Pressure
Freescale Semiconductor
Integrated Silicon Pressure Sensor
On-Chip Signal Conditioned,
Temperature Compensated and
Calibrated
The MP3V5010 series piezoresistive transducers are state-of-the-art
monolithic silicon pressure sensors designed for a wide range of applications,
but particularly those employing a microcontroller or microprocessor with A/D
inputs. This transducer combines advanced micromachining techniques,
thin-film metallization, and bipolar processing to provide an accurate, high
level analog output signal that is proportional to the applied pressure.
MP3V5010
Rev 0, 4/2009
MP3V5010
Series
0 to 10 kPa (0 to 1.45 psi)
0.1 to 3.1 V Output
Application Examples
•
•
•
•
Hospital Beds
HVAC
Respiratory Systems
Process Control
Features
•
•
•
•
•
•
5.0% Maximum Error Over 0° to 85°C
Ideally Suited for Microprocessor or Microcontroller-Based Systems
Temperature Compensated Over –40° to +125°C
Thermoplastic (PPS) Surface Mount Package
Patented Silicon Shear Stress Strain Gauge
Available in Differential and Gauge Configurations
ORDERING INFORMATION
Package
Case
No.
Options
Small Outline Package (MP3V5010 Series)
MP3V5010GC6U
Rails
482A
MP3V5010GC6T1
Tape & Reel
482A
Device Name
MP3V5010GP
MP3V5010DP
MP3V5010GVP
Trays
Trays
Trays
1369
1351
1368
None
# of Ports
Single
Dual
Gauge
Pressure Type
Differential Absolute
Device Marking
MP3V5010G
MP3V5010G
MP3V5010GP
•
•
•
•
•
•
•
•
•
•
MP3V5010DP
MP3V5010GVP
SMALL OUTLINE PACKAGE
MP3V5010GC6U/C6T1
CASE 482A-01
MP3V5010GP
CASE 1369-01
MP3V5010DP
CASE 1351-01
MP3V5010GVP
CASE 1368-01
© Freescale Semiconductor, Inc., 2009. All rights reserved.
Pressure
Operating Characteristics
Table 1. Operating Characteristics
(
V
S
= 3.0 Vdc, T
A
= 25°C unless otherwise noted, P1 > P2. Decoupling circuit shown in
Figure 3
required to meet specification.)
Characteristic
Pressure Range
(1)
Supply Voltage
(2)
Supply Current
Minimum Pressure Offset
(3)
@ V
S
= 3.0 Volts
Full Scale Output
(4)
@ V
S
= 3.0 Volts
Full Scale Span
(5)
@ V
S
= 3.0 Volts
Accuracy
(6)
Sensitivity
Response Time
(7)
Output Source Current at Full Scale Output
Warm-Up Time
(8)
Offset Stability
(9)
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range.
3. Offset (V
off
) is defined as the output voltage at the minimum rated pressure.
4. Full Scale Output (V
FSO
) is defined as the output voltage at the maximum or full rated pressure.
5. Full Scale Span (V
FSS
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
6. Accuracy (error budget) consists of the following:
Linearity:
Temperature Hysteresis:
Pressure Hysteresis:
TcSpan:
TcOffset:
Variation from Nominal:
Output deviation from a straight line relationship with pressure over the specified pressure range.
Output deviation at any temperature within the operating temperature range, after the temperature is cycled to
and from the minimum or maximum operating temperature points, with zero differential pressure applied.
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
Output deviation over the temperature range of 0° to 85°C, relative to 25°C.
Output deviation with minimum rated pressure applied, over the temperature range of 0° to 85°C, relative to
25°C.
The variation from nominal values, for Offset or Full Scale Span, as a percent of V
FSS
, at 25°C.
