The Strength of Gems Psibar
®
Pressure Transducers
Starts with the Science of CVD
Gems Sensors
provides the most stable pressure sensor on
the market today by combining advanced sensing technology
with highly automated and revolutionary manufacturing
methods. The result is a sensing element comprised of silicon,
stainless steel, glass, and other metals joined on a molecular
level to form a pressure transducer that is impervious to
aging. If your application requires long life components, Gems
Psibar
®
transducers are designed with you in mind. Psibar
®
pressure transducers bring exceptional performance to a wide
variety of applications across multiple industries. The strength
of Psibar
®
pressure sensors starts with the science of CVD.
Psibar
®
transducers are manufactured using plasma-enhanced
Chemical Vapor Deposition (CVD) technology. This
sophisticated technique uses a chemical vapor to deposit thin
layers of silicon and silicon dioxide on a stainless steel
substratum to form a very sensitive and accurate polysilicon
strain gauge. Since the elements of the strain gauge are fused
together at the atomic level, the strength and integrity of the
bond far exceeds the adhesives used in common pressure
sensors. Psibar
®
transducers are inherently more stable and
less sensitive to thermal exposure and pressure cycling than
silicon-based pressure transducers. Your reward is a lower
total cost of ownership.
All sensor conditioning, including amplification, temperature
calibration and filtering is performed by our unique ASIC. It
allows configurable output and pressures ranges, sets the
zero and span tolerance and ensures interchangeability from
unit to unit. The use of an ASIC eliminates laser trimming for
temperature compensation, and unnecessary external
components. Besides reducing size and complexity, the best
reduction our ASIC accomplishes is in the price of a Psibar
®
transducer.
The CVD sensor and ASIC circuitry is complemented by all
stainless steel construction delivering excellent media
compatibility; all major components are joined by welding.
This construction technique produces a highly stable pressure
transducer that withstands harsh media, and is configurable
to satisfy specific application requirements. Psibar
®
pressure
transducers are produced in an automated, zero-defect
manufacturing process that incorporates calibration,
configuration and test systems to improve sensor accuracy
and quality. Psibar
®
pressure transducers deliver exceptionally
superior, long-term performance.
Advanced sensor manufacturing techniques
allow Psibar sensors to deliver superior
stability and long-life reliability.
Gas in
Gas out
Stainless steel Psibar wafers lie in a gas stream of plasma-enhanced gases. The
PECVD process is used because it deposits high quality silicon at low
temperature, which does not affect the state of the steel gauge. After
deposition, the silicon is ion implanted to modify resistivity.
Titanium
Polysilicon
Silicon Dioxide
Stainless Steel
The thin film is atomically fused directly to the steel surface of the gauge beam
and therefore follows the shape of the beam very accurately. This atomic fusion
is the foundation for excellent performance and stability.
Cool, Laser Welded
The CVD strain gauge is affixed to the sensor assembly in a precise, automated
laser weld process. A spot weld is made at each end and both sides of the beam
to assure there is no twisting or tilting of the beam while a stitch weld is applied.
Laser welding is fast and cool to prevent any distortion to the strain gauge.
Call Toll Free 800.378.1600
Next…surround the CVD Sensor
with a Superior Supporting Cast of Components
Along with the superiority of the CVD strain gauge, we add key
components to leverage the sensing element’s strength. The output is a
product with a unique balance of performance and value unmatched in
today’s pressure sensing market.
Psibar
®
CVD Advantages
s
s
Thicker diaphragm for handling
pulsating pressures – all
stainless steel wetted parts.
CVD sensor stability and high sensitivity
allows use of our thicker diaphragm.
17-4 PH SS sensor beam is laser
welded for distortion-free construction.
Stability –
Very repeatable from
day to day. Eliminate recalibration
costs and reduce total cost of
ownership.
Drift Free Performance –
ASIC
makes external components or
laser trimming unnecessary. Each
parameter can be adjusted for
optimal performance and
configuration. ASIC requires fewer
components which improves
product quality and performance.
