MS765
PRESSURE SENSOR DIE (0-0.5 BAR)
•
•
•
•
0 to 50 kPa range (0.5 bar or 7.25 PSI)
Absolute/differential pressure sensors
Medical/industrial applications
RoHS-compatible & Pb-free
1
DESCRIPTION
The sensor element of the MS765 consists of a silicon micro-machined membrane. Implanted resistors make
use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This
sensor, which has outstanding span values, is available in various configurations. The absolute pressure sensor
employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer used for this
sealing has a thickness of 0.2 mm (MS765-A_0.2) or 0.5 mm (MS765-A_0.5). There are two gauge versions
available: one with a drilled Pyrex glass (MS765-D) and the other without Pyrex glass (MS765-S).
FEATURES
•
•
•
Uncompensated pressure sensor die
Output Span 170 mV @ 500 mbar & 5V
Temperature Range -40°
…+125°
C
•
•
•
Linearity 0.05% (typical)
Small Die Size 1.96 x 2.10 mm (MS765-A)
Low Cost, High reliability
APPLICATION
•
•
•
Absolute/Differential pressure sensor systems
Variometers
Liquid level control
•
•
Blood pressure meters
Industrial applications
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+
EPI
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out+
Out-
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
GND1
1
GND2
The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
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BOND PAD CONFIGURATION
Important remarks:
Out+
MS765
Vs+
As the sensing elements are diffused resistances, the voltage
applied on the ground pads (GND1 and GND2) has to be lower
than the voltage applied on supply voltage pad (Vs+).
The epitaxial layer is connected to the Vs+ pin on the die.
Gold ball bonding or aluminium wedge bonding can be used to
wire-bond the sensor. The quality of the wire-bonding is equipment
and process dependant. For this reason, it is strongly
recommended that a thorough wire-bonding qualification is made
by the end user if the sensor is going to be operated over an
extended temperature range.
GND1
Epi
GND2
Out-
LAYOUT (Absolute sensors)
MS765-A_0.2
MS765-A_0.5
Pad opening in passivation is 100
µ
m
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LAYOUT (Gauge sensors)
MS765-D
MS765-S
Pad opening in passivation is 100
µ
m
FULL SCALE PRESSURE
kPa
50
bar
0.5
mbar
500
PSI
7.5
atm
0.5
mm Hg
375
m H
2
O
5.1
Inches H
2
O
200
ABSOLUTE MAXIMUM RATINGS
Parameter
Supply voltage
Storage temperature
Pressure overload
Symbol
VS+
T
S
Ta = 25 C
-40
o
Conditions
Min
Max
20
+150
3
Unit
V
C
Bar
o
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ELECTRICAL CHARACTERISTICS
(Reference conditions: Supply Voltage VS+ = 5 Vdc; Ambient Temperature Ta = 25° )
C
Parameter
Operating Pressure Range
Operating Temperature Range
Bridge Resistance
Span (FS) @ 500 mbar
Span (FS) @ 250 mbar
Span (FS) @ 50 mbar
Zero Pressure Offset
Linearity
Temperature Coefficient of Resistance
Span
Offset
Pressure Hysteresis
Repeatability
Temperature Hysteresis
NOTES
Min
0
-40
3.0
150
75
13
-40
Typ
Max
0.5
125
Unit
Bar
°
C
kΩ
mV
mV
mV
mV
% FS
ppm/°
C
ppm/°
C
µV/°
C
% FS
% FS
% FS
1
2
Notes
3.4
170
85
17
0
± 0.05
3.8
190
95
20
40
± 0.2
+ 3300
- 2300
+ 80
± 0.15
± 0.15
0.3
+ 2400
- 1500
- 80
+ 2800
- 1900
± 0.05
± 0.05
3
4
5
1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range (0 to 0.5 bar).
2) Slope of the endpoint straight line from 25° to 60°
C
C.
3) Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°
C.
4) Same as 3) after 10 pressure cycles
5) Maximum difference in offset after one thermal cycle from -40° to +125°
C
C.
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PICKING TOOLS
The MS765 sensors have a sensitive membrane size of 0.95 x 0.95 mm and outer dimensions of 2.1 x 1.96 mm
(MS765-A_0.2, MS765-A_0.5 and MS765-D) and 2.13 x 1.99 mm (MS765-S). The pick and place tool has to be
of a soft material such as rubber (Hardness 78-97 Shore A). Its external size must fit the sensor and the vacuum
cavity must be as large as the membrane itself. Successful tests have been made with specific SPT tools, see
SPT drawing and references below.
Ensure that the ejection pins do not touch the membrane for gauge versions.
SPT references
External dimension
Internal dimensions
RTR-A1-060x060
TL & TW: 0.06 inch /1.52 mm
∅H:
0.035 inch / 0.89 mm
CTR-A1-080
∅F:
0.08 inch / 2.03 mm
∅H:
0.035 inch / 0.89 mm
ORDERING INFORMATION
Product Code
MS765-A_0.2
MS765-A_0.5
MS765-D
MS765-S
Type
Absolute
Absolute
Differential
Differential
Product
0.5 bar Pressure Sensors 0.2 mm Pyrex sawn on b/f
0.5 bar Pressure Sensors 0.5 mm Pyrex sawn on b/f
0.5 bar Pressure Sensors sawn on b/f
0.5 bar Pressure Sensors no Pyrex sawn on b/f
Art.-Nr.
76525022
76525021
76525121
76525221
The MS765 dice are supplied sawn on blue foil, mounted on plastic rings
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March 19, 2009
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DIY/Open Source Hardware
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