Pressure sensors
Absolute pressure transducers
Series/Type:
Ordering code:
Date:
Version:
AT2 series
2009-08-03
3
Content of header bars 1 and 2 of data sheet will be automatically entered in headers and footers! Please fill in the
table and then change the color to "white". This ensures that the table disappears (invisible) for the customer PDF.
Don't change formatting when entering or pasting text in the table and don't add any cell or line in and to it!
Identification/Classification 1
(header 1 + top left bar):
Identification/Classification 2
(header 2 + bottom left header bar):
Ordering code: (top right header bar)
Series/Type: (top right header bar)
Preliminary data (optional):
(if necessary)
Department:
Date:
Version:
AT2 series
Preliminary data
AS SEN PD
2009-08-03
3
Pressure sensors
Absolute pressure transducers
EPCOS AG 2009. Reproduction, publication and dissemination of this publication, enclosures hereto and the information
contained therein without EPCOS' prior express consent is prohibited
Pressure sensors
Absolute pressure transducers
Preliminary data
Description
The transducers are based on piezoresistive silicon pressure sensors
from our own clean room.
The robust stainless steel casing is accentuated
through its excellent mechanical decoupling.
Features
Piezoresistive MEMS technology
Measured media:
Air, non-aggressive gases (gas humidity 0 ... 85% r.h., without dew)
Unsuitable for substances which react with glass, silicon, gold,
aluminum, stainless steel, silicone glue or silicone gel.
Whetstone bridge with mV output, proportional to pressure
and ratiometric to supply voltage
RoHS-compatible, halogen-free
TO39 package for PCB mounting
Dimensional drawings
Type TH (M5 thread connection)
AT2 series
TO39
5
4
pressure port
Ø0.45
Ø12.6
Ø11.6
6.2
6.5
4
08
Ø5.
3
2
1
All dimensions in mm
AS SEN PD
Please read Cautions and warnings and
Important notes at the end of this document.
Page 2 of 7
2009-08-03
Ø9.2
M5
Pressure sensors
Absolute pressure transducers
Preliminary data
Technical data
Absolute maximum ratings
Parameter
Temperature ranges
Storage temperature range
Operating temperature range
Soldering temperature
Supply voltage /-current
Supply voltage
DC break down voltage
Parameter
V
DD
V
is
Symbol
5)
6)
AT2 series
Symbol
Conditions
Min.
Typ.
Max.
Unit
T
st
T
a
T
solder
1)
2)
–40
–30
+125
+85
+240
°
C
°
C
°
C
<5 s
(no reflow soldering)
10
500
Min.
Typ.
Max.
V
V
Unit
Conditions
Offset / bridge resistance @ T
a
= 25 ° V
DD
= 5 V
C,
Bridge resistance
Offset
R
S
V
0
(Pin 2-4)
7)
2.6
–30
3.3
0
4.0
+30
kΩ
mV
Data in temperature range @ T
a
= –30 ... 85 ° V
DD
= 5 V
C,
Temperature hysteresis
Temperature coefficients of the
bridge resistance
Temperature coefficients of the
sensitivity
Temperature coefficient of offset
α
Rs
β
Rs
α
S
β
S
TCV
0
13)
12)
10)
11)
±0.1
2.0
3
–2.5
3
2.3
5
–2.2
5
±4
±0.5
2.6
8
–1.9
8
% FS
10 /K
10 /K
10 /K
10 /K
-6
2
-3
-6
2
-3
µV/VK
Data dependent on rated pressure
@ T
a
= 25 °C, V
DD
= 5 V
Rated pressure p
r
bar
1.600
2.500
4.000
6.000
10.00
16.00
25.00
3)
TCV
0
13)
Sensitivity S
Min.
mV/bar
45
36
23
15
9
6.4
4.1
Typ.
mV/bar
70
49
31
21
12
7.8
5
8)
Nonlinearity L
Typ.
% FS
Max.
% FS
9)
Overpressure p
ov
Min.
bar
4
5
6
4)
Max.
µV/VK
±10
±10
±10
±10
±10
±10
±10
Max.
mV/bar
95
60
38
25
15
9
5.9
±0.2
±0.3
9
15
24
37.5
AS SEN PD
Please read Cautions and warnings and
Important notes at the end of this document.
Page 3 of 7
2009-08-03
Pressure sensors
Absolute pressure transducers
Preliminary data
Terminal assignment
2 VDD+
Pin
1
2
3
Symbol
n.c.
