D6F-PH
MEMS Differential pressure Sensor
A Compact, High-accuracy Differential
Pressure Sensor with Superior
Resistance to Environments.
• High accuracy of
±3%
RD
• Linearized and temperature compensated
• Digital output (I2C communication)
• High flow impedance to reduce the influence of bypass configuration
RoHS Compliant
Refer to the
Common Precautions for the D6F Series
on page 40.
Ordering Information
Applicable fluid (See note 1.)
Air (See note 2.)
Measurement range (See note 3.)
0 to 250 Pa (0 to 1 in. H
2
O)
-50 to +50 Pa (±0.2 in. H
2
O)
-500 to +500 Pa (±2 in. H
2
O)
Model
D6F-PH0025AD1
D6F-PH0505AD3
D6F-PH5050AD3
Note: 1. The Sensor be calibrated for different gas types. Consult your Omron representative.
Note: 2. Dry gas must not contain large particles, e.g., dust, oil, or mist.
Note: 3. At standard atmospheric pressure (1013.25 hPa)
Output Characteristics
D6F-PH0025AD1
70000
60000
Output (count)
50000
40000
30000
20000
10000
0
0
50
100
150
200
250
D6F-PH0505AD3
70000
60000
Output (count)
50000
40000
30000
20000
10000
0
-50
-30
-10
10
30
50
Differential pressure (Pa)
Differential pressure (Pa)
Differential
pressure (Pa)
Output
(HEX)
0
1024
(0400)
50
13024
(32E0)
100
25024
(61C0)
150
37024
(90A0)
200
49024
(BF80)
250
61024
(EE60)
Differential
pressure (Pa)
Output
(HEX)
-50
-30
-10
0
10
30
50
1024 13024 25024 31024 37024 49024 61024
(0400) (32E0) (61C0) (7930) (90A0) (BF80) (EE60)
Measurement conditions: Power supply voltage of 3.3
±0.1
VDC, ambient tem-
perature of 25±5°C, and ambient humidity of 35% to 75%.
Differential pressure conversion formula: Dp = (Op - 1024) / 60000 × 250
Dp = Differential pressure, Op = Output
Measurement conditions: Power supply voltage of 3.3
±0.1
VDC, ambient tem-
perature of 25±5°C, and ambient humidity of 35% to 75%.
Differential pressure conversion formula: Dp = (Op - 1024) / 60000 × 100 - 50
Dp = Differential pressure, Op = Output
D6F-PH5050AD3
70000
60000
Output (count)
50000
40000
30000
20000
10000
0
-500
-300
-100
100
300
500
Differential pressure (Pa)
Differential
pressure (Pa)
Output
(HEX)
-500
-300
-100
0
100
300
500
1024 13024 25024 31024 37024 49024 61024
(0400) (32E0) (61C0) (7930) (90A0) (BF80) (EE60)
Measurement conditions: Power supply voltage of 3.3
±0.1
VDC, ambient tem-
perature of 25±5°C, and ambient humidity of 35% to 75%.
Differential pressure conversion formula: Dp = (Op - 1024) / 60000 × 1000 - 500
Dp = Differential pressure, Op = Output
Note. Change of gas density affects the sensor output.
Change of atmospheric pressure is compensated by the following formula.
Dpeff = Dp × (Pstd / Pamb)
Dpeff: Effective differential pressure
Dp: Differential pressure of the sensor output
Pstd: Standard atmospheric pressure (1013.25 hPa)
Pamb: Actual ambient atmospheric pressure (hPa)
28
D6F-PH
Characteristics/Performance
Model
Calibration Gas (See note 2.)
Port Type
Power Supply
Current Consumption
Resolution
Zero point tolerance (See note 4.)
Span tolerance (See note 4.)
Span shift due to temperature variation
Response time
Gas flow through sensor (See note 3.)
Interface
Case material
Degree of Protection
Withstand Pressure
Operating temperature (See note 5.)
Operating humidity (See note 5.)
Storage temperature (See note 5.)
Storage humidity (See note 5.)
Insulation Resistance
Dielectric Strength
Weight
Air
D6F-PH0025AD1
±50 Pa
Differential pressure range (See note 1) 0 to 250 Pa
MEMS Differential pressure Sensor
D6F-PH0505AD3
±500 Pa
D6F-PH5050AD3
Bamboo joint, Maximum outside diameter: 4.9 mm, minimum outside diameter: 4.0 mm
2.3 to 3.6 VDC
6 mA max. with no load and Vcc of 3.3 VDC, GND = 0 VDC, 25°C
12 bit
±0.2 Pa
±3% RD
< 0.5% RD per 10°C
33 ms typical at 12 bit resolution (50 ms max.)
The processing time is 6 ms typical at 12 bit resolution.
63 mL/min
I2C
PPS
IEC IP40 (Excluding tubing sections.)
10 kPa
-20 to +80°C
35 to 85 %RH
-40 to +80°C
35 to 85 %RH
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
5.2 g
23 mL/min
100 mL/min
Note: 1. At standard atmospheric pressure (1013.25 hPa)
Note: 2. Dry gas must not contain large particles, e.g., dust, oil, or mist.
Note: 3. Type D6F-PH is based on thermal flow principle. Air flow is needed to measure the differential pressure.
Typical characteristic of air flow by differential pressure is below.
Note: 4. The zero point tolerance and span tolerance are independent uncertainties and add according to the principles of error propagation.
Note: 5. With no condensation or icing.
Note: 6. Please call us about functions, such as fault detection, temperature check, Vdd check, threshold value setup.
Relation between pressure and flow rate
60
Flow rate (mL/min)
40
20
0
-20
-40
-60
-500
-300
-100
100
300
500
Differential pressure (Pa)
29
D6F-PH
Connections/Dimensions
(Unit: mm)
3.1
1.2
MEMS Differential pressure Sensor
4:SCL
3:VCC
7.2
2:GND
1:SDA
Mounting Direction
Install the Sensor so
that the joints are
facing upward.
22
Two, 4 dia.
12 10.5
6.5
Two, 4.9 dia
Two, 4 dia.
4
Two, through hole 2 dia.
10
5
Two, R2
Pin Header
3.7
Four, 0.48 dia.
Three, 2
5.25
3.37
Four, through hole 0.8 dia.
Three, 2
Recommendation size for pin header installation
(tolerrances: ±0.1)
Two, through hole 2.2 dia
16.5
18
7.05
High pressure side
26
20
10
16.5
Tubes
Install tubes made of materials such as rubber or urethane
so that they will not come out.
For urethane tubes, tubes with an outer diameter of 6 mm
and an inner diameter of 4 mm are recommended.
Soldering Conditions
Use a soldering iron for 5 s at 350°C with a pressure of 100
gf max.
Low pressure side
Two, through hole 2 dia
Electrical connection
Vcc
pull-up resister 2.2 kΩ
SDA
Sensor
(slave)
GND
Vcc
3.3
V
SCL
pull-up resister 2.2 kΩ
Vcc
Master
Communication
Serial Interface
Master/Slave
Speed mode
Signal
SCL
SDA
Serial Clock
Data Signal
I2C
Slave / Address:
Fast Mode 400kHz
HEX : 0x6C
BIN : 110_1100 (7bit)
30
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