linearities are based
on the end point straight line method measured at the
midrange pressure.
Least Squares Fit
Exaggerated
Performance
Curve
Relative Voltage Output
Least
Square
Deviation
Straight Line
Deviation
End Point Straight
Line Fit
Offset
0
50
Pressure (% Full scale)
100
Figure 4. Linearity Specification Comparison
MPX2102
Sensors
Freescale Semiconductor, Inc.
5
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