Robust Construction
– Automated
manufacture improves the sensor’s
consistency, quality and reliability
while reducing production cost.
Revolutionary manufacturing
Weldless stainless
steel case.
s
ASIC chip is the brains
behind the brawn.
Programmability provides
greater linearity correction
than common thermal
compensation methods.
s
RFI/EMI & ESD protection circuit
meets and exceeds requirements
for CE marking. Protecting
against noise, voltage spikes and
static discharge.
provides tighter control improving
the sensor’s performance in harsh
environments.
No Fill Fluids to Leak or Thin
Diaphragm to Rupture
Typical Applications
s
Modular Design Configurability without
High Costs or Delays
Modular electrical
and pressure
connections,
versatile pressure
sensing cores, and
modern cellular
manufacturing
enable us to deliver
Psibar pressure
sensors specifically
suited to your
application without
a premium in cost
or time. In fact
most orders ship
within just 3 days!
s
s
s
s
s
s
Off Highway Vehicles – Load
Weighing Systems and Load
Moment Indicating
Natural Gas Equipment –
Compressors; Dispensing
Equipment
Semiconductor Processing –
Wafer Manufacturing
Power Plants – Piping Steam
Pressures
Refrigeration – Compressors and
Lube Oil Pressure Equipment
Robotics – Factory Automated
Equipment
HVAC – Compressors
Call Toll Free 800.378.1600
Specifications
Input
Pressure Range
Proof Pressure
Vacuum to 400 bar (6000 psi)
2x Full Scale (FS) – 2200/2600 Series
4x Full Scale (FS) – 1200/1600 Series
(1.5x FS for 400 bar,
≥
5000 psi)
>35x
FS
≤
6 bar (100 psi);
>20x
FS
≤60
bar (1000 psi);
>5x
FS
≤
400 bar (6000 psi)
100 million FS cycles
0.2% FS/year (non-cumulative)
0.25% FS typical (optional 0.15% FS)
(.50% FS for 1200/1600 series)
1.5% FS typical (optional 1% FS)
(2% FS for 1200/1600 series)
-20 to 80°C (-5 to 180°F)
-40 to 125°C (-22 to 260°F)
for electrical codes A, B, C, 1
-20 to 80°C (-5 to 180°F)
for electrical codes 2, D, G, 3
-20 to 50°C (-5 to 125°F)
for electrical codes F, M, P
Amplified units
>100C
maximum
24 Vdc supply
1% of span
1% of span
See ordering chart
17-4 PH Stainless Steel
See ordering chart
316 Ss, 17-4 PH ss
Mechanical Configuration – cont.
IP65 for electrical codes B,G,C,1, D, 3
IP67 for electrical code “F”
IP68 for electrical codes M, P (200 M Max.)
IP30 for electrical code “3” with flying leads
Vibration
35g peak sinusoidal, 5 to 2000 Hz
Acceleration
100g steady acceleration in any direction
0.032% FS/g for 1 bar (15 psi) range
decreasing logarithmically to 0.0007% FS/g
for 400 bar (6000 psi) range
Shock
Withstands free fall to IEC 68-2-32
procedure 1
Approvals
,
, Intrinsically safe versions available.
Meets requirements of EN50081-2 Emissions
and EN50082-2 Susceptibility.
Weight
Approx. 100 grams
(additional; cable 75 g/m)
Individual Specifications
Voltage Output units
Output
See ordering chart
Supply Voltage (Vs)
1.5 Vdc above span to 35 Vdc @ 6 mA
Supply Voltage Sensitivity 0.01% FS/Volt
Min. Load Resistance
(FS output / 2) Kohms
Current Output units
Output
4-20 mA (2 wire)
Supply Voltage (Vs)
24 Vdc, (7-35 Vdc)
Supply Voltage Sensitivity 0.01% FS/Volt
Max. Loop Resistance
(Vs-7) x 50 ohms
Millivolt Output units (2200/2600 only)
Output
100 mV +/-1 mV
Supply Voltage (Vs)
10 Vdc (15 Vdc max.) Regulated
Bridge resistance
2600-6000 ohms
Burst Pressure
Fatigue Life
Performance
Long Term Drift
Accuracy
Thermal Error
Compensated Temp.
