the very fast and accurate control of gas flows over a
very wide range. Its leading performance is based on
Sensirion’s unsurpassed CMOSens
®
sensor technology
which combines a high precision sensor element with the
amplification and A/D converter circuit on one single
CMOS chip. The digital calibrated and temperature
compensated sensor signal is converted directly on the
CMOSens
chip into a PWM signal which is used in a
fast analog controlling circuit to control the valve. This
results in very high accuracy, fast settling time and large
dynamic range.
The CMOSens
sensor is packed in a vacuum tight
stainless steel package which is mounted on a rugged
www.sensirion.com
aluminum housing. This makes the SFC4000 mass flow
controller the best choice for a wide range of
applications, such as mass flow controlling in process
control, analytical instrumentation, medical applications,
fuel cells, as well as gas flow metrology.
The SFC4000 provides analog electrical interfaces for
input and output signals (0 – 5 V) and requires a
standard supply voltage between 14 and 24 VDC. It can
be operated at input pressures of up to 10 bar (145 psi).
The SFC4000 is the result of intensive optimizations of
the Sensirion PC1 mass flow controller. The new
SFC4000 is highly compatible to the PC1 and offers
even better specifications and a simpler power supply
concept.
Sensirion - the sensor company
CMOSens
SFC4000 Mass Flow Controller for Gases
Setpoint
(0-5Vdc)
Measured
Mass Flow
(0-5Vdc)
Controller
CMOSens
®
Chip
linearised &
temperature
compensated
signal
raw data
from the
on-chip sensor
Digital
linearisation &
temperature
compensation
(On-Chip)
Amplifier
(max. ambient
pressure +10bar)
Input
pressure P
1
Valve
Controlled Mass
Flow
Figure 1: Block Diagram CMOSens
SFC4000 Mass Flow Controller.
Introductory Description
The overall performance of a mass flow controller
depends mainly on the mass flow sensor used in it.
The heart of the SFC4000 Mass Flow Controller is
powered by Sensirion’s unsurpassed CMOSens
®
sensor technology. The SFC4000 Mass Flow
Controller therefore provides very high performance
and accuracy at very attractive system cost.
A CMOSens
flow sensor comprises the sensing
element on a miniaturized membrane and complete
signal processing for linearization and temperature
compensation on a silicon chip and is manufactured
using CMOS standard processes.
Due to the symmetrical arrangement of the two
temperature sensors on this membrane, an additional
temperature sensor for the temperature compensation
data and the high end A/D conversion and
amplification on the same chip the unbeatable
performance with regard to repeatability and accuracy
is achieved.
The minimal thermal mass of the membrane results in
a sensor response time of 1.7 ms only. Since the
whole design of the amplification, A/D conversion,
digital linearization and temperature compensation
are matched to that sensor speed, a fully
compensated flow measurement value is delivered
every 0.7miliseconds.
These key advantages of the CMOSens
technology
allow very fast and very stable and accurate flow
control using conservative and stable control
algorithms.
Another advantage of the CMOSens
technology is
its resistance to electromagnetic disturbances (EMC).
The CMOSens
sensor itself is packed in a vacuum
tight stainless steel package which is mounted on a
rugged aluminum housing. This allows the use of the
SFC4000 Mass Flow Controller for a wide range of
applications.
The SFC4000 device controls true mass flow
independent of the ambient temperature and pressure
changes. You simply connect the gas supply of the
gas to be controlled to the SFC4000 device, set the
flow value via the analog interface and get additional
feedback via the analog output signal. The analog
interface allows an easy connection to the SFC4000
device.
The standard calibration gas is N
2
or Air (available off-
the-shelf). Calibration with O
2
, He, H
2
, Ar, SF
6
, C
4
F
8
is
available for middle size and large volume OEM
projects. Calibration with other gases or mixtures of
gases is available on request for large volume OEM
customers.
www.sensirion.com
Product InformationJanuary 2012 – v2.6
2/15
CMOSens
SFC4000 Mass Flow Controller for Gases
1
CMOSens
SFC4000 Mass Flow Controller Performance
Table 1: Overview of CMOSens
SFC4000 Mass Flow Controller Specifications
All data, unless otherwise noted, apply for calibration conditions and refer to the setpoint: 20°C, Nitrogen (N2), 2.0 bar overpressure (inlet, 3.0 bar
absolute) against atmosphere (outlet, 1.0 bar absolute), horizontal mounting position, straight VCR inlet fitting (length min. 5 x
)
or down-mount.
