SILICON
MICROSTRUCTURES
INCORPORATED
•
OEM SILICON PRESSURE SENSOR DIE
SM5102
OEM Silicon Pressure Die
DESCRIPTION
The SM5102 is a silicon micro-machined,
piezoresistive pressure-sensing chip. These
devices are available in full-scale ranges
from 5 to 300 psi and are ideal for OEM and
high volume applications.
Provided in die form, these sensors can be
mounted on ceramic or PC board substrates
as part of an OEM system. They also may
be packaged into proprietary, or application
specific sensor lines.
Die are probed, inked and diced, and
shipped on tape.
Custom pressure ranges available in high-
volume applications. Field-shield, high
stability parts are also available on a
custom-bases.
Compensated
FEATURES
•
•
•
•
•
High Volume, Low Cost
Gage and Absolute Versions
Constant Current or Constant Voltage
Drive
Millivolt Output
5, 15, 30, 60, 100 and 300 PSI Ranges
Available
APPLICATIONS
•
•
•
•
•
•
Altimeters
Tire Gauges
Medical Instrumentation
Industrial Sensors
Diving Modules
Home Appliances
Rev 1.2 8_02
2001-2002
Silicon Microstructures, Inc.
♦
1701 McCarthy Blvd.
♦
Milpitas, CA 95035 USA
Tel: 408-577-0100
♦
Fax: 408-577-0123
♦
Sales@Si-Micro.Com
♦
WWW.Si-Micro.Com
SM5102
CHARACTERISTICS FOR SM5102 -
SPECIFICATIONS
All parameters are measured at 5.000V supply at room temperature, unless otherwise specified.
Min
Excitation Voltage
Excitation Current
Span (FS Range)
5 psi
15 psi
30 psi
60 psi
100 psi
300 psi
Offset
TC Span
TC Offset
TC Resistance
Linearity
Bridge Impedance
Proof Pressure
Burst Pressure
Operating Temperature
Storage Temperature
0
0
75
115
130
130
130
130
-50
-24
-7
24
-0.3
2.70
3X
5X
-40
-55
Typ
5
1.5
100
145
165
180
200
220
0
-19
-1
27.5
±0.05
3.15
Max
10
3
125
175
195
220
250
275
50
-15.5
+7
33
0.3
4.00
125
150
Units
V
mA
mV
mV
mV
mV
mV
mV
mV
o
%FS/100 C
o
%FS/100 C
o
%/100 C
%FS
kohm
Rated FS
Rated FS
o
C
o
C
1.80 mm
Notes
1
2
3
4
Notes:
1.
Bridge may be driven with positive or negative voltage
as long as Vsub is not connected. Positive output for positive pressure
applied to circuit side of die when bridge is driven with positive voltage.
2.
Measured at 5V constant voltage excitation.
3.
Measured from 0 to 70 C
4.
Defined as best straight line.
+V exc.
+ Sig
1.80 mm
1.38 mm
-V exc.
Vsub
Pad size =
0.12 X 0.12 mm
-V exc.
-Sig
Positive output for pressure
applied to the top (circuit)
side of the sensor
ORDERING INFORMATION:
Model Number
Die dimensions in mm
2.00 mm
SM5102 die (2 mm square as sawn).
Covered under USA Mask-Copyright and may be covered
under US Patent Numbers 5,812,047 and 6,089,099
See separate Application Notes for typical range of variation in Saw
dimensions.
Pressure Ranges
PSI
5102
5
005
15
015
30
030
60
060
100
100
300
300
Custom ranges available in high volumes
Pressure Type
A: Absolute
G: Gage
SM5102- 015 - A
Pressure
range
Pressure
Type
Notice:
Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the use of any
circuits described herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement. While the information in this
publication has been checked, no responsibility, however, is assumed for inaccuracies.
Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to
cause failure of a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications.
Rev 1.2 8_02
2001-2002
Silicon Microstructures, Inc.
♦
1701 McCarthy Blvd.
♦
Milpitas, CA 95035 USA
Tel: 408-577-0100
♦
Fax: 408-577-0123
♦
Sales@Si-Micro.Com
♦
WWW.Si-Micro.Com
Industrial Control Electronics
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