MOTOROLA
Freescale Semiconductor, Inc.
SEMICONDUCTOR TECHNICAL DATA
Order this document
by MPX2053/D
50 kPa On-Chip Temperature
Compensated & Calibrated
Silicon Pressure Sensors
The MPX2053/MPXV2053G device is a silicon piezoresistive pressure sensor
providing a highly accurate and linear voltage output — directly proportional to the
applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain
gauge and a thin–film resistor network integrated on–chip. The chip is laser trimmed for
precise span and offset calibration and temperature compensation.
Features
•
Temperature Compensated Over 0°C to +85°C
•
Easy–to–Use Chip Carrier Package Options
UNIBODY PACKAGE
MPX2053
MPXV2053G
SERIES
Motorola Preferred Device
0 to 50 kPa (0 to 7.25 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
Freescale Semiconductor, Inc...
•
Ratiometric to Supply Voltage
•
Differential and Gauge Options
Application Examples
•
Pump/Motor Controllers
•
Robotics
•
Level Indicators
•
Medical Diagnostics
•
Pressure Switching
•
Non–Invasive Blood Pressure Measurement
Figure 1 shows a block diagram of the internal
circuitry on the stand–alone pressure sensor chip.
V
S
3
THIN FILM
TEMPERATURE
COMPENSATION
AND
CALIBRATION
CIRCUITRY
1
GND
SMALL OUTLINE PACKAGE
SURFACE MOUNT
MPX2053D
CASE 344
MPXV2053GP
CASE 1369
MPX2053GP
CASE 344B
2
4
V
out+
V
out-
SENSING
ELEMENT
MPXV2053DP
CASE 1351
PIN NUMBER
1
MPX2053DP
CASE 344C
2
3
4
Gnd
+V
out
V
S
–V
out
5
6
7
8
N/C
N/C
N/C
N/C
Figure 1. Temperature Compensated Pressure
Sensor Schematic
VOLTAGE OUTPUT versus
APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the sensor is
directly proportional to the differential pressure applied.
The output voltage of the differential or gauge sensor
increases with increasing pressure applied to the
pressure side (P1) relative to the vacuum side (P2).
Similarly, output voltage increases as increasing vacu-
um is applied to the vacuum side (P2) relative to the
pressure side (P1).
Preferred
devices are Motorola recommended choices for future use and
best overall value.
NOTE: Pin 1 is noted by the notch in
the lead.
MPX2053GSX
CASE 344F
PIN NUMBER
1
2
Gnd
+V
out
3
4
V
S
–V
out
MPX2053GVP
CASE 344D
Replaces MPX2050/D
REV 3
NOTE: Pin 1 is noted by the notch in
the lead.
Motorola Sensor Device Data
©
Motorola, Inc. 2002
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1
Freescale
MPX2053 MPXV2053G SERIES
MAXIMUM RATINGS
(NOTE)
Rating
Maximum Pressure (P1 > P2)
Storage Temperature
Operating Temperature
Semiconductor, Inc.
Symbol
P
max
T
stg
T
A
Value
200
–40 to +125
–40 to +125
Unit
kPa
°C
°C
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.
OPERATING CHARACTERISTICS
(V
S
= 10 Vdc, T
A
= 25°C unless otherwise noted, P1 > P2)
Characteristic
Pressure Range
(1)
Supply Voltage
(2)
Supply Current
Full Scale Span
(3)
Symbol
P
OP
V
S
I
o
V
FSS
V
off
∆V/∆P
—
—
—
TCV
FSS
TCV
off
Z
in
Z
out
t
R
—
—
Min
0
—
—
38.5
–1.0
—
–0.6
—
—
–2.0
–1.0
1000
1400
—
—
—
Typ
—
10
6.0
40
—
0.8
—
±0.1
±0.5
—
—
—
—
1.0
20
±0.5
Max
50
16
—
41.5
1.0
—
0.4
—
—
2.0
1.0
2500
3000
—
—
—
Unit
kPa
Vdc
mAdc
mV
mV
mV/kPa
%V
FSS
%V
FSS
%V
FSS
%V
FSS
mV
Ω
Ω
ms
ms
%V
FSS
Freescale Semiconductor, Inc...
Offset
(4)
Sensitivity
Linearity
(5)
Pressure Hysteresis
(5)
(0 to 50 kPa)
Temperature Hysteresis
(5)
(–40°C to +125°C)
Temperature Effect on Full Scale Span
(5)
Temperature Effect on Offset
(5)
Input Impedance
Output Impedance
Response Time
(6)
(10% to 90%)
Warm–Up
Offset Stability
(7)
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (V
FSS
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (V
off
) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
•
Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
•
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
•
Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
•
TcSpan:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
•
TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
2
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Motorola Sensor Device Data
Freescale Semiconductor,
MPX2053 MPXV2053G SERIES
Inc.
LINEARITY
Linearity refers to how well a transducer’s output follows
the equation: V
out
= V
off
+ sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or (2)
a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the cal-
culations are more straightforward for the user. Motorola’s
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange pressure.
LEAST SQUARES FIT
RELATIVE VOLTAGE OUTPUT
EXAGGERATED
PERFORMANCE
CURVE
LEAST
SQUARE
DEVIATION
STRAIGHT LINE
DEVIATION
END POINT
STRAIGHT LINE FIT
OFFSET
0
50
PRESSURE (% FULLSCALE)
100
Freescale Semiconductor, Inc...
