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S-DBAAB-6MK01

Description
QUARTZ THICKNESS MONITOR 6M 5PC
CategoryThe sensor   
File Size143KB,1 Pages
ManufacturerHamlin ( Littelfuse )
Websitehttp://www.hamlin.com
Environmental Compliance
Download Datasheet Parametric View All

S-DBAAB-6MK01 Overview

QUARTZ THICKNESS MONITOR 6M 5PC

S-DBAAB-6MK01 Parametric

Parameter NameAttribute value
sensor typeQCM (Quartz Crystal Microbalance)
Output typefrequency
Operating temperature-25°C ~ 75°C(TA)
S-DBAAB-6MK01
Quartz Thickness – Monitor Crystal
FEATURE
Quartz thickness sensor for anti-reflective coatings and
semiconductor processing
EverLife Gold-Electrode
Superior longer lifetime
Frequency: 6 MHz
Low contact resistance
High chemic stabilization
Compatible with Inficon™ type quartz crystal
THICKNESS SENSOR SPECIFICATION
Sensor Material
Cut
Mode
Contour
Diameter
Electrode
Resonant Frequency
Resistance at Resonance
Operation Temperature
Storage Temperature
Storage Humidity
Packing
pure z Quartz
AT
Fundamental
plano-convex
13.98 ± 0.03 mm
Cr / Au
5.980~5.988 MHz @ 25℃
15 ohms Max
+25℃~+75℃
-20℃~+85℃
RH30%~50%
10 crystals / disc
Rev(1)12/2012
Specifications subject to change without notice
www.taitien.com
sales@taitien.com.tw
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