Specification
Range:
Model Number
Full Scale Flow
(Air equivalent)
Performance:
Accuracy
1, 2
Repeatability
2
Typical Settling Time
6
Offset
7
Standard Calibration Gas
8
Other gases
Control Range
Operating Temperature
(Ambient and Gas)
Temp. Coeff. Zero
Temp. Coeff. Span
Position Sensitivity
correction
9
Pressure Coefficient
Pressure Drop at Full
Flow
10
Maximum Input
Pressure
11
Maximum Differential
Pressure
12
Leak Integrity MFC
external
Leak Integrity through
closed Valve
Wetted Materials
Warming Up time
13
1
2
Condition
SFC4100
0.05
10 - 100% FS
3
<10% FS
10-100% FS
<10% FS
10-100% FS
0.8
0.08
0.1
0.01
< 100
< 0.08
N
2
0.5
0.8
0.08
0.1
0.01
< 100
< 0.08
Value
SFC4200
1,2,5
0.8
0.08
0.1
0.01
< 100
< 0.08
Air
>= 1:1'000
0 – 50 / 32 – 122
0.005
0.06
on request
< -0.15 / 1 bar
20
1
0.1
5
0.2
0.02
< 250
< 0.1
Unit
l
n
/min
% s.p.
4
% FS
% s.p.
% FS
ms
% FS
See paragraph Ordering Information at end of this data sheet
°C / °F
% FS / °C
% s.p. / °C
% FS
% s.p.
<3.0 / 43
10 / 145
4 / 58
bar / psig
bar / psig
bar / psig
mbar l/s He
mbar l/s He
p
abs.
= 1 bar
gas: air
<0.5 / 22
10 / 145
5 / 73
<2.0 / 29
10 / 145
5 / 73
<2.0 / 29
10 / 145
5 / 73
9x10
-9
(starting with Serial No 1204xxxx; before 1x10
-6
)
1x10
-6
Si, Si
3
N
4
, SiOx, Viton
®
, SSL316L, Glob Top, Glass, Al,
Brass
5
sec.
Including Offset, Non-Linearity, Hysteresis
Specification (%s.p.) for 0.05ln/min version valid from 20% to 100% of full scale
3
in % of full scale (FS)
4
in % of setpoint (s.p.) = measured value (m.v.) = of rate = of reading
5
For Setpoints <4%FS (0-0.2V) the Accuracy is 0.3%FS
6
Step answer within 10% and 100% of full scale to within
2%
of setpoint. 3.0bar input pressure, 1.0bar ambient/outlet pressure. Gas type: N2
(Depending on gas type, this specification may vary from 30 to 300 ms)
7
Output at 0.00V setpoint
8
For other available gas configurations see Table 8 on the page 12
9
For any other position than horizontal flow path mounting, electrical connector on top, value given applicable for N
2
only, may vary with gas
10
1 bar = 100 000 Pa = 0.9869 atm = 401.9 inch H
2
O = 14.5 psi. For availability of lower pressure drop option, contact Sensirion AG
11
Pressure between flow inlet and ambient
12
Pressure between flow inlet and flow outlet. For availability of higher differential pressure option, contact Sensirion AG
13
up to within
2
% of setpoint (s.p.)
www.sensirion.com
Product InformationJanuary 2012 – v2.6
3/15
CMOSens
SFC4000 Mass Flow Controller for Gases
1.1 Accuracy
Figure 2 compares the setpoint accuracy of a
conventional mass flow controller with a CMOSens
SFC4000. Typically an accuracy of 1% FS (full scale)
is stated for mass flow controllers using conventional
sensor technology. The graph shows this in relation to
the accuracy of the SFC4000 mass flow controller. It
can be seen that especially at low flow rates the
CMOSens
technology
reaches
superior
performance.
In Figure 3 the repeatability of the SFC4000 devices
is compared with the repeatability of a typical mass
flow controller (MFC). It emphasizes the superior
performance of the SFC4000 device.
1.3
Settling Time
The CMOSens
SFC4000 Mass Flow Controller has
a ultra-fast settling time
14
of less than 100 ms only.
Figure 4 shows the typical response time of the
SFC4000 in comparison to a mass flow controller
using conventional sensor technology.
