(Maximum ratings are the limits to which the device can be exposed without causing permanent damage.)
Rating
Powered Acceleration (all axes)
Unpowered Acceleration (all axes)
Supply Voltage
Drop Test
(1)
Storage Temperature Range
NOTES:
1. Dropped onto concrete surface from any axis.
Symbol
G
pd
G
upd
V
DD
D
drop
T
stg
Value
1500
2000
–0.3 to +7.0
1.2
–40 to +125
Unit
g
g
V
m
°C
Freescale Semiconductor, Inc...
ELECTRO STATIC DISCHARGE (ESD)
WARNING: This device is sensitive to electrostatic
discharge.
Although the Motorola accelerometers contain internal
2kV ESD protection circuitry, extra precaution must be
taken by the user to protect the chip from ESD. A charge
of over 2000 volts can accumulate on the human body or
associated test equipment. A charge of this magnitude
can alter the performance or cause failure of the chip.
When handling the accelerometer, proper ESD precau-
tions should be followed to avoid exposing the device to
discharges which may be detrimental to its performance.
2
MMA3202D
Surface Mount Micromachined Accelerometer
MOTOROLA
For More Information On This Product,
Go to: www.freescale.com
Freescale Semiconductor, Inc.
Operating Characteristics
(Unless otherwise noted: –40°C
≤
T
A
≤
+105°C, 4.75
≤
V
DD
≤
5.25, Acceleration = 0g, Loaded output
(1)
)
Characteristic
Operating Range
(2)
Supply Voltage
(3)
Supply Current
Operating Temperature Range
Acceleration Range X-axis
Acceleration Range Y-axis
Output Signal
Zero g (T
A
= 25°C, V
DD
= 5.0 V)
(4)
Zero g
Sensitivity X-axis (T
A
= 25°C, V
DD
= 5.0 V)
(5)
Sensitivity Y-axis (T
A
= 25°C, V
DD
= 5.0 V)
(5)
Sensitivity X-axis
Sensitivity Y-axis
Bandwidth Response
Nonlinearity
Noise
RMS (.01 Hz – 1 kHz)
Power Spectral Density
Clock Noise (without RC load on output)
(6)
Self-Test
Output Response
Input Low
Input High
Input Loading
(7)
Response Time
(8)
Status
(12)(13)
Output Low (I
load
= 100
µA)
Output High (I
load
= 100
µA)
Minimum Supply Voltage (LVD Trip)
Clock Monitor Fail Detection Frequency
Output Stage Performance
Electrical Saturation Recovery Time
(9)
Full Scale Output Range (I
OUT
= 200
µA)
Capacitive Load Drive
(10)
Output Impedence
Mechanical Characteristics
Transverse Sensitivity
(11)
Package Resonance
Symbol
V
DD
I
DD
T
A
g
FS
g
FS
Min
4.75
6
−40
—
—
Typ
5.00
8
—
112.5
56.3
Max
5.25
10
+125
—
—
Unit
V
mA
°C
g
g
Freescale Semiconductor, Inc...
V
OFF
V
OFF
,v
S
S
S
V
S
V
f
–3dB
NL
OUT
2.35
0.46V
DD
19
38
3.72
7.44
360
−1.0
2.5
0.50 V
DD
20
40
4
8
400
—
2.65
0.54 V
DD
21
42
4.28
8.56
440
+1.0
V
V
mV/g
mV/g
mV/g/V
mV/g/V
Hz
% FSO
n
RMS
n
PSD
n
CLK
—
—
—
—
110
2.0
2.8
—
—
mVrms
µV/(Hz
1/2
)
mVpk
g
ST
V
IL
V
IH
I
IN
t
ST
9.6
V
SS
0.7 x V
DD
−30
—
12
—
—
−100
2.0
14.4
0.3 x V
DD
V
DD
−300
—
g
V
V
µA
ms
V
OL
V
OH
V
LVD
f
min
—
V
DD
–0.8
2.7
50
—
—
3.25
—
0.4
—
4.0
260
V
V
V
kHz
t
DELAY
V
FSO
C
L
Z
O
—
0.25
—
—
0.2
—
—
300
—
V
DD
−0.25
100
—
ms
V
pF
Ω
V
XZ,YZ
f
PKG
—
—
—
10
5.0
—
% FSO
kHz
NOTES:
1. For a loaded output the measurements are observed after an RC filter consisting of a 1 kΩ resistor and a 0.01
µF
capacitor to ground.
