Smart Sensors (Inductive Displacement Type)
ZX-E Series
High-accuracy Detection of Met-
al Workpiece Displacement
• Sensor Heads support a wide variety of
applications.
• Linearity can be adjusted for non-ferrous
metals, such as SUS and aluminum, using
the material selection function.
• Simple linearity compensation (teaching).
• Easily perform calculation for two Sensors
by using a Calculating Unit.
• Prevent mutual interference for up to five
Units by using a Calculating Unit
For the most recent information on models that have been certified for
safety standards, refer to your OMRON website.
.
Ordering Information
■
Sensors
Sensor Heads
(Refer
to Dimensions on page 11.)
Shape
Cylindrical
Dimensions
3 dia. x 18 mm
5.4 dia. x 18 mm
8 dia. x 22 mm
Screw-shaped
Flat
Heat-resistant, cylindrical
M10 x 22 mm
M18 x 46.3 mm
30 x 14 x 4.8 mm
M12 x 22 mm
7 mm
4 mm
2 mm
Sensing distance
0.5 mm
1 mm
2 mm
1
μm
Resolution *1
Model
ZX-EDR5T
ZX-ED01T *2
ZX-ED02T *2
ZX-EM02T *2
ZX-EM07MT *2
ZX-EV04T *2 *3
ZX-EM02HT *4
*1:
For an average count of 4,096.
*2:
Models with Protective Spiral Tubes are also available. Add a suffix of “-S” to the above model numbers when ordering. (Example: ZX-ED01T-S)
As for ZX-EM07MT, please mention ZX-EM07M-S when ordering.
For detailed dimensions of the Protective Spiral Tube, refer to the information on the E39-F32A on the OMRON website.
*3:
Be sure to use ZX-EDA Amplifier Unit version 1,200 or later with the ZX-EV04T.
*4:
Be sure to use ZX-EDA Amplifier Unit version 1,300 or later with the ZX-EM02HT.
Amplifier Units
(Refer
to Dimensions on page 13.)
Appearance
DC
Power supply
NPN
Output type
Model
ZX-EDA11 2M
PNP
ZX-EDA41 2M
Note:
Compatible connection with the Sensor Head.
ZX-E Series
Smart Sensors (Inductive Displacement Type)
1
Accessories (Order Separately)
Calculating Unit
(Refer
to Dimensions on page 14.)
Appearance
ZX-CAL2
+
Setup Tool for Personal Computer
Appearance
Name
Communications Interface
Unit (RS-232C) + Smart
Monitor Basic*2 (Function
Setting Software)
Model
ZX-SFW11EV3
(See note 1.)
Model
Amplifier Mounting Brackets
A ZX-XBE1 is provided with the Sensor. Order an
Amplifier Mounting Bracket separately if required.
(Refer to Dimensions on page 14.)
Note 1.
The ZX-SFW11EV3 or ZX-SW11EV3 is required to use the
Smart Monitor with the ZX-LDA11-N/41-N. Earlier versions
cannot be used.
2.
The Smart Monitor Basic does not have a logging function.
Other than the logging function, the Smart Monitor Basic sup-
ports the same functions as the Smart Monitor.
Appearance
Model
ZX-XBE1
Remarks
Attached to
each Sensor
Head
For DIN track
mounting
Cables with Connectors on Both Ends (for
Extension)
(Refer to Dimensions on page 15.)
*
Cable length
1m
4m
8m
Model
ZX-XC1A
ZX-XC4A
ZX-XC8A
1
Quantity
ZX-XBE2
*
Robot cable models are also available. The model numbers are
ZX-XC@R.
Logging Tool for Personal Computers
(Refer to Dimensions on page 15.)
Bank Unit
Appearance
Model
ZX-SB11
Appearance
Name
Communications Interface Unit
(RS-232C)
Smart Monitor (Logging Soft-
ware + Function Setting Soft-
ware)
Model
ZX-SF11
ZX-SW11EV3
(See note 1.)
Specifications
■
Sensor Heads
Model
Measurement range
Sensing object
Standard reference object
Resolution *1
Linearity *2
Linear output range
Temperature characteristic *3
(including Amplifier Unit)
Operating
*4
Ambient
temperature
Storage
*4
Ambient humidity
Insulation resistance
Dielectric strength
Vibration resistance (destruction)
Shock resistance (destruction)
Degree of protection (Sensor Head)
Connection method
Weight (packed state)
Materials
Sensor Case
Head
Sensing surface
Tightening nut
Toothed washer
Preamplifier
ZX-ED02T/
ZX-EM07MT
ZX-EV04T
ZX-EM02HT
EM02T
0 to 0.5 mm
0 to 1 mm
0 to 2 mm
0 to 7 mm
0 to 4 mm
0 to 2 mm
Magnetic metals (Measurement ranges and linearities are different for non-magnetic metals. Refer to
En-
gineering Data
on page 4.)
