Model 3022 Accelerometer
Piezoresistive MEMS
DC Response
Circuit Board Mountable
Low Cost
The Model 3022
is a silicon MEMS
accelerometer in a Wheatstone bridge
configuration. The accelerometer is
packaged on a ceramic substrate with
an epoxy sealed ceramic cover and is
designed for adhesive mounting. The
accelerometer is offered in ranges from
±2g to ±200g range and provides a flat
frequency response to minimum
2000Hz. The silicon MEMS sensor is
gas damped and incorporates over-
range stops for high-g shock protection.
For a similar accelerometer designed
for bolt mounting, see the
Model 3028.
Dimensions
FEATURES
Adhesive Mounted
±0.5% Non-linearity
Open Wheatstone Bridge
DC Response
Gas Damping
Built-in Overrange Stops
Low Power Consumption
APPLICATIONS
Vibration & Shock Monitoring
Motion Control
Impact & Shock Testing
Modal Analysis
Embedded Applications
Machinery
Model 3022 Rev C
32 Journey Ste. 150 Aliso Viejo, CA 92656
www.meas-spec.com
949-716-5377
01/09/2013
t&m@meas-spec.com
Model 3022 Accelerometer
Performance Specifications
All values are typical at +24°C, 100Hz and 5Vdc excitation unless otherwise stated. Measurement Specialties reserves the right to update and change
these specifications without notice. Measurement Specialties’ family of
DC Response Embedded Accelerometers
are used for vibration/shock monitoring,
structural analysis, motion control, impact testing, and transportation study. These MEMS sensors feature internal gas damping and outstanding shock
survivability.
Parameters
DYNAMIC
Range (g)
Sensitivity (mV/g)
1
Frequency Response (Hz)
Natural Frequency (Hz)
Non-Linearity (%FSO)
Transverse Sensitivity (%)
Damping Ratio
Shock Limit (g)
ELECTRICAL
Zero Acceleration Output (mV)
Excitation Voltage (Vdc)
Input Resistance (Ω)
Output Resistance (Ω)
Insulation Resistance (MΩ)
Residual Noise (µV RMS)
Ground Isolation
ENVIRONMENTAL
Thermal Zero Shift (%FSO/°C)
Thermal Sensitivity Shift (%/°C)
Operating Temperature (°C)
Compensated Temperature (°C)
Storage Temperature (°C)
Notes
±2
8.0-20.0
0-150
700
±0.5
3
0.7
5000
±5
6.0-15.0
0-250
800
±0.5
3
0.7
5000
±10
3.0-6.0
0-400
1000
±0.5
3
0.7
5000
±20
1.5-3.0
0-600
1500
±0.5
3
0.7
5000
±50
0.6-1.5
0-1000
4000
±0.5
3
0.7
5000
±100
0.3-0.6
0-1500
6000
±0.5
3
0.7
5000
±200
0.15-0.3
0-2000
8000
±0.5
3
0.6
5000
@5Vdc Excitation
±5%
±25
±25
±25
2 to 10
2 to 10
2 to 10
2500-
2500-
2500-
6500
6500
6500
2500-
2500-
2500-
6500
6500
6500
>100
>100
>100
10
10
10
Isolated from Mounting Surface
±25
2 to 10
2500-
6500
2500-
6500
>100
10
±25
2 to 10
2500-
6500
2500-
6500
>100
10
±25
2 to 10
2500-
6500
2500-
6500
>100
10
±25
2 to 10
2500-
6500
2500-
6500
>100
10
Differential
@50Vdc
Maximum
-0.09
-0.09
-0.15
-0.15
-40 to +125
Not Compensated
-40 to +125
-0.09
-0.15
-0.09
-0.15
-0.09
-0.15
-0.09
-0.15
-0.09
-0.15
Typical
Typical
See Note 2
PHYSICAL
Case Material
Ceramic
Weight (grams)
3.1
Mounting
Adhesive or solder
1
Output is ratiometric to excitation voltage
2
Order model 3022-XXX-10254 for temperature compensation resistor values included in the calibration certificate.
The information in this sheet has been carefully reviewed and is believed to be accurate; however, no responsibility is assumed for inaccuracies. Furthermore, this
information does not convey to the purchaser of such devices any license under the patent rights to the manufacturer. Measurement Specialties, Inc. reserves the right
to make changes without further notice to any product herein. Measurement Specialties, Inc. makes no warranty, representation or guarantee regarding the suitability of
its product for any particular purpose, nor does Measurement Specialties, Inc. assume any liability arising out of the application or use of any product or circuit and
specifically disclaims any and all liability, including without limitation consequential or incidental damages. Typical parameters can and do vary in different applications.
All operating parameters must be validated for each customer application by customer’s technical experts. Measurement Specialties, Inc. does not convey any license
under its patent rights nor the rights of others.
Ordering Info
PART NUMBERING
Model Number+Range+Electrical Connection
3022-GGG-P
l l
l l_____Electrical Connection (P=pins, N=solder pads)
l___________Range (010 is 10g)
Example: 3022-010-P
Model 3022, 10g, Pins
Model 3022 Rev C
32 Journey Ste. 150 Aliso Viejo, CA 92656
www.meas-spec.com
949-716-5377
01/09/2013
t&m@meas-spec.com
Analogue and Mixed Signal
京公网安备 11010802033920号
EEWORLD