2. These limits define the range of operation for which the part will meet specification.
3. Within the supply range of 4.75 and 5.25 volts, the device operates as a fully calibrated linear accelerometer. Beyond these supply limits the device may
operate as a linear device but is not guaranteed to be in calibration.
4. The device can measure both + and – acceleration. With no input acceleration the output is at midsupply. For positive acceleration the output will
increase above V
DD
/2 and for negative acceleration the output will decrease below V
DD
/2.
5. The device is calibrated at 20g.
6. At clock frequency
≅70
kHz.
7. The digital input pin has an internal pull-down current source to prevent inadvertent self test initiation due to external board level leakages.
8. Time for the output to reach 90% of its final value after a self-test is initiated.
9. Time for amplifiers to recover after an acceleration signal causing them to saturate.
10. Preserves phase margin (60°) to guarantee output amplifier stability.
11. A measure of the device's ability to reject an acceleration applied 90° from the true axis of sensitivity.
12. The Status pin output is not valid following power-up until at least one rising edge has been applied to the self-test pin. The Status pin is high whenever
the self-test input is high, as a means to check the connectivity of the self-test and Status pins in the application.
13. The Status pin output latches high if a Low Voltage Detection or Clock Frequency failure occurs, or the EPROM parity changes to odd. The Status pin
can be reset low if the self-test pin is pulsed with a high input for at least 100
µs,
unless a fault condition continues to exist.
MOTOROLA
Surface Mount Micromachined Accelerometer
3
MMA3202D
For More Information On This Product,
Go to: www.freescale.com
Freescale Semiconductor, Inc.
PRINCIPLE OF OPERATION
The Motorola accelerometer is a surface-microma-
chined integrated-circuit accelerometer.
The device consists of a surface micromachined ca-
pacitive sensing cell (g-cell) and a CMOS signal condi-
tioning ASIC contained in a single integrated circuit
package. The sensing element is sealed hermetically at
the wafer level using a bulk micromachined “cap'' wafer.
The g-cell is a mechanical structure formed from semi-
conductor materials (polysilicon) using semiconductor
processes (masking and etching). It can be modeled as
a set of beams attached to a movable central mass that
move between fixed beams. The movable beams can be
deflected from their rest position by subjecting the sys-
tem to an acceleration (Figure 2).
As the beams attached to the central mass move, the
distance from them to the fixed beams on one side will in-
crease by the same amount that the distance to the fixed
beams on the other side decreases. The change in dis-
tance is a measure of acceleration.
The g-cell plates form two back-to-back capacitors
(Figure 2). As the central mass moves with acceleration,
the distance between the beams change and each ca-
pacitor's value will change, (C = NAε/D). Where A is the
area of the facing side of the beam,
ε
is the dielectric con-
stant, D is the distance between the beams, and N is the
number of beams. The X-Y device contains two struc-
tures at right angles to each other.
The CMOS ASIC uses switched capacitor techniques
to measure the g-cell capacitors and extract the acceler-
ation data from the difference between the two capaci-
tors. The ASIC also signal conditions and filters
(switched capacitor) the signal, providing a high level out-
put voltage that is ratiometric and proportional to acceler-
ation.
SPECIAL FEATURES
Filtering
The Motorola accelerometers contain an onboard 4-
pole switched capacitor filter. A Bessel implementation is
used because it provides a maximally flat delay response
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