Figure 2. Linearity Specification Comparison
ON–CHIP TEMPERATURE COMPENSATION and CALIBRATION
Figure 3 shows the minimum, maximum and typical output
characteristics of the MPX2053/MPXV2053G series at 25°C.
The output is directly proportional to the differential pressure
and is essentially a straight line.
The effects of temperature on Full–Scale Span and Offset
are very small and are shown under Operating Characteris-
tics.
40
35
OUTPUT (mVdc)
30
25
20
15
10
5
kPa
PSI
0
-5
0
V
S
= 10 Vdc
T
A
= 25°C
MPX2053
P1 > P2
MAX
TYP
SPAN
RANGE
(TYP)
MIN
WIRE BOND
SILICONE
DIE COAT
STAINLESS STEEL
METAL COVER
DIE
P1
EPOXY
CASE
12.5
1.8
25
3.6
37.5
5.4
50
7.25
OFFSET
(TYP)
LEAD FRAME
Figure 3. Output versus Pressure Differential
Figure 4. Cross–Sectional Diagram (not to scale)
Figure 4 illustrates the differential or gauge configuration
in the basic chip carrier (Case 344). A silicone gel isolates
the die surface and wire bonds from the environment, while
allowing the pressure signal to be transmitted to the silicon
diaphragm.
The MPX2053/MPXV2053G series pressure sensor oper-
ating characteristics and internal reliability and qualification
tests are based on use of dry air as the pressure media. Me-
dia other than dry air may have adverse effects on sensor
performance and long term reliability. Contact the factory for
information regarding media compatibility in your application.
Motorola Sensor Device Data
For More Information On This Product,
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ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
P2
RTV DIE
BOND
3
Freescale
MPX2053 MPXV2053G SERIES
Semiconductor, Inc.
designed to operate with positive differential pressure
applied, P1 > P2.
The Pressure (P1) side may be identified by using the
table below:
Pressure (P1) Side Identifier
Stainless Steel Cap
Side with Part Marking
Side with Port Attached
Side with Port Attached
Stainless Steel Cap
Side with Port Attached
Side with Part Marking
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing the silicone gel
which isolates the die. The Motorola MPX pressure sensor is
Part Number
MPX2053D
MPX2053DP
MPX2053GP
MPX2053GSX
MPX2053GVP
MPXV2053GP
MPXV2053DP
Case Type
344C
344C
344B
344F
344D
1369
1351
Freescale Semiconductor, Inc...
ORDERING INFORMATION — UNIBODY PACKAGE (MPX2053 SERIES)
MPX Series
Device Type
Basic Element
Ported Elements
Differential
Differential, Dual Port
Gauge
Gauge, Axial PC Mount
Gauge, Vacuum
Options
Case Type
344
344C
344B
344F
344D
Order Number
MPX2053D
MPX2053DP
MPX2053GP
MPX2053GSX
MPX2053GVP
Device Marking
MPX2053D
MPX2053DP
MPX2053GP
MPX2053D
MPX2053GVP
ORDERING INFORMATION — SMALL OUTLINE PACKAGE (MPXV2053G SERIES)
Device Type
Ported Elements
Options
Gauge, Side Port, SMT
Differential, Dual Port, SMT
Case No.
1369
1351
MPX Series Order No.
MPXV2053GP
MPXV2053DP
Packing Options
Trays
Trays
Marking
MPXV2053G
MPXV2053G
4
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Motorola Sensor Device Data
Freescale Semiconductor,
MPX2053 MPXV2053G SERIES
Inc.
SMALL OUTLINE PACKAGE DIMENSIONS
2 PLACES 4 TIPS
0.008 (0.20) C A B
A
E
e
5
4
GAGE
PLANE
e/2
.014 (0.35)
θ
L
DETAIL G
A1
D
8
1
8X
F
b
0.004 (0.1)
M
C A B
Freescale Semiconductor, Inc...
B
E1
NOTES:
1. CONTROLLING DIMENSION: INCH.
2. INTERPRET DIMENSIONS AND TOLERANCES PER
ASME Y14.5M-1994.
3. DIMENSIONS "D" AND "E1" DO NOT INCLUDE MOLD
FLASH OR PROTRUSIONS. MOLD FLASH OR
PROTRUSIONS SHALL NOT EXCEED 0.006 (0.152)
PER SIDE.
4. DIMENSION "b" DOES NOT INCLUDE DAMBAR
PROTRUSION. ALLOWABLE DAMBAR PROTRUSION
SHALL BE 0.008 (0.203) MAXIMUM.
DIM
A
A1
b
D
E
E1
e
F
K
L
M
N
P
T
θ
INCHES
MIN
MAX
0.300
0.330
0.002
0.010
0.038
0.042
0.465
0.485
0.717 BSC
0.465
0.485
0.100 BSC
0.245
0.255
0.120
0.130
0.061
0.071
0.270
0.290
0.080
0.090
0.009
0.011
0.115
0.125
0
°
7
°
MILLIMETERS
MIN
MAX
7.11
7.62
0.05
0.25
0.96
1.07
11.81
12.32
18.21 BSC
11.81
12.32
2.54 BSC
6.22
6.47
3.05
3.30
1.55
1.80
6.86
7.36
2.03
2.28
0.23
0.28
2.92
3.17
0
°
7
°
∅
T
N
K
A
8X
M
P
0.004 (0.1)
SEATING
PLANE
DETAIL G
C
CASE 1369–01
ISSUE O
Motorola Sensor Device Data
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