KXR94 Series
Accelerometers and Inclinometers
FEATURES
Small Package - 5x5x1.2mm DFN
Multiplexed Analog or Digital SPI Interface
Internal 1KHz Low Pass Filter
Low Noise
Lead-free Solderability
Excellent Temperature Performance
High Shock Survivability
Low Power Consumption
User Definable Bandwidth
Factory Programmable Offset and Sensitivity
Self-test Function
MARKETS
APPLICATIONS
Automotive
Stability Control
Telematics/GPS
Theft and Accident Alarms
Personal Navigation Devices
Inertial Navigation and Dead Reckoning
Cell Phones and Handheld PDAs
Gesture Recognition
Cameras and Video Equipment
Image Stabilization
Industrial
Platform Stabilization
Drill Orientation
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PROPRIETARY TECHNOLOGY
These high-performance silicon micromachined linear accelerometers and
inclinometers consist of a sensor element and an ASIC packaged in a
5x5x1.2mm Dual Flat No-lead (DFN). The sensor element is fabricated from
single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE)
processes, and is protected from the environment by a hermetically-sealed
silicon cap at the wafer level.
The
KXR94
series is designed to provide a high signal-to-noise ratio with
integrated temperature compensation that provides excellent performance
over temperature. These sensors can accept supply voltages between 2.5V
and 5.25V. Sensitivity is factory programmable allowing customization for
applications requiring from ±1.0g to ±4.0g ranges.
user-definable.
The sensor element functions on the principle of differential capacitance.
Acceleration causes displacement of a silicon structure resulting in a
change in capacitance.
An ASIC, using a standard CMOS manufacturing
process, detects and transforms changes in capacitance into an analog out-
put voltage, which is proportional to acceleration. The sense element de-
sign utilizes common mode cancellation to decrease errors from process
variation and environmental stress.
Available in analog and multiplexed
analog outputs and serial peripheral interface (SPI).
36 Thornwood Dr. - Ithaca, NY 14850 USA tel: 607-257-1080 - fax: 607-257-1146 - www.kionix.com - info@kionix.com
“Kionix”
is a registered trademark of Kionix, Inc. Products described herein are protected by patents issued or pending. Information provided
in this document is believed to be accurate and reliable but is not guaranteed. Kionix does not assume responsibility for its use or distribution.
No license is granted by implication or otherwise under any patent or other rights of Kionix. Kionix reserves the right to change product
specifications or discontinue this product at any time without prior notice.
Sensor bandwidth is
©
Kionix 2012 All Rights Reserved
January 26, 2012 Rev. 2.3
Page 1 of 2
KXR94 Series
Accelerometers and Inclinometers
PERFORMANCE SPECIFICATIONS
The performance parameters below are programmed and tested at 3.3 volts. However, the device can be factory
programmed to accept supply voltages from 2.5 V to 5.25 V. Performance parameters will change with supply
voltage variations.
PERFORMANCE SPECIFICATIONS
PARAMETERS
Range
1
UNITS
g
mV/g
counts/g
mg/°C
%/°C
KXR94-2050
±2.0
660 typical (673 max)
Not applicable
KXR94-2353
Not applicable
819 target (835 max)
CONDITION
Factory programmable
12-bit operation
Sensitivity
0g Offset vs. Temp.
Sensitivity vs. Temp
Noise Density
Bandwidth
2
±0.2 typical
±0.01 (xy) ±0.02 (z) typical
45 typical
800
0.1 typical
±1.25 (xy) ±0.2 (z) typical
2.0 typical
Not applicable
Not Applicable
3.3
1.03 typical
5 max
0.95 typical
40 typical
5 typical
Standard
Operating
Standby
-3dB
% of full scale output
3.3V ± 5%
g
/
Hz
Hz
% of FS
%
%
µS
3
Non-Linearity
Ratiometric Error
Cross-axis Sensitivity
A/D Conversion Time
SPI Communication Rate
Power Supply
Current Consumption
MHz
V
mA
µA
ENVIRONMENTAL SPECIFICATIONS
PARAMETERS
Operating Temperature
Storage Temperature
Mechanical Shock
ESD
UNITS
°C
°C
g
V
KXR94-2050
KXR94-2353
CONDITION
Powered
Un-powered
Powered or un-powered,
0.5 msec halversine
Human body model
-40 to 85 (Consumer/Industrial)
-40 to 125 (Automotive)
-55 to 150
5000
3000
NOTES
1
2
3
Custom ranges from 1.0g to 4.0g available.
Internal low pass filter. Lower frequencies are user definable with external capacitors.
SPI communication rate can be optimized for faster communication.
ORDERING GUIDE
Product
KXR94-1050
KXR94-2050
KXR94-2283
KXR94-2353
KXR94-7050
Axis(es) of
Sensitivity
XYZ
XYZ
XYZ
XYZ
XYZ
Range
(g)
2
2
2
2
2
Sensitivity
560 (mV/g)
660 (mV/g)
1000 (mV/g)
819 (counts/g)
660 (mV/g)
Offset
1.4 V
1.65V
2.5V
2048 counts
1.65V
Operating
Voltage (V)
2.8
3.3
5.0
3.3
3.3
Ouput
Mux Analog
Mux Analog
Mux Analog
Digital SPI
Mux Analog
Temperature
(°C)
-40 to +85
-40 to +85
-40 to +85
-40 to +85
-40 to 125
Package
5x5x1.2 DFN
5x5x1.2 DFN
5x5x1.2 DFN
5x5x1.2 DFN
5x5x1.2 DFN
©
Kionix 2012 All Rights Reserved
January 26, 2012 Rev. 2.3
Page 2 of 2
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