Freescale Semiconductor
Technical Data
MPVZ12
Rev 2, 01/2007
10 kPa Uncompensated
Silicon Pressure Sensors
The MPVZ12 series is a silicon piezoresistive pressure sensor providing a
very accurate and linear voltage output — directly proportional to the applied
pressure. This standard, low cost, uncompensated sensor permits
manufacturers to design and add their own external temperature compensating
and signal conditioning networks. Compensation techniques are simplified
because of the predictability of Freescale's single element strain gauge design.
Features
•
•
•
•
•
•
•
Low Cost
Patented Silicon Shear Stress Strain Gauge Design
Ratiometric to Supply Voltage
Easy to Use Chip Carrier Package Options
Differential and Gauge Options
Durable Epoxy Package
Increased media compatibility fluorocarbon gel
MPVZ12 SERIES
UNCOMPENSATED PRESSURE
SENSOR
0 TO 10 kPA (0–1.45 psi)
55 mV FULL SCALE SPAN
(TYPICAL)
SMALL OUTLINE PACKAGE
MPVZ12GC6U
CASE 482A-01
Application Examples
• Air Movement Control
• Environmental Control Systems
• Level Indicators
• Leak Detection
• Medical Instrumentation
• Industrial Controls
• Pneumatic Control Systems
• Robotics
MPVZ12GC7U
CASE 482C-03
ORDERING INFORMATION
(1)
Device Type
Ported
Options
Gauge
Case No.
482A
482C
1735
1560
Order Number
MPVZ12GC6U
MPVZ12GC7U
MPVZ12GW6U
MPVZ12GW7U
Device Marking
MPVZ12G
MPVZ12G
MZ12GW
MZ12GW
MPVZ12GW7U
CASE 1560-02
MPVZ12GW6U
CASE 1735-01
1. MPVZ12 series pressure sensors are available in differential and gauge configurations.
Devices are available in the basic element package or with pressure port fittings which
provide printed circuit board mounting ease and barbed hose pressure connections.
PIN NUMBERS
1
2
3
4
GND
+V
out
V
s
–V
out
5
6
7
8
N/C
N/C
N/C
N/C
NOTE: Pin 1 is noted by the notch in the lead.
© Freescale Semiconductor, Inc., 2007. All rights reserved.
3
+V
S
2
Sensing
Element
4
+V
OUT
–V
OUT
1
GND
Figure 1. Uncompensated Pressure Sensor Schematic
VOLTAGE OUTPUT VERSUS APPLIED DIFFERENTIAL PRESSURE
The output voltage of the differential or gauge sensor
increases with increasing pressure applied to the pressure
side (P1) relative to the vacuum side (P2). Similarly, output
Table 1. Maximum Ratings
(1)
Rating
Maximum Pressure (P1 > P2)
Burst Pressure (P1 > P2)
Storage Temperature
Operating Temperature
Symbol
P
MAX
P
BURST
T
STG
T
A
Value
75
100
–40 to +125
–40 to +125
Unit
kPa
kPa
°C
°C
voltage increases as increasing vacuum is applied to the
vacuum side (P2) relative to the pressure side (P1).
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
MPVZ12
2
Sensors
Freescale Semiconductor
Table 2. Operating Characteristics
(V
S
= 3.0 Vdc, T
A
= 25°C unless otherwise noted, P1 > P2)
Characteristic
Differential Pressure Range
(1)
Supply Voltage
(2)
Supply Current
Full Scale Span
(3)
Offset
(4)
Sensitivity
Linearity
(5)
Pressure Hysteresis
6
(0 to 10 kPa)
Temperature Hysteresis
(5)
(–40°C to +125°C)
Temperature Coefficient of Full Scale Span
(5)
Temperature Coefficient of Offset
(5)
Temperature Coefficient of Resistance
(5)
Input Impedance
Output Impedance
Response Time
(6)
(10% to 90%)
Warm-Up Time
(7)
Offset Stability
(8)
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self-heating.
3. Full Scale Span (V
FSS
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum related pressure.
4. Offset (V
OFF
) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
• Linearity:
•
•
•
•
•
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to
and from the minimum or maximum operating temperature points, with zero differential pressure applied.
Pressure Hysteresis:
Output deviation at any pressure with the specified range, when this pressure is cycled to and from the minimum
or maximum rated pressure at 25°C.
TcSpan:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative to 25°C.