18×18×3 mm
30×30×3 mm
60×60×3 mm
45×45×3 mm
Material: ferrous (S50C)
1
μm
±0.5%
F.S.
Same as measurement range.
0.15% F.S./°C
0.07% F.S./°C
0 to 50°C (with no ic-
−10
to 60°C (with no icing or condensation)
ing or condensation)
−20
to 70°C (with no icing or condensation)
Operating and storage: 35% to 85% (with no condensation)
50 MΩ min. (at 500 DC)
1,000 VAC, 50/60 Hz for 1 min between charged parts and case
10 to 55 Hz with 1.5-mm double amplitude for 2 h each in X, Y, and Z directions
500 m/s
2
, 3 times each in X, Y, and Z directions
IEC60529, IP65 IEC60529, IP67
Connector relay (standard cable length: 2 m)
Approx. 120 g
Approx. 140 g
Approx. 160 g Approx. 130 g
Brass
Stainless steel Brass
Zinc (nickel-plated)
Heat-resistant ABS
---
---
Brass (nickel-plated) (except ZX-ED02T)
---
---
Iron (zinc-plated) (except ZX-ED02T)
PES
Amplifier Mounting Brackets (ZX-XBE1), Instruction Manual
±1.0%
F.S. *5
0.1% F.S./°C
−10
to 200°C
(with no icing or
condensation)
ZX-EDR5T
ZX-ED01T
IEC60529, IP60 *6
Approx. 160 g
Brass
PEEK
Brass (nickel-plated)
Iron (zinc-plated)
Accessories
2
ZX-E Series
Smart Sensors (Inductive Displacement Type)
*1:Resolution:
The resolution is the deviation (±3σ) in the linear output when connected to the ZX-EDA Amplifier Unit. The above values indicate
the deviations observed 30 minutes after the power is turned ON.
(The resolution is measured with OMRON's standard reference object at 1/2 of the measurement range with the ZX-EDA set for the maxi-
mum average count of 4,096 per period.)
The resolution is given at the repeat accuracy for a stationary workpiece, and is not an indication of the distance accuracy. The resolution
may be adversely affected under strong electromagnetic fields.
*2:
Linearity: The linearity is given as the error in an ideal straight line displacement output when measuring the standard reference object. The
linearity and measurement values vary with the object being measured.
*3:
Temperature characteristic: The temperature characteristic is measured with OMRON's standard reference object at 1/2 of the measure-
ment range.
*4:
The ambient temperature given is only for the sensor head. It is -10 to 60°C for the preamp.
*5:
The value given is for an ambient temperature of 25°C.
*6:
Do not use in moist environments because the case is not waterproof.
■
Amplifier Units
Model
Measurement period *1
Possible average count settings
Linear output *2
Judgement outputs
(3 outputs: HIGH/PASS/LOW)
150
μs
1, 2, 4, 8, 16, 32, 64, 128, 256, 512, 1,024, 2,048, or 4,096
Current output: 4 to 20 mA/F.S., Max. load resistance: 300
Ω
Voltage output:
±4
V (± 5 V, 1 to 5 V *3), Output impedance: 100
Ω
NPN open-collector outputs, 30 VDC, 50 mA max.
Residual voltage: 1.2 V max.
PNP open-collector outputs, 30 VDC, 50 mA max.
Residual voltage: 2 V max.
ON:
Supply voltage short-circuited or supply volt-
age within 1.5 V
OFF: Open (leakage current: 0.1 mA max.)
ZX-EDA11
ZX-EDA41
Zero reset input, timing input, reset
ON: Short-circuited with 0-V terminal or 1.5 V or
input, judgement output hold input
less
OFF: Open (leakage current: 0.1 mA max.)
