Micromachined Silicon Pressure Sensors
Uncompensated and
Compensated and Calibrated
FEATURES
•
Low Cost, Small Size
•
Temperature
Compensated
•
Zero and Span Calibrated
•
Millivolt Output
•
Differential, Gage and
Absolute Pressure
•
Constant Voltage
Excitation
•
High Impedance — Low
Current
TYPICAL APPLICATIONS
•
Medical Applications
•
Applications Requiring
Small Size
•
Applications Requiring
Vacuum and Positive
Pressure Reference, or
Both
XSXL, XSX,
XSCL, XSC Series
The XSXL/XSX and XSCL/XSC Series sensors integrate silicon
micromachined sensing technology, temperature compensation, and
calibration in a complete family of low cost packages. This series offers the
most cost-effective solution for design requirements.
These piezoresistive pressure sensors use micromachined silicon chips
mounted on a ceramic and protected with a plastic cap. Several tube
arrangements with nylon housings are available for various pressure
applications.
On devices of 5 psi and above, the topside of the chip is protected
against humidity by a Silgel coating. While the sensors are designed for
use with noncorrosive, nonionic pressure media, they accommodate many
gases that are used in medical applications.
WARNING
PERSONAL INJURY
DO NOT USE these products
as safety or emergency stop
devices or in any other
application where failure of the
product could result in
personal injury.
Failure to comply with these
instructions could result in
death or serious injury.
WARNING
MISUSE OF DOCUMENTATION
•
The information presented in this product sheet is for reference only. Do
not use this document as product installation information.
•
Complete installation, operation, and maintenance information is
provided in the instructions supplied with each product.
Failure to comply with these instructions could result in death or serious
injury.
Sensing and Control
Micromachined Silicon Pressure Sensors
Uncompensated and
Compensated and Calibrated
XSXL, XSX,
XSCL, XSC Series
Max.
16.0
+1.0
±1.0
±2
1.0
--
--
+85
+125
50
--
--
Units
Vdc
mV
mV
% Span
% Span
kΩ
kΩ
°C
°C
psi
FS
in H
2
O
FS
gram
XSXL/XSX and XSCL/XSC Electrical Specifications at 12
±
0.01 Vdc Excitation @ 25
°C*
XSXL and XSX
XSCL and XSC
Min.
Typ.
Max.
Min.
Typ.
Excitation Voltage
3.0
12.0
16.0
3.0
12.0
Null
-120
0
+120
-1.0
0
Offset Temperature Shift
--
--
--
--
(0
°C
to 70
°C)**
±0.5
Full Scale Temperature Shift
-2050
--
--
--
--
(0
°C
to 70
°C)**
PPM/°C
Linearity, Hysteresis Error*** --
0.25
1.0
--
0.25
Input Resistance
5.0
--
--
5.0
--
Output Resistance
--
3.0
--
--
3.0
Operating Temperature
-25
--
+85
-25
--
Storage Temperature
-40
--
+125
-40
--
Common Mode Pressure
50
Proof Pressure
3X
--
--
3X
--
Proof Pressure XSXL/XSCL
100
100
Burst Pressure
5X
--
--
5X
--
Weight
2
2
*Note 1:
**Note 2:
***Note 3:
FS Pressure
(psi)
5
15
30
60
100
150
300
All parameters are measured at 12 Vdc excitation, pressure specs obtained with pressure applied to the front of the sensor.
Shift is relative to 25
°C
Measured at ½ full scale rated pressure using BFSL
XSX Output Full Scale Span, (mV)
Min.
270
405
405
454
504
450
324
Typ.
420
630
630
634
708
630
612
Max.
540
810
810
813
912
810
900
XSC Output Full Scale Span, (mV)
Min.
57
85
85
85
95
--
--
Typ.
60
90
90
90
100
--
--
Max.
