Freescale Semiconductor
Data Sheet: Technical Data
Document Number: MPxx5004
Rev. 12.1, 05/2015
MPxx5004
,
0 to 3.92 kPa, Differential
and Gauge, Integrated Pressure
Sensor
Freescale’s MPxx5004 series piezoresistive transducer is a state-of-the-art
monolithic silicon pressure sensor designed for a wide range of applications, but
particularly those employing a microcontroller or microprocessor with A/D inputs.
This sensor combines a highly sensitive implanted strain gauge with advanced
micromachining techniques, thin-film metallization, and bipolar processing to
provide an accurate, high level analog output signal that is proportional to the
applied pressure.
DNC 5
DNC 6
DNC 7
DNC 8
MPXV5004
MPVZ5004
Top view
4 V
OUT
3 GND
2 V
S
1 DNC
Features
•
•
•
•
•
•
•
•
•
•
1.5% maximum error for 0 to 100 mm H
2
O over +10
°C
to +60
°C
with
autozero
2.5% maximum error for 100 to 400 mm H
2
O over +10
°C
to +60
°C
with
autozero
6.25% maximum error for 0 to 400 mm H
2
O over 10
°C
to +60
°C
without
autozero
Temperature compensated over 10
°C
to 60
°C
Available in gauge surface mount (SMT) or through-hole (DIP) configurations
Durable thermoplastic (PPS) package
Washing machine water level
Ideally suited for microprocessor or microcontroller-based systems
Appliance liquid level and pressure measurement
Respiratory equipment
Pin 1 identification,
notch on first pin or chamfered corner.
Pinout
Applications
Small outline packages, through-hole
MPVZ5004G7U
Case 98ASB17758C
MPXV5004GC7U
Case 98ASB17759C
MPVZ5004GW7U
Case 98ASA10611D
Freescale reserves the right to change the detail specifications as may be required to permit
improvements in the design of its products.
© 2006-2009, 2015 Freescale Semiconductor, Inc. All rights reserved.
Small outline packages, surface mount
MPVZ5004G6U/6T1
Case 98ASB17756C
MPXV5004GC6T1/6U, MPVZ5004GC6U
Case 98ASB17757C
MPXV5004DP
Case 98ASA99255D
MPXV5004GVP
Case 98ASA99302D
MPVZ5004GW6U
Case 98ASA10686D
MPXV5004GP/GPT1
Case 98ASA99303D
Ordering Information
# of Ports
Part number
Shipping
Package
None
Small outline package (MPXV5004 series)
MPXV5004DP
MPXV5004GC6T1
MPXV5004GC6U
MPXV5004GC7U
MPXV5004GP
MPXV5004GPT1
MPXV5004GVP
Tray
Reel
Rail
Rail
Tray
Reel
Tray
98ASA99255D
98ASB17757C
98ASB17757C
98ASB17759C
98ASA99303D
98ASA99303D
98ASA99302D
•
•
•
•
•
•
•
•
•
•
•
•
•
•
MPXV5004DP
MPXV5004G
MPXV5004G
MPXV5004G
MPXV5004GP
MPXV5004GP
MPXV5004GVP
Single
Dual
Gauge
Differential
Absolute
Pressure type
Device
marking
Small outline package (Media resistant gel) (MPVZ5004 series)
MPVZ5004G6T1
MPVZ5004G6U
MPVZ5004G7U
MPVZ5004GC6U
MPVZ5004GW6U
MPVZ5004GW7U
Reel
Rail
Rail
Rail
Rail
Rail
98ASB17756C
98ASB17756C
98ASB17758C
98ASB17757C
98ASA10686D
98ASA10611D
•
•
•
•
•
•
•
•
•
•
•
•
MPVZ5004G
MPVZ5004G
MPVZ5004G
MPVZ5004G
MZ5004GW
MZ5004GW
MPxx5004
2
Sensors
Freescale Semiconductor, Inc.
Contents
1
General Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.1 Block diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2 Pinout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Mechanical and Electrical Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1 Maximum ratings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.2 Operating characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
On-chip Temperature Compensation and Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Package Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
4.1 Pressure (P1)/Vacuum (P2) side identification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
4.2 Minimum recommended footprint for surface mounted applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
4.3 Package Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Revision History . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
2
3
4
5
Related Documentation
The MPXV5004G device features and operations are described in a variety of reference manuals, user guides, and application
notes. To find the most-current versions of these documents:
1.
