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S-ABBAB-6MJ01-T

Description
QUARTZ THICKNESS MONITOR 6M 5PC
CategoryThe sensor   
File Size76KB,1 Pages
ManufacturerHamlin ( Littelfuse )
Websitehttp://www.hamlin.com
Environmental Compliance
Download Datasheet Parametric View All

S-ABBAB-6MJ01-T Overview

QUARTZ THICKNESS MONITOR 6M 5PC

S-ABBAB-6MJ01-T Parametric

Parameter NameAttribute value
sensor typeQCM (Quartz Crystal Microbalance)
Output typefrequency
Operating temperature-25°C ~ 75°C(TA)
S-ABBAB-6MJ01
Quartz Thickness – Monitor Crystal
FEATURE
Quartz thickness sensor for high-stress material depositions
Alloy-Electrode
Frequency: 6 MHz
Dielectrics on semiconductor
High-stress metal depositions: SiO、SiO2、MgF2、TiO2
Compatible with Inficon™ type quartz crystal
THICKNESS SENSOR SPECIFICATION
Sensor Material
Cut
Mode
Contour
Diameter
Electrode
Resonant Frequency
Resistance at Resonance
Operation Temperature
Storage Temperature
Storage Humidity
Packing
pure z Quartz
AT
Fundamental
plano-convex
13.98 ± 0.03 mm
Alloy
5.980~5.992 MHz @ 25℃
15 ohms Max
+25℃~+75℃
-20℃~+85℃
RH30%~50%
10 crystals / disc
Rev(1)01/2013
Specifications subject to change without notice
www.taitien.com
sales@taitien.com.tw
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