63
95
95
95
105
--
--
XSX/XSC Absolute Output at 12 Vdc
±
0.01 Excitation @ 25
°C
XSXL/XSX and XSCL/XSC Gage and Differential* Output at 12 Vdc
±
0.01 Excitation @ 25
°C
FS Pressure
(psi)
4 in H
2
O
10 in H
2
O
1
5
15
30
60
100
150
300
XSXL/XSX Output Full Scale Span, (mV)
Min.
50
22
96
270
405
406
454
504
450
324
Typ.
68
42
180
420
630
630
634
708
630
612
Max.
86
62
204
540
810
810
813
912
810
900
XSCL/XSC Output Full Scale Span, (mV)
Min.
23
19
17
57
85
85
85
95
85
--
Typ.
25
20
18
60
90
90
90
100
90
--
Max.
27
21
19
63
95
95
95
105
95
--
*
Differential Common Mode pressure should not exceed 50 psi
2
Honeywell
•
Sensing and Control
Micromachined Silicon Pressure Sensors
Uncompensated and
Compensated and Calibrated
MOUNTING DIMENSIONS
(for reference only) mm/in
XSXL/XSX AND XSCL/XSC Series
XSXL, XSX,
XSCL, XSC Series
XSC Ceramic without Port
XSC Ceramic with Port (F)
EQUIVALENT CIRCUIT
3
4
2
MEDIA COMPATIBILITY
P1 Port: Dry Gases Only.
Media must be compatible
with epoxy based adhesive
P2 Port:
Media must be
compatible with nylon
housing, epoxy adhesive
and silicon.
1
PIN DESIGNATIONS
1. –V Excitation
2. + Output Signal
3. + V Excitation
4. – Output Signal
XSCL/XSC Differential Port
Honeywell
•
Sensing and Control
3
Micromachined Silicon Pressure Sensors
Uncompensated and
Compensated and
Calibrated
XSXL/XSX and XSCL/XSC Series Order Guide
(
Not all product combinations are released.)
XSX
Series
XSX -- uncompensated and uncalibrated, mV
XSC -- Motorola, compensated and calibrated, mV
XSXL, XSX,
XSCL, XSC Series
L
04
G
B
F
Port Option
F - Axial
T - Radial
FS - Offset Axial
1
C
Accuracy Grade
C - Commercial
Pressure Measurement
L - Low Pressure (in H2O)
No Character - Indicates Pressure (psi)
Port Operation
1
B - Backside
Pressure Range
04 in H
2
0, 10 in H
2
O
01, 05, 15, 30, 60, 100, 150 300 psi
Pressure Reference
G - Gage
D - Differential
A - Absolute > 5 psi
NOTE 1: Option available in Ported Gage Version Only
WARRANTY/REMEDY
Honeywell warrants goods of
its manufacture as being free of
defective materials and faulty
workmanship. Contact your local
sales office for warranty
information. If warranted goods
are returned to Honeywell during
the period of coverage,
Honeywell will repair or replace
without charge those items it
finds defective. The foregoing is
Buyer’s sole remedy and is
in
lieu of all other warranties,
expressed or implied,
including those of
merchantability and fitness for
a particular purpose.
Specifications may change
without notice. The information
we supply is believed to be
accurate and reliable as of this
printing. However, we assume
no responsibility for its use.
While we provide application
assistance personally, through
our literature and the Honeywell
web site, it is up to the customer
to determine the suitability of the
product in the application.
For application assistance,
current specifications, or name of
the nearest Authorized
Distributor, contact a nearby
sales office. Or call:
1-800-537-6945 USA
1-800-737-3360 Canada
1-815-235-6847 International
FAX
1-815-235-6545 USA
INTERNET
www.honeywell.com/sensing
info.sc@micro.honeywell.com
Sensing and Control
Honeywell
11 West Spring Street
Freeport, Illinois 61032
Printed with Soy Ink
on 50% Recycled Paper
008056-2-EN IL50 GLO 0801 Printed in USA
Copyright
©
1998 - 2001 by Honeywell Data Instruments Inc. All rights reserved.
www.honeywell.com/sensing
京公网安备 11010802033920号
EEWORLD
