2D CMOS Laser Type
High-precision Displacement Measurement Sensors Bringing Smart Sensors into New Fields.
ZS-HL Series
Range of models with measuring center distance of 20 to 1,500 mm.
Achieves maximum resolution of 0.02
µm
(0.001
µm).
Maximum response speed of 110
µs.
Parallel output supported.
More P.6
Very High-performance Sensors that Support Core Quality
from Very Long-range to Extremely Precise Measurements
Highly Advanced Sensing Fu
ZS-HLDS150
1500
Measuring center distance
See
ZS-HLDS60
Record
Data Storage Unit ZS-DSU
ZS-DSU
Ideal for ZS Series Data Logging
Enables onsite high-speed logging of data in external
memory (compact flash card) for the Sensor Controller or
Multi-Controller.
Effective for building traceability systems, statistical
process control (SPC), and much more.
Control
Multi-Controller
ZS-MDC
Enables full application of Sensor
Controller information.
Transfers data between multi-connected Sensor
Controllers and performs high-speed
multiprocessing.
Connects to up to nine Sensor Controllers.
600
ZS-HLDS10
ZS-HLDS5
ZS-HLDS2
ZS-LD10G/LD15G
ZS-HLDS2VT
High-speed sampling rate: 150 µs
Powerful support for logging data using various
trigger functions.
More P.18
More P.17
100
25±2mm
50
20
15
10
15±0.75mm
10±0.5mm
20±1mm
50±5mm
100±20mm
600±350mm
1500±500mm
02
Smart Sensor
Advanced technology is carried
Business card size
ZS-L Series
USB
More P.14
Beam Shapes
Spot and line beam selection.
Wide Range of Products
Long-range, middle-range, and short-range models.
Measuring
center distance
Diffuse Reflective Sensors
ZS-LDC
Manipulate
Sensor Controllers
ZS-HLDC/LDC
Enable maximum sensing performance with fully digital
processing.
Culmination of OMRON's lead-edge digital technology. Enables easy
utilization of the ultimate in measurement performance.
Business card size
USB provided as a standard feature.
Monitor
SmartMonitor
Professional
ZS-SW11E V3
Setting Software for the ZS Series
Meets a wide range of logging needs.
Supports high-speed simultaneous multichannel waveform
graphs.
Excel macros provided for simple analysis.
350
ZS-LD350S
Regular
Reflective Sensors
200
ZS-LD200
130
ZS-LD130
More P.12
More P.19
80
50
40
20
ZS-LD80
ZS-LD50/LD50S
ZS-LD40T
Spot beam
Line beam
Line beam
Line beam
Line/spot beam
Line beam
ZS-LD20T/LD20ST
Line/spot beam
03
Ratings and Specifications
Expansion Units
Standard Sensors
Standard Sensors Most Suitable for a Variety of High-precision
Displacement Measurements, Including Spot Detection,
Wide-range Detection, and Long-distance Detection.
High-performance Sensors
nctions in a Compact Package
+XX-XX-XXX-XXX
+XX-XX-XXX-XXX
Main Applications
High Performance
ZS-HL Series
Very High-performance Sensors that Support Core Quality from Very Long-range to
Extremely Precise Measurements
ZS-HLDS2T
ZS-HLDS2VT
ZS-HLDS5T
ZS-HLDS10
ZS-HLDS60
ZS-HLDS150
ZS-LD10GT/LD15GT
ZS-LD10G/15G
Sealer coating
Glass substrate
Ideal for measuring
and controlling
dispenser nozzle gaps
when applying sealer.
Ideal for measuring
the thickness of sili-
cone or compound
semiconductor wafers
in polishing and testing
processes.
Ideal for measuring
the potting resin height
for electronic
components.
Ideal for measuring
liquid gasket (FPIG)
application amounts.
Prevents defects such
as insufficient seal.
Ideal for confirming
positioning and
repeatability accuracy
of XY stages.
Ideal for level
detection for liquid
crystal coaters and
PDP fluorescent
substances.
Protruding objects and
steps can be measured
from a distance for
measurement objects
that cannot be
accessed easily.
Standard
ZS-L Series
Standard Sensors Ideal for a Variety of High-precision Displacement Measurements,
Including Spot Detection, Wide-range Detection, and Long-distance Detection
ZS-LD20ST
ZS-LD40T
ZS-LD50/LD80
ZS-LD200
ZS-LD350S
3D shape measurement using
automatic X-Y stage
Ideal for measurements
requiring discrimination
between minute parts or
fine shape repeatability.
04
Ideal for measuring glass
thickness and nozzle
gaps when coating glass
with resist or sealer.
Ideal for measuring the
warp of resin blades in
copy machine toners.
Ideal for checking the
precision of door
installations.
Ideal for checking the
flatness of robot arms
that transport wafers in
load ports.
S m a rt S en sor
Applications by Industry
Automobile and Automotive Parts
Measuring Car Bodies
Measuring Door Attachment Offsets
Advanced technology is carried
Electronic Components
Measuring Tire Exteriors
Inspecting Board Heights
Inspecting for Board Coplanarity
Measuring Shape for
Positioning Laminated Ceramics
1 axis scan
Capacitor
PCB
SmartMonitor graph screen
Spot beam
Line beam
Semiconductors
Measuring Electrode Thickness
on Compound Semiconductors
Measuring Wafer Warping
and Thickness
Household Appliances and Audio-visual
Measuring Arm Inclination
Simultaneous Measuring of Touch
Panel Film Thickness and Gap
DVD Chassis Flatness Inspections
Digital Camera Tube Lens Inspection
LCDs and PDPs
Measuring Glass Undulation
Measuring Glass Surfaces
Inspecting Glass Heights (Autofocus)
Rubber, Resin, and Film
Measuring Electrode
Thickness on Dielectrics
Moving Workpieces (Black Rubber)
Measuring Depth of O-Ring Insertion
05
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