Pressure
Freescale Semiconductor
Data Sheet: Technical Data
Document Number: MP3H6115A
Rev 5.1, 05/2012
High Temperature Accuracy
Integrated Silicon Pressure Sensor
for Measuring Absolute Pressure,
On-Chip Signal Conditioned,
Temperature Compensated and
Calibrated
Freescale's MP3H6115A series sensor integrates on-chip, bipolar op amp
circuitry and thin film resistor networks to provide a high output signal and
temperature compensation. The small form factor and high reliability of on-
chip integration make the Freescale pressure sensor a logical and
economical choice for the system designer.
The MP3H6115A series piezoresistive transducer is a state-of-the-art,
monolithic, signal conditioned, silicon pressure sensor. This sensor combines
advanced micromachining techniques, thin film metallization, and bipolar
semiconductor processing to provide an accurate, high level analog output
signal that is proportional to applied pressure.
MP3H6115A
Series
15 to 115 kPa (2.2 to 16.7 psi)
0.12 to 2.8 V Output
Application Examples
• Aviation Altimeters
• Industrial Controls
• Engine Control/Manifold Absolute
Pressure (MAP)
• Weather Station and Weather
Reporting Device Barometers
Features
•
•
•
•
•
•
Improved Accuracy at High Temperature
Available in Super Small Outline Package
1.5% Maximum Error over 0° to 85°C
Ideally suited for Microprocessor or Microcontroller-Based Systems
Temperature Compensated from -40° to +125°C
Durable Thermoplastic (PPS) Surface Mount Package
ORDERING INFORMATION
Packaging
Case No.
Options
None
Super Small Outline Package (MP3H6115A Series)
MP3H6115A6U
Rail
1317
•
MP3H6115A6T1
Tape & Reel
1317
•
MP3H6115AC6U
Rail
1317A
MP3H6115AC6T1 Tape & Reel
1317A
Device Name
# of Ports
Single
Dual
Gauge
Pressure Type
Differential
Absolute
•
•
•
•
Device
Marking
MP3H6115A
MP3H6115A
MP3H6115A
MP3H6115A
•
•
SUPER SMALL OUTLINE PACKAGES
MP3H6115A6U/T1
CASE 1317-04
MP3H6115AC6U/T1
CASE 1317A-04
© 2006-2012 Freescale Semiconductor, Inc. All rights reserved.
Pressure
Pin Descriptions
Table 1. Pin Descriptions
Pin #
1
2
3
4
5
6
7
8
Pin Name
N/C
V
S
GND
V
OUT
N/C
N/C
N/C
N/C
Do not connect
Supply Voltage
Ground
Output Voltage
Do not connect
Do not connect
Do not connect
Do not connect
Description
NOTE: Pins 1, 5, 6, 7, and 8 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is denoted by the chamfered
corner of the package.
Operating Characteristics
Table 2. Operating Characteristics
(V
S
= 3.0 Vdc, T
A
= 25°C unless otherwise noted, P1 > P2.)
Characteristic
Pressure Range
Supply Voltage
(1)
Supply Current
Minimum Pressure Offset
(2)
@ V
S
= 3.0 Volts
Full Scale Output
(3)
@ V
S
= 3.0 Volts
Full Scale Span
(4)
@ V
S
= 3.0 Volts
Accuracy
Sensitivity
Response Time
(5)
Warm-Up Time
(6)
Offset Stability
(7)
1. Device is ratiometric within this specified excitation range.
2. Offset (V
off
) is defined as the output voltage at the minimum rated pressure.
3. Full Scale Output (V
FSO
) is defined as the output voltage at the maximum or full rated pressure.
4. Full Scale Span (V
FSS
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
5. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a
specified step change in pressure.
6. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the pressure has been stabilized.
7. Offset Stability is the product's output deviation when subjected to 1000 cycles of Pulsed Pressure, Temperature Cycling with Bias Test.
(0 to 85°C)
(0 to 85°C)
(0 to 85°C)
(0 to 85°C)
Symbol
P
OP
V
S
I
o
V
off
V
FSO
V
FSS
—
V/P
t
R
—
—
Min
15
2.7
—
0.079
2.780
2.660
—
—
—
—
—
Typ
—
3.0
4.0
0.12
2.82
2.70
—
27
1.0
20
±0.25
Max
115
3.3
8.0
0.161
2.861
2.741
±1.5
—
—
—
—
Unit
kPa
Vdc
mAdc
Vdc
Vdc
Vdc
%V
FSS
mV/kPa
ms
ms
%V
FSS
MP3H6115A
2
Sensors
Freescale Semiconductor, Inc.