Function
- Measurement value display
- Set value/output value/resolution display
- Linearity adjustment (materials selection)
- Scaling
- Display reverse
- Display OFF mode
- ECO mode
- Number of display digit changes - Sample hold
- Peak hold
- Bottom hold, peak-to-peak hold - Self-peak hold
- Self-bottom hold
- Average hold
- Delay hold
- Zero reset
- Initial reset
- Linearity initialization
- ON-delay timer
- OFF-delay timer
- One-shot timer
- Previous value comparison
- Non-measurement setting
- Direct threshold value setting - Position teaching
- Automatic teaching
- Hysteresis width setting
- Timing inputs
- Reset input
- Judgement output hold input - Monitor focus
- Linear output correction
- (A-B) calculations *4
- (A+B) calculations *4
- K-(A+B) calculation *4
- Mutual interference prevention *4
- Sensor disconnection detection - Zero reset memory
- Zero reset indicator
- Key lock
Indications
Judgement indicators: High (orange), pass (green), low (yellow), 7-segment main digital display (red),
7-segment sub-digital display (yellow), power ON (green), zero reset (green), enable (green)
Voltage influence (including Sensor)
0.5% F.S. of linear output value at
±20%
of power supply voltage
Power supply voltage
Current consumption
Ambient temperature
Ambient humidity
Insulation resistance
Dielectric strength
Vibration resistance (destruction)
Shock resistance (destruction)
12 to 24 VDC
±10%,
Ripple (p-p): 10% max.
140 mA max. with power supply voltage of 24 VDC (with Sensor connected)
Operating and storage: 0 to 50°C (with no icing or condensation)
Operating and storage: 35% to 85% (with no condensation)
20 MΩ min. (at 500 DC)
1,000 VAC, 50/60 Hz for 1 min
10 to 150 Hz with 0.7-mm double amplitude for 80 min each in X, Y, and Z directions
300 m/s
2
, 3 times each in 6 directions (up, down, left, right, forward, backward)
Prewired (standard cable length: 2 m)
Approx. 350 g
Case: PBT (polybutylene terephthalate), Cover: Polycarbonate
Instruction Manual
Connection method
Weight (packed state)
Materials
Accessories
*1:The
response time for the first linear output or judgment output is calculated as follows (with fixed sensitivity): Measurement period
×
(Aver-
age count setting + 1). The response time for the second and later outputs is the measurement period specified in the table.
*2:
The output can be switched between a current output and voltage output using a switch on the bottom of the Amplifier Unit.
*3:
Setting is possible via the monitor focus function.
*4:
A Calculating Unit (ZX-CAL2) is required.
ZX-E Series
Smart Sensors (Inductive Displacement Type)
3
Engineering Data (Reference Value)
Measurement Distance vs. Linearity (with Linearity Adjusted for Standard Sensing Object)
ZX-EDR5T
Linearity (% F.S.)
ZX-ED01T
Linearity (% F.S.)
ZX-ED02T/ZX-EM02T
Linearity (% F.S.)
0.3
0.3
0.3
0.2
0.2
0.2
0.1
0.1
0.1
0
0
0
−0.1
−0.1
−0.1
−0.2
−0.2
−0.2
−0.3
−0.3
0
0.1
0.2
0.3
0.4
0.5
−0.3
0
0.2
0.4
0.6
0.8
1
0
0.5
1
1.5
2
Measurement distance (mm)
Measurement distance (mm)
Measurement distance (mm)
ZX-EM07MT
Linearity (% F.S.)
0.3
ZX-EV04T
Linearity (% F.S.)
ZX-EM02HT
Linearity (% F.S.)
0.3
0.3
0.2
0.2
0.2
0.1
0.1
0.1
0
0
0
−0.1
−0.1
−0.1
−0.2
−0.3
−0.2
−0.3
0.0
−0.2
−0.3
0
1
2
3
4
5
6
7
1.0
Measurement distance (mm)
2.0
3.0
4.0
Measurement distance (mm)
0
0.5
1
1.5
2
Measurement distance (mm)
Size of Sensing Object vs. Linearity (with Linearity Adjusted for Each Sensing Object)
ZX-EDR5T
Linearity (% F.S.)
ZX-ED01T
Linearity (% F.S.)
0.6
0.5
0.4
0.3
0.2
0.1
S50C
@5
S50C
@8
S50C
@12
S50C
@18
S50C
@30
S50C
@45
ZX-ED02T/ZX-EM02T
Linearity (% F.S.)
0.4
0.3
0.2
0.1
0
−0.1
−0.2
−0.3
−0.4
0
0.1
0.2
0.3
0.4
0.5
Measurement distance (mm)
1.0
0.8
0.6
0.4
0.2
0
S50C
@5
S50C
@8
S50C
@12
S50C
@18
S50C
@30
S50C
@45
S50C
@5
S50C
@8
S50C
@12
S50C
@18
S50C
@30
S50C
@45
0
−0.1
−0.2
−0.3
−0.4
−0.5
−0.6
0
0.2
0.4
0.6
0.8
1
−0.2
−0.4
−0.6
−0.8
−1.0
0
0.5
1
1.5
2
Measurement distance (mm)
Measurement distance (mm)
ZX-EM07MT
Linearity (% F.S.)