V
DD+
V
out–
V
DD–
V
out+
Terminal assignment
Do not connect
Supply voltage
Output voltage
Supply voltage
Output voltage
AT2 series
5 Vout+
3 Vout–
4
5
The polarity of V
out
applies to positive pressure.
Negative pressure or a reversed supply voltage
results in a reversed polarity of the output voltage V
out
.
4 VDD–
Rated pressures and ordering codes
Rated pressure p
r
bar
1.600
2.500
4.000
6.000
10.00
16.00
25.00
Product type
ATA 1.600 MA0 HG
ATA 2.500 MA0 HG
ATA 4.000 MA0 HG
ATA 6.000 MA0 HG
ATA 10.00 MA0 HG
ATA 16.00 MA0 HG
ATA 25.00 MA0 HG
Ordering code
B58610T4600A001
B58610T4600A002
B58610T4600A003
B58610T4600A004
B58610T4600A005
B58610T4600A006
B58610T4600A007
AS SEN PD
Please read Cautions and warnings and
Important notes at the end of this document.
Page 4 of 7
2009-08-03
Pressure sensors
Absolute pressure transducers
Preliminary data
Symbols and terms
1)
AT2 series
2)
3)
4)
5)
6)
7)
8)
9)
Storage temperature range T
st
A storage of the pressure sensor within the temperature range T
st,min
up to T
st,max
and without applied pressure and supply voltage will not affect the performance of the pressure sensor.
Operating temperature range T
a
An operation of the pressure sensor within the temperature range T
a,min
up to T
a,max
will not affect the performance of the pressure sensor.
Rated pressure p
r
Within the rated pressure range 0 up to p
r
the signal output characteristic corresponds to this specification.
Overpressure p
OV
Pressure cycles within the pressure range 0 up to p
ov
will not affect the performance of the pressure sensor.
Supply voltage V
DD
V
DD,max
is the maximum permissible supply voltage, which can be applied without damages.
The output voltage V
out
is ratiometric (V
out
~ V
DD
).
DC break down voltage V
is
The pressure sensor withstands a high voltage between the stainless steel pressure connection and the electrical
connection V
DD
and V
out
(all short circuited) without damage.
Offset V
0
The offset V
0
is the signal output V
out
(p = 0) at zero pressure.
Sensitivity S
Within the pressure range 0 up to p
r
the output voltage is V
out
(p
x
) = V
0
+ S · p
x
Nonlinearity L (including pressure hysteresis)
The nonlinearity is the deviation of the real sensor characteristic V
out
= f(p) from the ideal straight line.
It can be approximated by a polynomial of second order, with the maximum at p
x
= p
r
/ 2 .
The equation to calculate the nonlinearity is:
L
=
10)
V
out
(p
x
)
−
V
0
p
x
−
V
out
(p
r
)
−
V
0
p
r
Temperature hysteresis
The temperature hysteresis is the change of offset, starting from the value at 25 ° after a temperature change
C
and return to 25 ° Determined during temperature cycles in operating temperature range (cycles with 1 K/min).
C.
(Full Scale): FS = V
FS
= S · p
r
Temperature coefficients of the bridge resistance
α
RS
,
β
RS
2
Bridge resistance at temperature T
x
: R
S
(T
x
) = R
S
(25 ° · [ 1 +
α
RS
· (T
x
– 25 ° +
β
RS
· (T
x
– 25 ° ]
C)
C)
C)
Values are valid within the operating temperature range T
a,min
up to T
a,max
Out of the operating temperature range, the deviation may increase.
Temperature coefficients of the sensitivity
α
S
,
β
S
2
Sensitivity at temperature T
x
: S(T
x
) = S(25 ° · [ 1 +
α
S
· (T
x
– 25 ° +
β
S
· (T
x
– 25 °
C)
C)
C) ]
Values are valid within the operating temperature range T
a,min
up to T
a,max
Out of the operating temperature range, the deviation may increase.
Temperature coefficient of offset TCV
0
Offset at temperature T
x
: V
0
(T
x
) = V
0
(25 ° + TCV
0
· (T
x
– 25 ° · V
DD
C)
C)
Values are valid within the operating temperature range T
a,min
up to T
a,max
Out of the operating temperature range, the deviation may increase.
11)
12)
13)
AS SEN PD
Please read Cautions and warnings and
Important notes at the end of this document.
Page 5 of 7
2009-08-03
京公网安备 11010802033920号
EEWORLD
