D6F-AB71
MEMS Flow Sensor
Reduction of Piping time by quick joint
connection
• Reduce the influence of pulsation flow by bypass flow path
• 30 L/min and 70 L/min of Air can be measured.
• Compact size of 30 × 84.6 × 32 mm (H × W × D).
RoHS Compliant
Refer to the
Common Precautions for the D6F Series
on page 40.
Ordering Information
MEMS Flow Sensor
Flow Port Type
Quick joint P14
Applicable fluid
Air
Flow rate range
0 to 30 L/min
0 to 70 L/min
Model
D6F-30AB71-000
D6F-70AB71-000
Output Voltage Characteristics
D6F-30AB71-000
6.0
Output voltage (V)
5.0
4.0
3.0
2.0
1.0
0.0
0
6
12
18
24
30
Accessory (Sold separately)
Type
Cable
Model
D6F-CABLE1
Flow rate (L/min)
D6F-70AB71-000
6.0
Note: Refer to
Accessories for the D6F Series
on page 39.
Output voltage (V)
5.0
4.0
3.0
2.0
1.0
0.0
0
14
28
42
56
70
Connections
D6F-30AB71-000
D6F-70AB71-000
Pin No.
1: Vcc
2: Vout
3: GND
53398-03** (Made by Molex Japan)
Flow rate (L/min)
Connector
D6F-30AB71-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
6
1.25
±0.12
12
1.91
±0.12
18
2.75
±0.12
24
3.78
±0.12
30
5.00
±0.12
Use the following connectors for connections to the D6F:
Housing
51021-0300 (Made by Molex Japan)
Terminals
50079 (Made by Molex Japan)
Wires
AWG28 to AWG26
1:Vcc 2:Vout
3:GND
D6F-70AB71-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
14
1.43
±0.12
28
2.25
±0.12
42
3.14
±0.12
56
4.06
±0.12
70
5.00
±0.12
Enlarged View
Measurement conditions: Power-supply voltage 12±0.1 VDC, ambient temper-
ature 25±5°C and ambient humidity 35 to 75%RH.
23
D6F-AB71
Characteristics/Performance
Model
Flow Range (See note 1.)
Calibration Gas (See note 2.)
Flow Port Type
Electrical Connection
Power Supply
Current Consumption
Output Voltage
Accuracy
Repeatability (See note 3.)
Output Voltage (Max.)
Output Voltage (Min.)
Rated Power Supply Voltage
Rated Output Voltage
Case
Degree of Protection
Withstand Pressure
Pressure Drop (See note 3.)
Operating Temperature (See note 4.)
Operating Humidity (See note 4.)
Storage Temperature (See note 4.)
Storage Humidity (See note 4.)
Temperature Characteristics
Insulation Resistance
Dielectric Strength
Weight
Note: 1.
Note: 2.
Note: 3.
Note: 4.
0 to 30 L/min
Air
Quick joint P14
Three-pin connector
10.8 to 26.4 VDC
15 mA max. with no load and Vcc of 12 to 24 VDC, GND = 0 VDC, 25°C
1 to 5 VDC (non-linear output, load resistance of 10 kΩ min.)
±3%F.S. (25°C characteristic)
±0.3%F.S.
5.7 VDC (Load resistance: 10 kΩ)
0 VDC (Load resistance: 10 kΩ)
26.4 VDC
6 VDC
PPS
IEC IP40 (Excluding tubing sections.)
100 kPa
0.88 kPa
–10 to +60°C
35 to 85%RH
–30 to +80°C
35 to 85%RH
±3%F.S. for 25°C characteristic at an ambient temperature of –10 to +60°C
Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
3.49 kPa
D6F-30AB71-000
0 to 70 L/min
MEMS Flow Sensor
D6F-70AB71-000
Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
75 g
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions
(Unit: mm)
●
MEMS Flow Sensors
D6F-30AB71-000
D6F-70AB71-000
20.5
Lot No. Display
A
A
1.6 max
2.5
±
0.05
2 min.
(3.7)
Recommended Quick joint male P14 type
9 max.
X
2 min.
R0.4
X
R0.4
25.8
84.6
(64.5)
(66.6)
(60.6)
B
22 dia.
26 dia.
max.
14
+0
dia.
-0.05
17.85
±
0.05
dia.
30.9
(6)
(33.4)
C0.1
Y
C0.5
C0.3
2.5
+0.25
-0
2-2.6 dia Depth 6.5 (See
note 2.)
30°
30
CROSS X-X
Description Y
26 dia.
22 dia.
18
+0.1
dia.
-0.05
See
note 1.
0.9
C0.5 (circumference)
R2 (circumference)
C0.5 (circumference)
30
32
If using a Rc3/8 converter joint, the following is recommended.
REGAL JOINT CO., LTD eigyou@rgl.co.jp
Converter male joint (Rc3/8-Quick male joint): Adapter Rc3/8-QJM14
O ring: O ring P14 fluororubber (material)
Note 1. The flow path inlet and outlet ports conform to P14-type female
quick-connect joints.
(The tube inlet and outlet ports have the same shape.)
* P14 is the number of an O-ring specified in JIS B 2401.
* The O-ring groove in the male joint must conform to P14 in JIS B 2406.
* Please obtain a male joint separately.
Note 2. To mount the Sensor with 2.6-dia. holes, use P-type self-tapping screws with
a nominal diameter of 3 mm and tighten them to a torque of 1.2 N·m max.
The screw threads must engage for 5.5 mm min.
Note 3: Use the following connectors to connect to the Sensor.
Connector
: GHR-04V-S (JST)
Terminals
: SSHL-002T-P0.2 (JST)
Wires
: AWG26 to AWG30
Circuit numbers : 1. Vcc, 2. SDA, 3. SCL, and 4. GND.
3
±0.15
6
CROSS A-A
24
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