Small
Absolute Pressure Sensor
SM5420E Series
FEATURES
•
•
•
•
•
•
•
•
Improved stability with integrated field shields
Small SO8 surface-mount package
95 millivolt span
Constant current or constant voltage drive
Ported or non-ported configurations
Wide operating temperature range (-40° to +125°C)
Integrated die-level ESD protection
Qualified using AEC-Q100 Grade 1 standards
DESCRIPTION
The SM5420E is a small outline SO8 packaged pressure sensor that
incorporates SMI’s new SM5108E MEMS piezoresistive pressure
sensing die. The SM5420E has been optimized to provide the highest
possible stability for a package of this size. Performance is achieved
through careful resistor placement and mechanical configuration
along with advanced MEMS processing.
The packaged sensor is intended for high volume applications where
cost is a critical factor, such as consumer and automotive products.
The SM5420E is available as an absolute pressure sensor in full-scale
ranges of 30, 60 and 100PSI. It is designed to be surface-mounted on
substrates by high-volume OEM manufacturers.
The SM5420E is available in a ported and non-ported option. The package
is designed to be immersed in the media that is measured. The standard
configuration offers a protective gel over the die. The SM5420E is shipped
tape & reel.
Automotive
Tire Pressure Monitoring Systems (TPMS)
Engine Control
Barometric Sensing
Altitude Correction Detection
Industrial
Handheld Meters
Pneumatic Gauges
Pressure Switches
Consumer
Sports Equipment
Appliances
Silicon Microstructures, Inc. 2001-2016. All rights reserved
DOC # 40DS5468.02
+1-(408) 577-0100
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sales@si-micro.com
I
www.si-micro.com
Page 1
SM5420E Series
ABSOLUTE MAXIMUM RATING TABLE
www.si-micro.com
All parameters are specified at VSUPPLY = 5.00 V DC supply at 25
o
C, unless otherwise noted. All parts are covered with gel.
No.
1
2
3
4
Characteristic
Supply Voltage
Supply Current
(a)
Operating Temperature Range
Storage Temperature Range
Symbol
V
DD
I
DD
T
OP
T
STG
Minimum
0.0
0.0
-40
-55
Typical
-
-
-
-
Maximum
6.5
0.725
+125
+150
Units
V
mA
°C
°C
Notes:
a. When used in constant current configuration
No.
5
6
7
8
9
10
Product Number
SM5420E-030-A-H-T
Operating Pressure
0-30 PSI
Proof Pressure
(P
PROOF
)
(b)
Burst Pressure
(P
BURST
)
(b)
150 PSI
90 PSI
SM5420E-030-A-P-T
SM5420E-060-A-H-T
0-60 PSI
SM5420E-060-A-P-T
SM5420E-100-A-H-T
0-100 PSI
SM5420E-100-A-P-T
200 PSI
200 PSI
180 PSI
200 PSI
Notes:
b. Tested on a sample basis
OPERATING CHARACTERISTICS TABLE
All parameters are specified at V
DD
= 5.0 V DC supply at 25°C, unless otherwise noted.
No.
11
12
13
14
15
16
17
Characteristic
Span
(d)
Zero Offset
TC Span
(e, f)
TC Zero Offset
(e, f)
TC Resistance
(e, f)
Linearity
(30 PSI) (e, g)
Bridge Resistance
Symbol
V
SPAN
V
ZERO
TCS
TCZ
TCR
NL
R
B
Minimum
65
-35
-0.240
-0.07
+0.15
-0.2
5
Typical
95
0
-0.200
Maximum
135
35
-0.155
+0.07
+0.27
+0.2
Units
mV
mV
%FS/
o
C
%FS/
o
C
%RB/°C
%FS
kΩ
6
7
Notes:
d. The device can only be driven with the supply voltage connected to the pins as shown. The positive output will increase with
increasing pressure applied to the package.
e. Tested on a sample basis.
f. Determined by measurements taken at -40°C and 125°C.
g. Defined as best fit straight line.
Silicon Microstructures, Inc. 2001-2016. All rights reserved
DOC # 40DS5468.02
+1-(408) 577-0100
|
sales@si-micro.com
I
www.si-micro.com
Page 2
SM5420E Series
www.si-micro.com
Silicon Microstructures Warranty and Disclaimer:
Silicon Microstructures, Inc. reserves the right to make changes without further notice to any products herein and to
amend the contents of this data sheet at any time and at its sole discretion.
Information in this document is provided solely to enable software and system implementers to use Silicon
Microstructures, Inc. products and/or services. No express or implied copyright licenses are granted hereunder to
design or fabricate any silicon-based microstructures based on the information in this document.
Silicon Microstructures, Inc. makes no warranty, representation, or guarantee regarding the suitability of its products
for any particular purpose, nor does Silicon Microstructures, Inc. assume any liability arising out of the application or
use of any product or silicon-based microstructure, and specifically disclaims any and all liability, including without
limitation consequential or incidental damages. “Typical” parameters which may be provided in Silicon Microstructure’s
data sheets and/or specifications can and do vary in different applications and actual performance may vary over time.
All operating parameters, including “Typicals”, must be validated for each customer application by customer’s technical
experts. Silicon Microstructures, Inc. does not convey any license under its patent rights nor the rights of others. Silicon
Microstructures, Inc. makes no representation that the circuits are free of patent infringement. Silicon Microstructures,
Inc. products are not designed, intended, or authorized for use as components in systems intended for surgical implant
into the body, or other applications intended to support or sustain life, or for any other application in which the failure
of the Silicon Microstructures, Inc. product could create a situation where personal injury or death may occur. Should
Buyer purchase or use Silicon Microstructures, Inc. products for any such unintended or unauthorized application,
Buyer shall indemnify and hold Silicon Microstructures, Inc. and its officers, employees, subsidiaries, affiliates, and
distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of,
directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even
if such claim alleges that Silicon Microstructures, Inc. was negligent regarding the design or manufacture of the part.
Silicon Microstructures, Inc. warrants goods of its manufacture as being free of defective materials and faulty
workmanship. Silicon Microstructures, Inc. standard product warranty applies unless agreed to otherwise by Silicon
Microstructures, Inc. in writing; please refer to your order acknowledgement or contact Silicon Microstructures, Inc.
directly for specific warranty details. If warranted goods are returned to Silicon Microstructures, Inc. during the period
of coverage, Silicon Microstructures, Inc. will repair or replace, at its option, without charge those items it finds
defective. The foregoing is buyer’s sole remedy and is in lieu of all warranties, expressed or implied, including those of
merchantability and fitness for a particular purpose. In no event shall Silicon Microstructures, Inc. be liable for
consequential, special, or indirect damages.
While Silicon Microstructures, Inc. provides application assistance personally, through its literature and the Silicon
Microstructures, Inc. website, it is up to the customer to determine the suitability of the product for its specific
application. The information supplied by Silicon Microstructures, Inc. is believed to be accurate and reliable as of this
printing. However, Silicon Microstructures, Inc. assumes no responsibility for its use. Silicon Microstructures, Inc.
assumes no responsibility for any inaccuracies and/or errors in this publication and reserves the right to make changes
without further notice to any products or specifications herein
Silicon Microstructures, Inc.TM and the Silicon Microstructures, Inc. logo are trademarks of Silicon Microstructures, Inc.
All other service or product names are the property of their respective owners.
© Silicon Microstructures, Inc. 2001-2016. All rights reserved.
Silicon Microstructures, Inc. 2001-2016. All rights reserved
DOC # 40DS5468.02
+1-(408) 577-0100
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sales@si-micro.com
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www.si-micro.com
Page 5
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