D6F-A1
MEMS Flow Sensor
A Compact, High-accuracy Sensor
That Measures Low Flow Rates.
• High accuracy of
±
3% FS.
• Flow rates can be measured without being affected by
temperature or pressure.
RoHS Compliant
Refer to the
Common Precautions for the D6F Series
on page 40.
Ordering Information
MEMS Flow Sensor
Applicable fluid
Air
Flow rate range
0 to 1 L/min
0 to 2 L/min
Model
D6F-01A1-110
D6F-02A1-110
Output Voltage Characteristics
D6F-01A1-110
6.0
Output voltage (V)
D6F-02A1-110
6.0
Output voltage (V)
5.0
4.0
3.0
2.0
1.0
0.0
0.0
0.2
0.4
0.6
Flow rate (L/min)
0.8
1.0
5.0
4.0
3.0
2.0
1.0
0.0
0.0
0.4
0.8
1.2
Flow rate (L/min)
1.6
2.0
Accessory (included)
Type
Cable
Model
D6F-CABLE1
D6F-01A1-110
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±
0.12
0.2
2.31
±
0.12
0.4
3.21
±
0.12
0.6
3.93
±
0.12
0.8
4.51
±
0.12
1.0
5.00
±
0.12
Connections
D6F-01A1-110
D6F-02A1-110
Pin No.
1: Vcc
2: Vout
3: GND
53398-03** (Made by Molex Japan)
D6F-02A1-110
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±
0.12
0.4
2.59
±
0.12
0.8
3.53
±
0.12
1.2
4.18
±
0.12
1.6
4.65
±
0.12
2.0
5.00
±
0.12
Connector
Use the following connectors for connections to the D6F:
Housing
51021-0300 (Made by Molex Japan)
Terminals
50079 (Made by Molex Japan)
Wires
AWG28 to AWG26
Tubes
Install tubes made of materials such as rubber or urethane so
that they will not come out.
For urethane tubes, tubes with an outer diameter of 12 mm and
an inner diameter of 8 mm are recommended.
Measurement conditions: Power supply voltage of 12± 0.1 VDC, ambient tem-
perature of 25± 5°C, and ambient humidity of 35% to 75%.
2: Vout
1: Vcc
3: GND
Enlarged View
8
D6F-A1
Characteristics/Performance
Model
Flow Range (See note 1.)
Calibration Gas (See note 2.)
Flow Port Type
Electrical Connection
Power Supply
Current Consumption
Output Voltage
Accuracy
Repeatability (See note 3.)
Output Voltage (Max.)
Output Voltage (Min.)
Rated Power Supply Voltage
Rated Output Voltage
Case
Degree of Protection
Withstand Pressure
Pressure Drop (See note 3.)
Operating Temperature (See note 4.)
Operating Humidity (See note 4.)
Storage Temperature (See note 4.)
Storage Humidity (See note 4.)
Temperature Characteristics
Insulation Resistance
Dielectric Strength
Weight
Note: 1.
Note: 2.
Note: 3.
Note: 4.
0 to 1 L/min
Air
Bamboo joint
Maximum outside diameter: 8.6 mm, Minimum outside diameter: 7.4 mm
Three-pin connector
10.8 to 26.4 VDC
15 mA max with no load, with a Vcc of 12 to 24 VDC, and at 25°C
1 to 5 VDC (non-linear output, load resistance of 10 kΩ)
±
3% FS (25°C characteristic)
±
0.3% FS
5.7 VDC (Load resistance: 10 kΩ)
0 VDC (Load resistance: 10 kΩ)
26.4 VDC
6 VDC
PPS
IEC IP40 (Excluding tubing sections.)
200 kPa
0.42 kPa
−
to 60°C
10
35% to 85%
−
to 80°C
40
35% to 85%
±
3% FS for 25°C characteristic at an ambient temperature of
−
to 60°C
10
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
1.06 kPa
D6F-01A1-110
0 to 2 L/min.
MEMS Flow Sensor
D6F-02A1-110
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
12.8 g
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions
(Unit: mm)
D6F-01A1-110
D6F-02A1-110
3.5-dia. through hole
4
R4
8
8.6 dia.
7.4 dia.
15.1
Mounting Hole Dimensions
Two, M3 screws
66
30
±0.1
41
(3.7)
R1.75
4.5
R4.25
4
(6)
20
28
±0.1
20
0.5
4.5
6.5
Connector :51021 (Manufactured by Molex, LLC)
Terminal :50079 (Manufactured by Molex, LLC)
Wire
:0.14SQ
Blue wire
3.5
Through hole
9.5
28
±0.05
30
±0.05
(7.45)
Cable (included): D6F-CABLE1
200
±35
100
±15
Brown wire
Black wire
1. Vcc
2. Vout
3. GND
9
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