Pressure
Maximum Ratings
Table 3. Maximum Ratings
(1)
Parametrics
Maximum Pressure (P1
>
P2)
Storage Temperature
Operating Temperature
Output Source Current @ Full Scale Output
(2)
Output Sink Current @ Minimum Pressure Offset
(2)
Symbol
P
max
T
stg
T
A
I
o
+
I
o
-
Value
400
-40° to +125°
-40° to +125°
0.5
-0.5
Units
kPa
°C
°C
mAdc
mAdc
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
2. Maximum Output Current is controlled by effective impedance from V
out
to Gnd or V
out
to V
S
in the application circuit.
Figure 1
shows a block diagram of the internal circuitry integrated on a pressure sensor chip.
V
S
2
Sensing
Element
Thin Film
Temperature
Compensation
and
Gain Stage #1
Gain Stage #2
and Ground
Reference
Shift
Circuitry
4
V
OUT
3
GND
Pins 1, 5, 6, 7, and 8 are No Connects
Figure 1. Fully Integrated Pressure Sensor Schematic
MP3H6115A
Sensors
Freescale Semiconductor, Inc.
3
Pressure
On-chip Temperature Compensation and Calibration
Figure 2
illustrates the absolute sensing chip in the basic
Super Small Outline chip carrier (Case 1317).
Figure 3
shows a typical application circuit (output source
current operation).
Figure 4
shows the sensor output signal relative to
pressure input. Typical minimum and maximum output
curves are shown for operation over 0 to 85°C temperature
range. The output will saturate outside of the rated pressure
range.
Fluoro Silicone
Gel Die Coat
P1
Wire Bond
Lead frame
A fluorosilicone gel isolates the die surface and wire bonds
from the environment, while allowing the pressure signal to
be transmitted to the silicon diaphragm. The MP3H6115A
series pressure sensor operating characteristics, internal
reliability and qualification tests are based on use of dry air as
the pressure media. Media other than dry air may have
adverse effects on sensor performance and long-term
reliability. Contact the factory for information regarding media
compatibility in your application.
Stainless Steel
Cap
Thermoplastic
Case
Die
Absolute Element
Sealed Vacuum Reference
Die Bond
Figure 2. Cross Sectional Diagram SSOP (not to scale)
+3
V
V
S
Pin 2
100 nF
MP3H6115A
V
OUT
Pin 4
GND Pin 3
47 pF
51 K
to ADC
GND
Figure 3. Typical Application Circuit
(Output Source Current Operation)
3.0
2.75 Transfer Function:
2.5 V
OUT
= V
S
x (.009xP–.095) ± Error
V = 3.0 V
DC
2.25
S
Temp = 0 to 85°C
2.0
1.75
1.5
1.25
1.0
0.75
0.5
0.25
0
Min
Max
Output (Volts)
Typ
MP3H6115A
4
Sensors
Freescale Semiconductor, Inc.
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
105
110
115
120
Pressure (Reference to Sealed Vacuum) in kPa
Figure 4. Output versus Absolute Pressure
Pressure
Transfer Function (MP3H6115A)
Normal Transfer Value:
V
OUT
= V
S
x (0.009 x P – 0.095)
± (Pressure Error x Temp. Factor x 0.009 x V
S
)
V
S
= 3.0 ± 0.3 V
DC
Temperature Error Band
MP3H6115A Series
4.0
Temp
3.0
Temperature
Error
Factor
2.0
1.0
0.0
-40
-20
0
20
40
60
80
100
120
140
Temperature in C°
NOTE: The Temperature Multiplier is a linear response from 0°C to -40°C and from 85°C to 125°C
-40
0 to 85
125
Break Points
Multiplier
3
1
1.75
Pressure Error Band
3.0
2.0
1.0
0.0
-1.0
-2.0
Error Limits for Pressure
Pressure Error (kPa)
20
40
60
80
100
120
Pressure (in kPa)
Pressure
- 3.0
15 to 115 (kPa)
Error (Max)
±1.5 (kPa)
MP3H6115A
Sensors
Freescale Semiconductor, Inc.
5
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