Airflow Sensors
High Flow Mass Airflow/Amplified
FEATURES
Linear voltage output
Venturi design
Remote mounting capability
Active laser trimming improves inter-
change ability
Separate gas calibration types:
– Ar (argon)
– N
2
(nitrogen) or
– CO
2
(carbon dioxide)
In-Line Flow Measurement
AWM5000 Series Microbridge Mass Air-
flow Sensors feature a venturi type flow
housing. They measure flow as high as 20
standard liters per minute (SLPM) while
inducing a maximum pressure drop of
2.25 H
2
O. The microbridge chip is in di-
rect contact with the flow stream, greatly
reducing error possibilities due to orifice
or bypass channel clogging.
Rugged, Versatile Package
The rugged plastic package has been
designed to withstand common mode
pressures up to 50 psi, and the small
sensing element allows 100 gs of shock
without compromising performance. The
included ‘‘AMP’’ compatible connector
provides reliable connection in demand-
ing applications.
On-board Signal Conditioning
Each AWM5000 sensor contains circuitry
which performs amplification, lineariza-
tion, temperature compensation, and gas
calibration. Figure 1 (Heater Control Cir-
cuit) and Figure 2 (Sensor Bridge Circuit
and Amplification Linearization Circuit) il-
lustrate the on-board electrical circuitry
for the AWM5000 Series. A 1 to 5 VDC
linear output is possible for all listings
regardless of flow range (5, 10, 15, or 20
SLPM) or calibration gas (nitrogen, car-
bon dioxide, nitrous oxide, or argon). All
calibration is performed by active laser
trimming.
Figure 2
AWM5000 Series
Figure 1
Airflow
Honeywell
Sensing and Control 1-800-537-6945 USA
1-815-235-6847 International 1-800-737-3360 Canada
79
Airflow Sensors
Highflow Mass Airflow/Amplified
SPECIFICATIONS (Performance Characteristics
@
10.0
±0.01
VDC, 25°C)
AWM5101
Flow Range (Note 3)
Suffix - Calibration gas
Min.
Excitation VDC
Power consumption (mW)
Response time (msec)
Null output VDC
Null output shift
−20°
to 70°C
Common Mode
Pressure (psi)
Temperature range
Weight
Shock ratings
Output @ laser trim point
Output voltage shift
+20°
to
−25°C, +20°
to 70°C
Linearity error (2)
Repeatability & Hysteresis
Connector (Included)
—Four pin receptacle
Leak rate, max
8
—
—
0.95
—
—
0-5 SLPM
AWM5102
0-10 SLPM
VA
- Argon (Ar)
Typ.
10±0.01
—
—
1
±0.050
VDC
—
−20°
to
+70°C,
(−4° to 158°F)
60 grams (2.12 oz.)
AWM5103
0-15 SLPM
VC
- Carbon dioxide (CO
2
)
AWM5000 Series
AWM5104
0-20 SLPM
VN
- Nitrogen (N
2
)
Max.
15
100
60
1.05
±.200
VDC
50
100 g peak, 6 msec half-sine (3 drops, each direction of 3 axes)
5 VDC @ Full Scale Flow
Suffix VA or VN
±7.0%
Reading, Suffix VC
±10.0%
Reading
±3.0%
Reading (max.)
±0.5%
Reading (max.)
MICRO SWITCH (SS12143)/AMP (103956-3)
0.1 psi/min. at static condition, (Note 2)
Notes:
1. Linearity specification applies from 2 to 100% full scale of gas flow range, and does not apply to null output at 0 SLPM.
2. The AWM5000 series product has a leakage spec of less than 0.1 psi per minute at 50 psi common mode pressure. If during installation, the
end adapters are twisted with respect to the flowtube, this may compromise the seal between the o-ring and the flowtube and may cause a
temporary leak. This leak might be as high as 1 psi or might remain in specification. It will self-reseal as the o-ring takes a new set.
Approximately 85% of the leakage will dissipate in 24 hours. Within 48 hours, complete recovery will take place.
3. SLPM denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0°C/1 bar (sea level), 50% RH.
NOTICE
AWM5000— Chimney Effect
AWM microbridge mass airflow sensors detect mass airflow caused by heat transfer. The thermally isolated
microbridge structure consists of a heater resistor positioned between two temperature sensing resistors.
The heater resistor maintains a constant temperature, 160°C above ambient, during sensor operation. Airflow
moving past the chip transfers heat from the heater resistor. This airflow warms the downstream resistor and
cools the upstream resistor. The temperature change and the resulting change in resistance of the
temperature resistors is proportional to the mass airflow across the sensing element.
When the sensor is mounted in a vertical position, under zero flow conditions, the sensor may produce an
output that is the result of thermally induced convection current. This occurrence is measurable in the
AWM5000 Series, particularly in the 5 SLPM versions. When designing the sensor into applications where null
stability is critical, avoid mounting the sensor in a vertical position.
80
Honeywell
Sensing and Control 1-800-537-6945 USA
1-815-235-6847 International 1-800-737-3360 Canada
Airflow Sensors
High Flow Mass Airflow/Amplified
OUTPUT CURVES (Performance Characteristics
@
10.0
±0.01
VDC, 25°C)
AWM5000 Series
Airflow
Honeywell Sensing and Control 1-800-537-6945 USA
1-815-235-6847 International 1-800-737-3360 Canada
81
Airflow Sensors
Highflow Mass Airflow/Amplified
AWM5000 ORDER GUIDE
Catalog Listing
AWM5101VA
AWM5101VC
AWM5101VN
AWM5102VA
AWM5102VC
AWM5102VN
AWM5103VA
AWM5103VC
AWM5103VN
AWM5104VA
AWM5104VC
AWM5104VN
Flow Range
5 SLPM, Argon calibration
5 SLPM, CO
2
calibration (2)
5 SLPM, N
2
calibration (1)
10 SLPM, Argon calibration
10 SLPM, CO
2
calibration (2)
10 SLPM, N
2
calibration (1)
15 SLPM, Argon calibration
15 SLPM, CO
2
calibration (2)
15 SLPM, N
2
calibration (1)
20 SLPM, Argon calibration
20 SLPM, CO
2
calibration (2)
20 SLPM, N
2
calibration (1)
AWM5000 Series
CONNECTOR ORDER GUIDE
Catalog Listing
SS12143
Description
Four pin Electrical connector
Connectors use Amp 103956-3
Note:
All listings have 1 - 5 VDC linear output with 10 VDC supply over given flow range for a
specific calibration gas.
1. N
2
calibration is identical to 0
2
and air calibration.
2. CO
2
calibration is identical to N
2
O calibration.
3. For additional gas correction factors, see Application Note 3.
OUTPUT CONNECTIONS
Pin 1
+
Supply voltage
Pin 2 Ground
Pin 3 No connection
Pin 4 Output voltage
Arrow on bottom of housing indicates direction of flow.
MOUNTING DIMENSIONS
(for reference only)
82
Honeywell
Sensing and Control 1-800-537-6945 USA
1-815-235-6847 International 1-800-737-3360 Canada
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