(0 to 85°C)
Symbol
P
OP
V
S
I
o
V
off
Min
0
2.7
—
0.1
Typ
—
3.0
7.0
0.24
Max
10
3.3
10
0.38
Unit
kPa
Vdc
mAdc
Vdc
(0 to 85°C)
V
FSO
2.81
2.94
3.08
Vdc
(0 to 85°C)
V
FSS
—
2.7
—
Vdc
(0 to 85°C)
—
V/P
t
R
I
O+
—
—
—
—
—
—
—
—
—
270
1.0
0.1
20
±0.5
±5.0
—
—
—
—
—
%V
FSS
mV/kPa
ms
mAdc
ms
%V
FSS
7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
8. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized.
9. Offset Stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
MP3V5010
2
Sensors
Freescale Semiconductor
Pressure
Maximum Ratings
Table 2. Maximum Ratings
(1)
Rating
Maximum Pressure (P1
>
P2)
Storage Temperature
Operating Temperature
Symbol
P
max
T
stg
T
A
Value
75
–40 to +125
–40 to +125
Unit
kPa
°C
°C
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
Figure 1
shows a block diagram of the internal circuitry integrated on a pressure sensor chip.
V
S
2
Sensing
Element
Thin Film
Temperature
Compensation
and
Gain Stage #1
Gain Stage #2
and
Ground
Reference
Shift Circuitry
V
out
4
GND
3
Pins 1, 5, 6, 7, and 8 are NO CONNECTS
for Small Outline Package Device
Figure 1. Integrated Pressure Sensor Schematic
MP3V5010
Sensors
Freescale Semiconductor
3
Pressure
ON-CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING
The performance over temperature is achieved by
integrating the shear-stress strain gauge, temperature
compensation, calibration and signal conditioning circuitry
onto a single monolithic chip.
Figure 2
illustrates the Differential or Gauge configuration
in the basic chip carrier (Case 482). A fluorosilicone gel
isolates the die surface and wire bonds from the environment,
while allowing the pressure signal to be transmitted to the
sensor diaphragm.
The MP3V5010 series pressure sensor operating
characteristics, and internal reliability and qualification tests
are based on use of dry air as the pressure media. Media,
other than dry air, may have adverse effects on sensor
Fluoro Silicone
Gel Die Coat
P1
Wire Bond
Lead
Frame
Thermoplastic
Case
performance and long-term reliability. Contact the factory for
information regarding media compatibility in your application.
Figure 3
shows the recommended decoupling circuit for
interfacing the integrated sensor to the A/D input of a
microprocessor or microcontroller. Proper decoupling of the
power supply is recommended.
Figure 4
shows the sensor output signal relative to
pressure input. Typical, minimum, and maximum output
curves are shown for operation over a temperature range of
0° to 85°C using the decoupling circuit shown in
Figure 3.
The
output will saturate outside of the specified pressure range.
Die
Stainless
Steel Cap
P2
Differential Sensing
Element
Die Bond
Figure 2. Cross-Sectional Diagram SOP
(not to scale)
+3 V
V
out
V
s
IPS
1.0
μF
0.01
μF
GND
OUTPUT
470 pF
Figure 3. Recommended Power Supply Decoupling and Output Filtering
(For additional output filtering, please refer to Application Note AN1646.)
MP3V5010
4
Sensors
Freescale Semiconductor
Pressure
3
2
Output (V)
Transfer Function:
V
out
= V
S
*(0.09 * P+0.08) ± ERROR
V
S
= 3.0 Vdc
TEMP = 0 to 85°C
MAX
TYPICAL
MIN
1
0
0
Differential Pressure (kPa)
10
Figure 4. Output versus Pressure Differential
Transfer Function
Nominal Transfer Value:
V
out
= V
S
x (0.09 x P + 0.08)
± (Pressure Error x Temp. Factor x 0.09 x V
S
)
V
S
= 3.0 V
±
0.30 Vdc
Temperature Error Band
MP3V5010 SERIES
4.0
3.0
Temperature
Error
Factor
2.0
1.0
0.0
–40
–20
0
20
40
60
80
100
120
140
Temperature in °C
NOTE: The Temperature Multiplier is a linear response from 0° to –40°C and from 85° to 125°C.
Temp
–40
0 to 85
+125
Multiplier
3
1
3
MP3V5010
Sensors
Freescale Semiconductor
5
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