2.
3.
Go to the Freescale homepage at:
http://www.freescale.com/
In the Keyword search box at the top of the page, enter the device number MPXV5004G.
In the Refine Your Result pane on the left, click on the Documentation link.
MPxx5004
Sensors
Freescale Semiconductor, Inc.
3
1
1.1
General Description
Block diagram
Figure 1
shows a block diagram of the internal circuitry integrated on a pressure sensor chip.
V
S
Sensing
Element
Thin Film
Temperature
Compensation
and Calibration
Circuitry
Gain Stage #2
and
Ground
Reference
Shift Circuitry
V
OUT
GND
Pins 1, 5, 6, 7, and 8 are internal device connections.
Do not connect to external circuitry or ground.
Figure 1. Integrated pressure sensor schematic
1.2
Pinout
DNC 5
DNC 6
DNC 7
DNC 8
4 V
OUT
3 GND
2 V
S
1 DNC
Pin 1 identification,
notch on first pin or chamfered corner.
Figure 2. Device pinout (top view)
Table 1. Pin functions
Pin
1
2
3
4
5
6
7
8
Name
DNC
V
S
GND
V
OUT
DNC
DNC
DNC
DNC
Function
Do not connect to external circuitry or ground. Pin 1 is notated by the notch in the lead or chamfered corner.
Voltage supply
Ground
Output voltage
Do not connect to external circuitry or ground.
Do not connect to external circuitry or ground.
Do not connect to external circuitry or ground.
Do not connect to external circuitry or ground.
MPxx5004
4
Sensors
Freescale Semiconductor, Inc.
2
2.1
Mechanical and Electrical Specifications
Maximum ratings
Rating
Symbol
P
MAX
T
STG
T
A
Value
16
–30 to +100
0 to +85
Unit
kPa
°C
°C
Table 2. Maximum ratings
(1)
Maximum pressure (P1 > P2)
Storage temperature
Operating temperature
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
2.2
Operating characteristics
Characteristic
Symbol
P
OP
V
S
I
S
V
FSS
V
OFF
V/P
0 to 100 mm H
2
O (10 °C to 60 °C)
100 to 400 mm H
2
O (10 °C to 60 °C)
0 to 400 mm H
2
O (10 °C to 60 °C)
—
—
—
Min
0
4.75
—
—
—
0.75
—
—
—
—
Typ
—
5.0
—
3.0
3.92
1.0
1.0
—
—
—
Max
3.92
400
5.25
10
—
—
1.25
—
±1.5
±2.5
±6.25
Units
kPa
mm H
2
O
V
DC
mAdc
V
V
V/kPa
%V
FSS
with
autozero
%V
FSS
with
autozero
%V
FSS
without
autozero
Table 3. Operating characteristics
(V
S
= 5.0 V
DC
, T
A
= 25 °C unless otherwise noted, P1 > P2)
Pressure range
Supply voltage
(1)
Supply current
Span @ 306 mm H
2
O (3 kPa)
(2)
Full-scale span @ 400 mm H
2
O (3.92 kPa)
(2)
Offset
(3)
Sensitivity
Accuracy
(4) (5)
1. Device is ratiometric within this specified excitation range.
2. Span is defined as the algebraic difference between the output voltage at specified pressure and the output voltage at the minimum rated
pressure.
3. Offset (V
off
) is defined as the output voltage at the minimum rated pressure.
4. Accuracy (error budget) consists of the following:
Linearity:
Output deviation from a straight line relationship with pressure, using endpoint method, over the specified
pressure range.
Temperature hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to
and from the minimum or maximum operating temperature points, with zero differential pressure applied.
Pressure hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum
or maximum rated pressure, at 25 °C.
TcSpan:
Output deviation over the temperature range of 10 °C to 60 °C, relative to 25 °C.
TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 10 °C to 60 °C, relative to
25 °C.
Variation from nominal:
The variation from nominal values, for offset or full-scale span, as a percent of V
FSS
, at 25 °C.
5. Autozero at factory installation: Due to the sensitivity of the MPxx5004G, external mechanical stresses and mounting position can affect the
zero pressure output reading. Autozeroing is defined as storing the zero pressure output reading and subtracting this from the device's output
during normal operations. Reference AN1636 for specific information. The specified accuracy assumes a maximum temperature change of
±5 °C between autozero and measurement.
MPxx5004
Sensors
Freescale Semiconductor, Inc.
5
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