ZX-EV04T
Linearity (% F.S.)
ZX-EM02HT
S50C
@8
S50C
@12
S50C
@18
S50C
@30
S50C
@45
S50C
@60
Linearity (% F.S.)
0.3
1
0.8
0.6
0.4
0.2
0.5
0.4
0.3
0.2
0.1
0
−0.1
−0.2
−0.3
−0.4
S50C
@8
S50C
@12
S50C
@18
S50C
@30
S50C
@45
0
0.5
1
1.5
2
0.2
0.1
0
0
−0.2
−0.1
−0.4
S50C
@30
S50C
@45
S50C
@60
0
1
2
3
4
5
6
7
Measurement distance (mm)
−0.2
−0.6
−0.8
−1
0.0
1.0
2.0
3.0
4.0
Measurement distance (mm)
−0.3
−0.5
Measurement distance (mm)
4
ZX-E Series
Smart Sensors (Inductive Displacement Type)
Size of Sensing Object vs. Linearity (with Linearity Adjusted for Standard Sensing Object)
ZX-EDR5T
Linearity (% F.S.)
4
3
2
1
0
−1
−2
−3
−4
S50C
@5
S50C
@8
S50C
@12
S50C
@18
S50C
@30
S50C
@45
ZX-ED01T
Linearity (% F.S.)
4
3
2
1
0
ZX-ED02T/ZX-EM02T
Linearity (% F.S.)
6
5
4
3
2
1
0
−1
−2
−3
−4
0
S50C
@5
S50C
@8
S50C
@12
S50C
@18
S50C
@30
S50C
@45
0.2
0.4
0.6
0.8
1
Measurement distance (mm)
−1
−2
−3
−4
−5
0
0.5
1
S50C
@5
S50C
@8
S50C
@12
S50C
@18
S50C
@30
S50C
@45
1.5
2
Measurement distance (mm)
0
0.1
0.2
0.3
0.4
0.5
Measurement distance (mm)
ZX-EM07MT
Linearity (% F.S.)
ZX-EV04T
Linearity (% F.S.)
5
4
3
2
1
ZX-EM02HT
Linearity (% F.S.)
8
7
6
5
4
S50C
@8
S50C
@12
S50C
@18
S50C
@30
S50C
@45
0.8
0.6
0.4
0.2
0
−0.2
−0.4
−0.6
−0.8
−1
−1.2
0
1
2
3
4
5
6
7
Measurement distance (mm)
S50C
@30
S50C
@45
S50C
@60
0
−1
−2
−3
−4
−5
0.0
1.0
2.0
S50C
@8
S50C
@12
S50C
@18
S50C
@30
S50C
@45
S50C
@60
3.0
4.0
3
2
1
0
−1
0
0.5
1
1.5
2
Measurement distance (mm)
Measurement distance (mm)
Material of Sensing Object vs. Linearity (
with Linearity Adjusted for Each Sensing Object)
ZX-EDR5T
Linearity (% F.S.)
0.3
S50C
@18
SUS304
@18
A5052
@18
ZX-ED01T
Linearity (% F.S.)
0.3
S50C
@18
SUS304
@18
A5052
@18
ZX-ED02T/ZX-EM02T
Linearity (% F.S.)
0.3
S50C
@30
SUS304
@30
A5052
@30
0.2
0.2
0.2
0.1
0.1
0.1
0
0
0
−0.1
−0.1
−0.1
−0.2
−0.3
−0.2
−0.3
−0.2
−0.3
0
0.1
0.2
0.3
0.4
0.5
0
0.2
0.4
0.6
0.8
1
0
0.5
1
1.5
2
Measurement distance (mm)
Measurement distance (mm)
Measurement distance (mm)
ZX-EM07MT
Linearity (% F.S.)
0.3
S50C
@60
SUS304
@60
A5052
@60
ZX-EV04T
Linearity (% F.S.)
0.5
0.4
0.3
0.2
0.1
S50C
@60
SUS304
@60
A5052
@60
0.2
0.1
0
0
−0.1
−0.2
−0.3
−0.4
−0.1
−0.2
−0.3
0
1
2
3
4
5
6
7
Measurement distance (mm)
−5
0.0
1.0
2.0
3.0
4.0
Measurement distance (mm)
ZX-E Series
Smart Sensors (Inductive Displacement Type)
5
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