Operating Temp.
Zero Tolerance
Span Tolerance
Mechanical Configuration
Pressure Port
Wetted Parts
Electrical Connection
Enclosure
Psibar Part Number Structure
HOW TO ORDER
Use the Bold characters from the chart below to construct a product code
SELECT:
1.
2200, 2600, 1200,
or
1600
series
2. Output: (1200 and 1600 are not available with “A” output)
A
100 mV
C
1-6 V
F
.1-5.1 V
H
1-5 V
R
0 -5 V
B
4-20 mA
D
1-11 V
G
.2-10.2 V
J
.5-5.5 V
S
0-10 V
3. Pressure Datum:
G
gauge
A
absolute (1200/1600 not available in “A”)
4. Insert pressure range code from table below
Pressure Range – psi
F15
– 0-15
G20
– 0-200
H15
– 0-1,500
F30
– 0-30
G30
– 0-300
H20
– 0-2,000
F60
– 0-60
G50
– 0-500
H30
– 0-3,000
G10
– 0-100
G60
– 0-600
H40
– 0-4,000
G15
– 0-150
H10
– 0-1,000
H50
– 0-5,000
Pressure Range – bar (optional)
A10
– 0-1
B10
– 0-10
C10
– 0-100
A16
– 0-1.6
B16
– 0-16
C16
– 0-160
A25
– 0-2.5
B25
– 0-25
C25
– 0-250
A40
– 0-4
B40
– 0-40
C40
– 0-400
A60
– 0-6
B60
– 0-60
Vac
= –1 bar
2200 B
G
G10 02
A
3
U
A
9. Performance Code
A
.25% Accuracy (2200/2600)
(.5% 1200/1600)
B
.15% (optional on 2200/2600 only)
8. Cable Length in meters
U
none
D
1
J
20
P
E
3
K
25
Q
F
5
L
30
R
G
10
M
40
S
H
15
N
50
4
75
5
200
100
6
225
125
150
170
H60
Vac
1F5
3F0
6F0
1A0
1A6
2A5
4A0
6A0
– 0-6,000
= –15 psi
– Vac-0
– Vac-15
– Vac-45
– Vac-0
– Vac-0.6
– Vac-1.5
– Vac-3
– Vac-5
1G0
1G5
2G0
3G0
– Vac-85
– Vac-135
– Vac-185
– Vac-285
7. Approvals/Protection
3
CE
2
CE for Millivolt output units
6. Electrical Connection
2200/1200 series
A
Mini DIN 9.4 mm w/mate
B
Mini DIN 9.4 mm w/o mate
2
Cable, NEMA 4, Plastic Cable Gland
F
Cable, IP67, Metal Cable gland
2600/1600 series
C
10-6 Bendix Twist Lock Plug
G
Large DIN 43650A with mate
M
Submersible Cable,
≤150
Meters
P
Submersible Cable,
>150
Meters
1
8-4 Bendix Twist Lock Plug
3
1/2˝ NPT Conduit w/cable
1B0
1B6
2B5
4B0
– Vac-9
– Vac-15
– Vac-24
– Vac-39
5. Pressure Port (for additional ports see chart or contact sales)
02
1/4 NPT Male
OJ
1/4 NPT male w/snubber
08
1/8 NPT Male
Submersible
European Threads
04
7/16 Male SAE #4
19
Plastic Nose Cone (2600 only)
01
G1/4 Male
IP
9/16 Male SAE #6
29
SS Nose Cone (2600 only)
09
G1/8 Female
Gems Sensors Inc.
One Cowles Road
Plainville, CT
06062-1198
tel
860.747.3000
fax
860.747.4244
Call Toll Free
800.378.1600
Visit Us At:
www.gemssensors.com
Specifications subject to change without notice.
© 2000 Copyright Gems Sensors Inc. All rights reserved
Printed in U.S.A. 10M Catalog No. 670
ST MEMS Sensor Creative Design Competition
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