DATA SHEET
MS Series
The
MS
Series
is a surface-mountable pressure monitoring device suitable
for low to medium pressure applications.
COMPANY:
Merit Sensor is a leader in piezoresistive
pressure sensing and partners with clients to create high
performing solutions for a variety of applications and industries.
SENTIUM:
Merit Sensor products incorporate a proprietary
Sentium
®
technology, developed to provide a best-in-class
operating temperature range (-40°C to 85°C) and superior stability.
TECHNOLOGY:
Merit Sensor utilizes a piezoresistive
Wheatstone bridge in a design that anodically bonds glass
to a chemically etched silicon diaphragm. All products
are RoHS compliant.
MS Series
Part Number Configurator
Impedance
1 = 5kohm
Closed Bridge
2 = 3.5kohm
Closed Bridge
Constraint
1 = Absolute
2= Gage
PSI
0015 = 15 psi
0050 = 50 psi
0100 = 100 psi
0300 = 300 psi
0500 = 500 psi
MXX-XXXX-XX
Cover
1 = No Gel
2 = Gel
1,2
CAPABILITIES:
Merit Sensor designs, engineers, fabricates,
dices, assembles, and tests products from a state-of-the-art
facility near Salt Lake City, Utah.
FEATURES
Range
Type
Media
Packaging
Flexibility
15 to 500 psi (1 to 34.5 bar; 103
to 3,447 KPa)
Absolute, gage
Clean, dry air and non-corrosive gases
Substrates, covers, gels, etc.
Sensitivity, resistance, bridge, constraint, etc.
Cap
1 = Ceramic
Cap
2 = Round Ceramic
Chimney
See reverse
for dimensions
Example:
M11-0015-11
offers 5kohm Impedance, Closed
Bridge, Absolute Constraint, 15 psi, Ceramic Cap, No Gel
1
Not available with cap.
2
Not available above 100 psi.
BENEFITS
Performance
Enjoy best-in-class performance due to Merit’s
proprietary Sentium technology.
Cost
Security
Save money over time with high-performing die
Feel confident doing business with an experienced
company backed by a solid parent company
(NASDAQ: MMSI)
Get to market quickly with creative and
flexible solutions.
Experience prompt, personal, and
professional support.
MS Series
Standard Part Numbers
M11-0015-11
M11-0050-11
M11-0100-11
M11-0300-11
M11-0500-11
M12-0015-11
M12-0050-11
M12-0100-11
M12-0300-11
M12-0500-11
M21-0015-11
M21-0050-11
M21-0100-11
M21-0300-11
M21-0500-11
M22-0015-11
M22-0050-11
M22-0100-11
M22-0300-11
M22-0500-11
M11-0015-21
M11-0050-21
M11-0100-21
M11-0300-21
M11-0500-21
M12-0015-21
M12-0050-21
M12-0100-21
M12-0300-21
M12-0500-21
M11-0015-22
M11-0050-22
M11-0100-22
M12-0015-22
M12-0050-22
M12-0100-22
M21-0015-21
M21-0050-21
M21-0100-21
M21-0300-21
M21-0500-21
M22-0015-21
M22-0050-21
M22-0100-21
M22-0300-21
M22-0500-21
M21-0015-22
M21-0050-22
M21-0100-22
M22-0015-22
M22-0050-22
M22-0100-22
Speed
Service
Sales
+1 801.208.4722
·
Customer Service
+1 801.208.4700
·
Fax
+1 801.208.4798
·
sensors@merit.com
·
www.MeritSensor.com
1600 W. Merit Parkway
·
South Jordan, Utah
·
84095
·
USA
MSseriesDS.006
MS Series
SPECIFICATIONS
Parameter
Electrical & Environmental
Excitation (In)
Impedance
Operating Temperature
Storage Temperature
Performance
Offset
Non-linearity
Pressure Hysteresis
Temp Coeff – Zero
Temp Coeff – Resistance
Temp Coeff – Sensitivity
Thermal Hysteresis
Burst Pressure
15 psi (1 bar; 103 KPa)
50 psi (3.4 bar; 345 KPa)
100 psi (6.9 bar; 689 KPa)
-10
-0.2
-0.1
-25
2300
-1500
-0.1
2X
60
100
120
75
125
150
150
175
90
150
180
180
210
mV
mV
mV
mV
mV
Closed bridge only
0
0
0
0
2800
-2200
0
10
0.2
0.1
25
3300
-2500
0.1
mV/V
% FSO
% FSO
μV/V/°C
PPM/°C
PPM/°C
% FSO
Zero pressure; gage only; @25°C
Best Fit Straight Line; @25°C
@25°C
-40°C to 85°C
-40°C to 85°C
-40°C to 85°C
Zero pressure
Room Temperature
4000
-40
-55
5
5000
15
6000
85
160
V
Ω
°C
°C
Maximum: 3 mA
Optional: 3,500 +/- 500
Sentium
®
technology
Minimum
Typical
Maximum
Units
Notes
Full-Scale Output
(@ 5 volts excitation)
300 psi (20.7 bar; 2068 KPa) 120
500 psi (34.5 bar; 3447 KPa) 140
DIMENSIONS AND ELECTRICAL
(millimeters)
Gage with cap
6.4
PACKAGING AND SHIPPING
(millimeters)
Gage with chimney
Top View
0
Top View
0
5.8
4.0
6.4
0
0
Out -
In -
In +
Out +
1.3
2.5
3.8
5.1
6.4
4.0mm
2.0mm
Out -
In -
In +
Out +
0.5 Dia. hole
1.3
2.5
3.8
5.1
6.4
White box indicates active side
24.0mm
Bottom View
1.5
4.4
4.9
6.4
Bottom View
Top View
5.8
4.0
16.0mm
1.5
4.4
4.9
6.4
Bo
6.4
1.5
0
0
1.3
2.5
3.8
5.1
6.4
Ag/Pt Solder Pads
White box indicates
0.6 Pad Width
active side
0
0.6 Pad Width
Out -
In -
In +
Out +
0.6 Pad Width
Out -
In -
In +
Out +
0
Out -
In -
In +
Ag/Pt Solder Pads
0.4 Dia hole on
gage parts only
Ag/Pt Solder Pads
0.4 Dia hole on
gage parts only
Side View
5.1
2.9
Side View
5.8
3.8
Out +
0.6
0
0.6
0
Absolute and Gage available
0
Sales
+1 801.208.4722
·
Customer Service
+1 801.208.4700
·
Fax
+1 801.208.4798
·
sensors@merit.com
·
www.MeritSensor.com
1600 W. Merit Parkway
·
South Jordan, Utah
·
84095
·
USA
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