Gas and Liquid Flow Sensor Module
Description
The FS1012 MEMS mass flow sensor module measures the flow
rate using the thermo-transfer (calorimetric) principle. The FS1012
is capable of measuring a gas or liquid medium.
The FS1012 offers key advantages over resistor-based flow
solutions. The sensor utilizes thermopile sensing, which provides
an excellent signal-to-noise ratio. The sensor comprises a “solid”
thermal isolation technology and silicon-carbide coating to protect
it from abrasive wear and provides robustness and long-term
reliability. In comparison, other sensors typically contain a fragile
membrane above an etched cavity for the thermal isolation base.
The FS1012 features the sensor fully assembled and wire-bonded
out to a 6-pin header.
Datasheet
FS1012
Features
Gas or liquid mediums
Robust “solid” isolation technology
Resistant to surface contamination
No cavity to cause clogging
Resistant to vibration and pressure shock
Low power application
Sensitive at low flow rates and differential pressure levels
Fast response: 2ms
Millivolt output
Supply voltage: 3V to 5V
Module operating temperature range: 0°C to +85°C
Typical Applications
FS1012 Flow Sensor Module
Process controls and monitoring
Oil and gas leak detection
HVAC and air control systems
CPAP and respiratory devices
Automotive mas air flow meter
Liquid dispensing system
Basic Application Circuits
Figure 1.
Single-Ended Circuit Example
3V to 5V
Flow Sensor
Flow Sensor
Figure 2.
Differential Circuit Example
3V to 5V
HTR1
HTR2
Input Offset Adjustment
+
+
–
Microcontroller/ASIC
SPI
ADC
–
PWM
OFFSET
Gain: 20X to 100x
GND
I
2
C
HTR1
HTR2
Differential Amp
+
+
–
Microcontroller/ASIC
SPI
ADC
–
I
2
C
PWM
TP1+
TP1–
TP1+
TP1–
TP2+
TP2–
+
–
Gain: 20X to 100x
GND
© 2017 Integrated Device Technology, Inc.
1
July 20, 2017
FS1012 Datasheet
Absolute Maximum Ratings
The absolute maximum ratings are stress ratings only. Stresses greater than those listed below can cause permanent damage to the device.
Functional operation of the FS1012 at absolute maximum ratings is not implied. Exposure to absolute maximum rating conditions may affect
device reliability.
Table 2.
Absolute Maximum Ratings
Symbol
V
H
T
STOR
Parameter
Heater Voltage Supply
Storage Temperature
Conditions
Minimum
-50
Maximum
5.6
130
Units
V
°C
Operating Conditions
Table 3.
Recommended Operating Conditions
Symbol
T
AMB
I
HTR_CC
V
HTR_CV
Parameter
Ambient Operating Temperature
[a]
Heater Driving Current – Constant Current
[a]
Heater Driving Voltage – Constant Voltage
[a]
Minimum
0
Typical
10
3
Maximum
85
20
5.6
Units
°C
mA
V
[a] Sensor specifications are tested at the wafer die level.
Electrical Characteristics
Table 4.
Electrical Characteristics
Note: See important notes at the end of the table.
Symbol
Parameter
Heater Resistor
[a]
Heater Temperature
Coefficient of Resistance
[a]
Thermopile Output
[a]
Thermopile Resistance
[a]
Thermopile Differential
Output
[a]
Response Time
3V driving voltage, in air, 20°C,
no flow
20°C
3V driving voltage, in air, 20°C,
no flow
30
100
-1
Conditions
Minimum
230
Typical
290
300
35
210
0
60
300
1
2
Maximum
400
Units
Ω
ppm/°C
mV
KΩ
mV
ms
_
HTR
V
TP_OUT
R
TP
V
TP_OUTDIFF
t
RESP
R
H
© 2017 Integrated Device Technology, Inc.
3
July 20, 2017
FS1012 Datasheet
Symbol
Parameter
Conditions
FS1012-1020-NG
Gas Flow
FS1012-1100-NG
Minimum
0
0
Typical
Maximum
2
(2000)
10
(10000)
0.5
(500)
1.0
(1000)
Units
SLPM
(SCCM)
SLPM
(SCCM)
SLPM
(SCCM)
SLPM
(SCCM)
Standard Gas Flow Range
[b], [c]
Standard Liquid Flow Range
[b], [c]
FS1012-1001-LQ
Liquid Flow
FS1012-1002-LQ
[a] Sensor specifications are tested at the wafer die level.
[b] SLPM: Standard liter per minute.
[c] SCCM: Standard cubic centimeter per minute.
0
0
© 2017 Integrated Device Technology, Inc.
4
July 20, 2017
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