MFS02
Thermal Mass Flow Sensor
Optimal for ultra fast measuring of gas flow and
direction
Benefits & Characteristics
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▪
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Excellent solution for applications with high flow
rates and fast response time in CTA mode
Very high measuring dynamic with CTA mode
(10‘000‘000 : 1) without bypass
Detection of flow direction
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Excellent for very low flow rates and leakage
detection with bridge mode
High chemical resistance against aggressive gases
and vapors
Illustration
1)
W
L
H
1) For actual size, see dimensions
Technical Data
Dimensions (L / L2 x W x H / H2 in mm):
Operating measuring range:
5.0 x 3.4 x 0.5
0 m/s to 1.5 m/s (full bridge mode)
0 ml/min to 100 ml/min (full bridge mode)
0 m/s to 150 m/s (CTA mode)
0 l/min to 10 l/min (CTA mode)
Minimum operating range:
Response sensitivity:
Accuracy:
Response time t
63
:
Temperature range (chip):
Temperature range (gas):
Temperature sensitivity:
Connection:
2 elements:
2 elements:
MFS02_v1.0 | Flow | Thermal Mass Flow Sensor MFS02
0 ml/min to 1 ml/min
0.0003 m/s (20 microliter/min)
< 2 % of the measured value
(dependent on the electronics and calibration)
< 10 ms
-40 °C to +160 °C
-40 °C to +80 °C (maximal +80 °C less than chip
temperature)
< 0.1 % / K (dependent on the electronics)
bonding pads
R
high
(0 °C) = 710 Ω ±10 % R
A
, R
D
R
low
(0 °C) = 530 Ω ±10 % R
B
, R
C
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Matching between elements:
1 element:
Voltage range (nominal):
Bridge offset (full bridge mode):
TCR bridge offset (full bridge mode):
Power consumption (no flow):
<2%
R
amb
(0 °C) = 825 Ω ±10 %
2 V to 6 V (full bridge mode)
Maximal ±50 mV at V
CC
= 5 V; typical ±10 mV
Maximal ±50 ppm/K x V
CC
/2
10 mW to 50 mW
(resp. chip temperature +50 °C to +160 °C)
Product Photo
Pin Assignment
1
R
amb
2
R
D
3
R
A
/R
D
4
R
A
5
R
B
6
R
C
/R
B
7
R
C
8
R
amb
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Electrical Equivalent Circuit
Temperature sensor
Heater
Temperature sensor ambience
3
6
8
R
amb
R
A
R
D
R
B
R
C
4
2
5
7
1
Order Information
Description:
MFS02
Item number:
103743
Former main reference:
050.00263
Additional Electronics
Description:
MFS02.PSTD.0
MFS02.PEXP.0
MicroFlowSens Amplifier Module
Item number:
103745
103746
104955
Former main reference:
050.00266
050.00267
350.00097
Innovative Sensor Technology IST AG, Stegrütistrasse 14, 9642 Ebnat-Kappel, Switzerland
Phone: +41 71 992 01 00 | Fax: +41 71 992 01 99 | Email: info@ist-ag.com | www.ist-ag.com
All mechanical dimensions are valid at 25 °C ambient temperature, if not differently indicated • All data except the mechanical dimensions only have information purposes and are not to be understood as assured characteristics • Technical
changes without previous announcement as well as mistakes reserved • The information on this data sheet was examined carefully and will be accepted as correct; No liability in case of mistakes • Load with extreme values during a longer
period can affect the reliability • The material contained herein may not be reproduced, adapted, merged, translated, stored, or used without the prior written consent of the copyright owner • Typing errors and mistakes reserved • Product
specifications are subject to change without notice • All rights reserved
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