MEMS technology

Microelectromechanical system technology Tamkang University open course

• Chapter 1：Introduction to MEMS Technology (1 hours and 10 minutes and 19 seconds)

• Chapter 2：Semiconductor Process and Equipment (1 hours and 51 minutes and 32 seconds)

• Chapter 3：Silicon Micromachining 1 (1 hours and 21 minutes and 39 seconds)

• Chapter 4：Silicon Micromachining 2 (50 minutes and 57 seconds)

• Chapter 5：Metal oxide semi-microelectromechanical technology (1 hours and 7 minutes and 29 seconds)

• Chapter 6：High aspect ratio micromachining technology (1 hours and 30 minutes and 24 seconds)

• Chapter 7：Polymer MEMS Technology 1 (1 hours and 7 minutes and 20 seconds)

• Chapter 8：Polymer MEMS Technology 2 (38 minutes and 8 seconds)

• Chapter 9：Microsensor Technology 1 (49 minutes and 4 seconds)

• Chapter 10：Microsensor Technology 2 (52 minutes and 4 seconds)

• Chapter 11：microactuator technology (49 minutes and 35 seconds)