Silicon Pressure Sensors
Uncompensated/Compensated
and Compensated Calibrated
FEATURES
•
Low Cost, Small Size
•
Temperature Compensated
•
Zero and Span Calibrated
•
Millivolt Output
•
Differential, Gage and
Absolute Pressure
•
Constant Voltage
Excitation
•
High Impedance - Low
Current
TYPICAL APPLICATIONS
•
Medical Applications
•
Applications Requiring
Small Size
•
Applications Requiring
Vacuum and Positive
•
Pressure Reference, or
Both
XPC, XPCL,
XPX, XPXL Series
GENERAL DESCRIPTION
The XPC/XPCL and XPX/XPXL Series sensors integrate silicon
micromachined sensing technology, temperature compensation, and
calibration in a complete family of low cost packages. This series offers the
most cost-effective solution for design requirements.
These piezoresistive pressure sensors use micromachined silicon chips
mounted on a ceramic and protected with a plastic cap. Several tube
arrangements with nylon housings are available for various pressure
applications.
On devices of 5 psi and above, the topside of the chip is protected against
humidity by a Silgel coating. While the sensors are designed for use with
noncorrosive, nonionic pressure media, they accommodate many gases that
are used in medical applications.
WARNING
PERSONAL INJURY
DO NOT USE these
products as safety or
emergency stop devices or
in any other application
where failure of the product
could result in personal
injury.
Failure to comply with
these instructions could
result in death or serious
injury.
WARNING
MISUSE OF DOCUMENTATION
•
The information presented in this product sheet is for reference only.
Do not use this document as a product installation guide.
•
Complete installation, operation, and maintenance information is
provided in the instructions supplied with each product.
Failure to comply with these instructions could result in death or
serious injury.
Sensing and Control
Silicon Pressure Sensors
Uncompensated/Compensated
and Compensated Calibrated
ELECTRICAL SPECIFICATIONS
XPC and XPCL @ 12 Vdc,
25 °C [77 °F]
Min.
Typ.
Max.
3.0
12.0
16.0
-1.0
0
1.0
--
--
--
5.0
--
-25 [-13]
-40 [-40]
--
--
--
--
0.25
--
3.0
--
--
--
2
±1.0
±2
1.0
--
--
85 [185]
125 [257]
50
--
XPX and XPXL @ 5 Vdc,
25 °C [77 °F]
Min.
Typ.
Max.
3.0
5.0
12.0
-50
0
50
--
--
±0.5
-2050
PPM/°C
0.25
--
3.0
--
--
--
2
--
1.0
--
--
85 [185]
125 [257]
50
--
XPC, XPCL
XPX, XPXL Series
Units
Vdc
mV
mV
% Span
% Span
kΩ
kΩ
°C
[°F]
°C
[°F]
psi
gram
Excitation Voltage
Null
Offset Temperature Shift 0
°C
to 70
°C
[32
°F
to 158
°F]**
Full Scale Temperature Shift 0
°C
to
1
70
°C
[32
°F
to 158
°F]
2
Linearity, Hysteresis Error
Input Resistance
Output Resistance
Operating Temperature
Storage Temperature
Common Mode Pressure
Weight
Note 1:
Note 2:
5.0
--
-25 [-13]
-40 [-40]
--
--
Shift is relative to 25 °C [77 °F]
Measured at 1/2 full scale rated pressure using BFSL
ABSOLUTE OUTPUT
XPC@ 12 Vdc,
25 °C [77 °F]
Output Full Scale Span, (mV)
Min.
Typ.
Max.
57
60
63
85
90
95
85
90
95
85
90
95
95
100
105
1
FS Pressure
5 psi
15 psi
30 psi
60 psi
100 psi
XPX @ 5 Vdc,
25 °C [77 °F]
Output Full Scale Span, (mV)
Min.
Typ.
Max.
112
168.5
225
168
253
338
168
253
338
189
263.5
338
210
295
380
Overpressure
(Psi)
Max.
15
45
90
180
250
GAGE/DIFFERENTIAL OUTPUT
FS Pressure
XPC and XPCL @ 12 Vdc,
25 °C [77 °F]
Output Full Scale Span, (mV)
Min.
Typ.
Max.
23
25
27
19
20
21
17
18
19
57
60
63
85
90
95
85
90
95
85
90
95
95
100
105
85
90
95
XPX and XPXL @ 12 Vdc,
25 °C [77 °F]
Output Full Scale Span, (mV)
Min.
Typ.
Max.
50
68
86
40
78.5
112
40
75
110
112
168.5
225
168
253
338
168
253
338
189
263.5
338
210
295
380
187
262.5
338
Overpressure
(Psi)
Max.
3
3
3
15
45
90
180
250
250
4 in H
2
O
10 in H
2
O
1 psi
5 psi
15 psi
30 psi
60 psi
100 psi
150 psi
Note 1: Differential common mode pressure should not exceed 50 psi
2 Honeywell
•
Sensing and Control
Silicon Pressure Sensors
Uncompensated/Compensated
and Compensated Calibrated
PHYSICAL DIMENSIONS for reference only mm (in)
D/A Housing (Differential/Absolute)
GFS/AFS Housing (Gage/Absolute Offset Axial)
XPC, XPCL
XPX, XPXL Series
GBFS Housing (Gage Backside Offset Axial)
GF/AF Housing (Gage/Absolute Axial)
Honeywell
•
Sensing and Control 3
Silicon Pressure Sensors
Uncompensated/Compensated
and Compensated Calibrated
DF Housing (Differential Axial)
XPC, XPCL
XPX, XPXL Series
GBF Housing (Gage Backside Axial)
Honeywell
•
Sensing and Control 4
Silicon Pressure Sensors
Uncompensated/Compensated
and Compensated Calibrated
GT/AT Housing (Gage/Absolute Radial)
XPC, XPCL
XPX, XPXL Series
GBT Housing (Gage Backside Radial)
DT Housing (Differential Radial)
CPC/CPCL/CPX/CPXL SERIES ORDER GUIDE
Note 1:
Option available in ported gage version only
Honeywell
•
Sensing and Control 5
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