TCR:
Z
IN
deviation with minimum rated pressure applied, over the temperature range of -40°C to ±125°C, relative to
25°C.
Symbol
P
OP
V
S
I
o
V
FSS
V
off
∆V/∆P
—
—
—
TCV
FSS
TCV
off
TCR
Z
in
Z
out
t
R
—
—
Min
0
—
—
45
0
—
–0.5
—
—
–0.22
—
0.28
400
750
—
—
—
Typ
—
3.0
6.0
55
20
5.5
—
±0.1
±0.5
—
±15
—
—
—
1.0
20
±0.5
Max
10
6.0
—
70
35
—
5.0
—
—
–0.16
—
0.34
550
1250
—
—
—
Unit
kPa
Vdc
mAdc
mV
mV
mV/kPa
%V
FSS
%V
FSS
%V
FSS
%V
FSS
/°C
µV/°C
%Z
in
/°C
W
W
ms
ms
%V
FSS
6. Response Time is defined as the time form the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the pressure is stabilized.
8. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
MPVZ12
Sensors
Freescale Semiconductor
3
TEMPERATURE COMPENSATION
Figure 2
shows the typical output characteristics of the
MPVZ12 series over temperature.
Because this strain gauge is an integral part of the silicon
diaphragm, there are no temperature effects due to
differences in the thermal expansion of the strain gauge and
the diaphragm, as are often encountered in bonded strain
gauge pressure sensors. However, the properties of the
strain gauge itself are temperature dependent, requiring that
the device be temperature compensated if it is to be used
over an extensive temperature range.
Temperature compensation and offset calibration can be
achieved rather simply with additional resistive components,
or by designing your system using the MPX2010D series
sensor.
Several approaches to external temperature
compensation over both –40 to +125°C and 0 to +80°C
ranges are presented in Applications Note AN840.
LINEARITY
Linearity refers to how well a transducer's output follows
the equation: V
out
= V
off
+ sensitivity x P over the operating
pressure range (Figure
3).
There are two basic methods for
calculating nonlinearity: (1) end point straight line fit or (2) a
least squares best line fit. While a least squares fit gives the
“best case” linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user.
Freescale’s specified pressure sensor linearities are based
on the end point straight line method measured at the
midrange pressure.
80
70
60
Output (mVdc)
50
40
30
20
10
0
PSI 0
kPa
0.3
2.0
0.6
4.0
0.9
6.0
1.2
8.0
10
1.5
Offset
(Typ)
+125°C
V
S
= 3 V
DC
P1 > P2
+25°C
-40°C
Span
Range
(Typ)
Pressure Differential
Figure 2. Output versus Pressure Differential
80
70
60
50
Output (mVdc)
40
30
20
10
0
0
Offset
(V
off
)
Pressure (kPA)
Max
P
OP
Theoretical
Actual
Span
(V
FSS
)
Linearity
Figure 3. Linearity Specification Comparison
MPVZ12
4
Sensors
Freescale Semiconductor
Gel Die Coat
P1
Wire Bond
Die
Stainless
Steel Cap
Thermoplastic
Case
Lead Frame
P2
Differential Sensing
Element
Die Bond
Figure 4. Cross-Sectional Diagram (not to scale)
Figure 4
illustrates the differential or gauge configuration
in the basic chip carrier (applicable to cases 482, 1560 and
1735). A gel isolates the die surface and wire bonds from the
environment, while allowing the pressure signal to be
transmitted to the silicon diaphragm.
Operating characteristics, internal reliability and
qualification tests are based on use of dry clean air as the
pressure media. Media other than dry clean air may have
adverse effects on sensor performance and long term
reliability. Contact the factory for information regarding media
compatibility in your application.
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Freescale designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing gel which isolates
the die from the environment. The Freescale MPVZ12 series
is designed to operate with positive differential pressure
applied, P1 > P2.
The Pressure (P1) side may be identified by using the
following table
Pressure (P1) Side
Identifier
Top with Port Attached
Top with Port Attached
Top with Port Attached
Top with Port Attached
Part Number
MPVZ12GC6U
MPVZ12GC7U
MPVZ12GW6U
MPVZ12GW7U
Case Type
482A
98ASB17757C
482C
98ASB17759C
1735
98ASA10686D
1560
98ASA10611D
MPVZ12
Sensors
Freescale Semiconductor
5
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