100%
10.0
CMOSens® SFC4000
8.0
Accuracy in % of setpoint
Response time to 100% of set point
6.0
4.0
2.0
0.0
0
20
Typical Conventional MFC with
1% FS
80%
60%
40%
20%
0%
CMOSens® SFC4000
Typical Conventional MFC with
T98 = 1 sec
40
60
Flow in [%FS]
80
100
0
200
400
600
Time in [ms]
800
1000
Figure 2: Comparison of typical accuracies
Figure 4: Settling time of the SFC4000 to 100% of set
point
1.2
1.2
1.0
0.8
0.6
0.4
0.2
0.0
0
Repeatability
CMOSens® SFC4000
Typical Conventional MFC
with 0.2 %FS
Repeatability in [% of set point]
20
40
60
Flow in [%FS]
80
100
Figure 3: Comparison of the repeatability of the
CMOSens
®
SFC4000 device compared to a typical
mass flow controller (MFC).
14
Settling time: Time the controller needs to be within 2% of his
new setpoint after a change.
www.sensirion.com
Product InformationJanuary 2012 – v2.6
4/15
CMOSens
SFC4000 Mass Flow Controller for Gases
2
2.1
Working Principle of the CMOSens
Mass Flow Controller
Calorimetric Principle for Mass Flow
Measurement
The CMOSens
SFC4000 measures the mass gas
flow using the calorimetric principle of measuring heat
transfer. A heating element on a thermally insulated
membrane is kept above ambient temperature. In the
presence of gas flow, the temperature distribution up-
and downstream is disturbed. This asymmetry is then
measured. The whole arrangement is carried out on a
silicon chip using CMOS standard processes. Due to
the minimal thermal mass of the membrane,
symmetrical arrangement, and accurate temperature
measurement, the revolutionary specifications of the
SFC4000 devices are achieved.
The arrangement on a CMOSens
chip also allows
the cross sectional diameter of the sensor channel to
be 0.9 x 1.5 mm, which is much larger than structures
in conventional mass flow controllers (i.e. 0.3 – 0.5
mm diameter). This channel design makes the
technology more robust against i.e. particle polluted
or humidified gasses.
In Figure 7, the cross sectional view of the sensor
itself sitting in its stainless steel package is shown
(see section 2.4 for packaging details).
Figure 5: Picture of a CMOSens
chip
2.3
Signal processing
2.2
CMOSens
®
sensor technology
CMOSens
®
is the base technology for all Sensirion
sensor modules and sensor systems. The unification
of semiconductor chip and sensor technology serves
as a platform for highly integrated system solutions
with excellent sensor precision and reliability. With
CMOSens
®
, the on-chip sensor element forms an
integrated whole with a high-end amplification and
A/D converter circuit. Due to the compact single-chip
design, CMOSens
®
based sensors are very resistant
to electromagnetic disturbances (EMC). This is
another important technical advantage of this state of
the art sensor technology. As a result, CMOSens
®
based multi sensor modules offer excellent sensor
precision, fast response time and a very large
dynamic measurement range.
In addition to the flow sensor, the CMOSens
chip
also incorporates a temperature sensor which
constantly measures the temperature of the chip and
due to the small thermal mass also the temperature of
the gas. This temperature information is used directly
for the temperature compensation.
The CMOSens
chip used in the SFC4000 Mass
Flow Controller is able to communicate directly with
an external EEPROM.
In combination with on-chip intelligence the output
signal of the chip can be linearized, temperature
compensated and calibrated using the calibration
data stored in the EEPROM. The generated PWM
output signal of the CMOSens
chip is then directly
used in the controller circuit for the control of the
valve and subsequently the mass flow.
With its internal clock rate of several hundred kHz the
CMOSens
chip measures the flow very rapidly and
precisely. The generated flow signal is then
processed by the on-chip A/D and linearization and
temperature compensation is calculated. The final
PWM signal of the CMOSens
sensor chip is ready to
use for the controller circuit of the valve.
The complete layout of the CMOSens
flow chip is
strictly designed for best performance of each
element and for fast and effective interaction between
each other. This ensures optimal signal processing at
very high precision and speed.
Since the produced PWM signal is very fast, accurate
flow control can be reached by using conservative
and stable control algorithms.
Based on the high integration on the CMOSens
chip, excellent sensor precision is reached resulting in
high performance of the whole CMOSens
SFC4000
Mass Flow Controller at very attractive system cost.
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