Silicon Piezoresistive
Absolute Pressure Sensor
Preliminary Data
Features
•
•
•
•
Low pressure and temperature hysteresis
Fast response
High sensitivity and linearity
Fatigue free monocrystaline silicon diaphragm
giving high load cycle stability
• High long term stability
• Built in silicon temperature sensor
• Provided for further fabrication, protection cap
Type and
Marking
KPY 62 AK
KPY 63 AK
KPY 64 AK
KPY 65 AK
KPY 66 AK
KPY 67 AK
KPY 68 AK
KPY 69 AK
Pin Configuration
1
2
3
4
5
6
7
8
Temperature sensor
(typ.
R
25
= 2 kΩ)
Not connected
+
V
IN
; Temperature sensor
−
V
OUT
Capillary tube
Shielding, to be connected
to +
V
IN
−
V
IN
+
V
OUT
Symbol
Pressure Range
0
…
0.6
0
…
1.6
0
…
4
0
…
10
0
…
25
0
…
60
0
…
160
0
…
400
Unit
bar
KPY 62-AK
KPY 69-AK
Similar to TO-39-2
Ordering Code
Q62705-K275
Q62705-K276
Q62705-K277
Q62705-K278
Q62705-K279
Q62705-K280
Q62705-K281
Q62705-K282
P
0
…
P
N
Semiconductor Group
1
1998-05-08
KPY 62-AK
KPY 69-AK
Absolute Maximum Ratings
Parameter
Pressure overload
KPY 62 AK
KPY 63 AK
KPY 64 AK
KPY 65 AK
KPY 66 AK
KPY 67 AK
KPY 68 AK
KPY 69 AK
Operating temperature range
Storage temperature range
Supply voltage
Symbol
Limit Values Unit
bar
4
8
12
20
50
70
200
500
P
MAX
T
A
T
stg
V
IN
−
40
… +
125 ˚C
−
50
… +
125 ˚C
12
V
Electrical Characteristics
at
T
A
= 25 ˚C and
V
IN
= 5 V, unless otherwise specified.
Parameter
Bridge resistance
Sensitivity
KPY 62 AK
KPY 63 AK
KPY 64 AK
KPY 65 AK
KPY 66 AK
KPY 67 AK
KPY 68 AK
KPY 69 AK
Output voltage
KPY 62 AK
KPY 63 AK
KPY 64 AK
KPY 65 AK
KPY 66 AK
KPY 67 AK
KPY 68 AK
KPY 69 AK
Symbol
min.
Limit Values
typ.
−
43.0
20.0
11.0
5.2
2.1
1.0
0.53
0.22
130
160
220
260
260
300
420
440
max.
8
73.3
30.0
15.5
8.0
3.0
1.4
0.66
0.27
220
240
310
400
370
410
530
550
kΩ
mV/
Vbar
4
23.3
11.3
6.5
3.6
1.1
0.63
0.38
0.16
Unit
R
B
s
V
fin
70
90
130
180
150
190
310
330
mV
Semiconductor Group
2
1998-05-08
KPY 62-AK
KPY 69-AK
Electrical Characteristics
(cont’d)
at
T
A
= 25 ˚C and
V
IN
= 5 V, unless otherwise specified.
Parameter
Offset voltage
P
=
P
0
Linearity error (Best fit straight line)
P
0
=
P
0
…
P
N
KPY 62
…
65 AK
KPY 66
…
69 AK
Pressure hysteresis
P
H
P
1
=
P
0
,
P
2
=
P
N
,
P
3
=
P
0
KPY 62
…
69 AK
Symbol
min.
Limit Values
typ.
−
max.
mV
−
25
+
25
%
V
fin
−
−
−
±
0.3
±
0.3
±
0.1
±
0.5
−
−
%
V
fin
Unit
V
0
F
L
Electrical Characteristics
at
T
1
= 25 ˚C,
T
2
= 125 ˚C,
T
3
= 25 ˚C and
V
IN
= 5 V, unless otherwise specified.
Parameter
Temperature coefficient of
V
fin
KPY 62
…
69 AK
Temperature coefficient of
V
0
KPY 62 AK
KPY 63 AK
KPY 64 AK
KPY 65 AK
KPY 66 AK
KPY 67 AK
KPY 68 AK
KPY 69 AK
Temperature coefficient of
R
B
KPY 62
…
69 AK
Temperature hysteresis of
V
0
;
V
fin
KPY 62
…
66 AK
KPY 67
…
69 AK
Symbol
min.
Limit Values
typ.
−
0.18
−
−
−
−
−
−
−
−
+
0.23
±
0.2
−
0.1
max.
%/K
−
0.22
−
0.15
%/K
−
0.04
−
0.04
−
0.02
−
0.02
−
0.02
−
0.01
−
0.01
−
0.01
+
0.04
+
0.04
+
0.02
+
0.02
+
0.02
+
0.01
+
0.01
+
0.01
%/K
−
−
% v.
V
fin
−
−
−
−
Unit
TC
Vfin
TC
V0
TC
RB
TH
Semiconductor Group
3
1998-05-08
KPY 62-AK
KPY 69-AK
Package Outline
Similar to TO-39-2
Basic Component
12
±0.1
8
±0.5
View on Chip
9.3
-0.2
7.6
±0.1
6
7
8
1
2
5
4
3
ø1.05
±0.1
ø0.65
-0.1
2.6 max
Bond Wire
Loop
Component Delivery Form
5.08
18.2
±0.6
14.2
±0.6
3.59
ø11.5
-0.5
3.59
5
±0.6
6.2
±0.6
8
±0.6
Weight approx. 1.5 g
45˚
GMT05959
Exterior Packaging
I.e. tubes, trays, boxes are shown in our Data Book “Package Information”.
Semiconductor Group
4
1998-05-08
5.08
Dimensions in mm
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