FBA Series
Mass flow sensors for gases
FEATURES
· Ranges 0...30 to 0...±1000 sccm
1
· 1...5 V or 1...3.75 V output
· Actual mass flow sensing
· Sensortechnics PRO services
MEDIA COMPATIBILITY
To be used with dry gases only
The FBA series is NOT designed for liquid
flow and will be damaged by liquid flow through
the sensor
SPECIFICATIONS
Maximum ratings
Supply voltage
2
8 to 15 V
typ. 10 ±0.01 V
ELECTRICAL CONNECTION
P1
P2
Power consumption
FBAL001DB
all others
Temperature limits
Operating
Storage
Mechanical shock
typ. 100 mW
typ. 50 mW, max. 60 mW
-25 to 85°C
-40 to 90°C
100 g (5 drops, 6 axes)
1 2 3
Note:
1
sccm denotes standard cubic centimeters per minute
2
Output voltage is ratiometric to supply voltage
Pin 1: V
out
Pin 2: +V
s
Pin 3: GND
E / 11722 / A
1/5
www.sensortechnics.com
FBA Series
Mass flow sensors for gases
FLOW SENSOR CHARACTERISTICS
3
(V
S
= 10 ±0.01 V, T
A
= 25°C)
Part no.
FBAM200DU
FBAM030DU
F B A L001D U
F B A L001D B
Flow range
(full scale)
2 0 0 sccm
3 0 sccm
1 0 0 0 sccm
±1000 sccm
Max. flow change
4
5.0 l/sec
5.0 l/sec
5.0 l/sec
5.0 l/sec
Output voltage
@ trim point
5 V @ 2 0 0 sccm
3.4 V @ 25 sccm
5 V @ 1 0 0 0 sccm
5 ±0.15 V
PERFORMANCE CHARACTERISTICS
(V
S
= 10 ±0.01 V, T
A
= 25°C)
Characteristics
Zero offset
FBAM200DU
FBAM030DU
F B A L001D U
F B A L001D B
Repeatability and hysteresis
(combined)
Temperature effects
Offset
-25 to 85 °C
5
FBAM200DU
all others
FBAM030DU
F B A L001D B
all others
Span
-25 to 25 °C
FBAM200DU
FBAM030DU
FBAL001...
25 to 85 °C
FBAM200DU
FBAM030DU
FBAL001...
Response time
6
Common mode pressure
Notes:
3
A 5 micron filter is recommended for all devices.
4
Maximum allowable rate of flow change to prevent damage.
5
Shift is relative to 25 °C.
6
Initial warm-up time for signal conditioned circuitry is 1 minute max.
Min.
0.95
0.90
0.90
2.95
Typ.
1.0
1.0
1.0
3.0
Max.
1.05
1.10
1.10
3.05
±0.5
±1.0
Unit
V
% reading
±100
±50
±25
-4.0
±5.0
-5.0
4.0
±5.0
5.0
1.0
3.0
25
ms
p si
% reading
mV
E / 11722 / A
2/5
www.sensortechnics.com
FBA Series
Mass flow sensors for gases
OUTLINE DRAWING
7.60
(0.30)
2.8
(0.11)
2.9
(0.114)
1.40
(0.055)
6.3
(0.25)
1.8
(0.07)
5.1
(0.20)
8.3
(0.325)
54.4
(2.14)
8.4
(0.33)
P1
P2
31.5
(1.24)
23.6
(0.93)
2.8
(0.11)
1.0
(0.04)
5.1
(0.20)
7.4
(0.29)
23.9
(0.94)
30.5
(1.20)
12.7
(0.50)
15.5
(0.61)
1 2 3
0.6
(0.025)
1.52
(0.06)
2.5
(0.10)
4.1
(0.16)
third angle projection
mass:
approx. 10.8 g
dimensions in mm (inches)
Note: Positiv flow direction is defined as proceeding from port 1 (P1) to port 2 (P2) and
results in positive output.
E / 11722 / A
4/5
www.sensortechnics.com
FBA Series
Mass flow sensors for gases
GAS CORRECTION FACTORS
8
Gas type
Helium (He)
Hydrogen (H
2
)
Argon (Ar)
Nitrogen (N
2
)
Oxygen (O
2
)
Ai r
Nitric oxide (NO)
Carbon monoxide (CO)
Methane (CH
4
)
Ammonia (NH
3
)
Nitrous oxide (N
2
O)
Nitrogen dioxide (NO
2
)
Carbon dioxide (CO
2
)
Correction factor (approx.)
0.5
9
0.7
9,10
0.95
1.0
1.0
1.0
1.0
1.0
1.1
1.1
1.35
1.35
1.35
Notes:
8
Gas correction factors are referenced to nitrogen (N
2
) as calibration gas type. Approximate gas correction factors are provided
as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates.
9
When sensing Hydrogen (H
2
) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage:
Hydrogen typ. 12 V, Helium typ. 15 V
10
Hydrogen (H
2
) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing
hydrogen flow and are designated with an "H" at the end of the order number.
ORDERING INFORMATION - AVAILABLE LISTINGS
Note:
Preferred listings are highlighted in grey
Flow range
0...30 sccm
0...200 sccm
0...1000 sccm
0...±1000 sccm
Dry gas
FBAM030DU
FBAM200DU
F B A L001D U
F B A L001D B
Sensortechnics PRO services:
· Extended guarantee period of 2 years
· Improved performance characteristics
· Custom product modifications and adaptations even for small quantities
· Advanced logistics models for supply inventory and short delivery times
· Technical support through application engineers on the phone or at your site
· Fastest possible technical response for design and QA engineers
... plus other services on request
Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the
application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others.
E / 11722 / A
5/5
www.sensortechnics.com
京公网安备 11010802033920号
EEWORLD
