PRESSURE SENSORS
DP2
SERIES
Digital
Automatic sensitivity With analog
output
setting
High-performance Digital Pressure Sensor
DP5/DPH
Head-separated
DP2
DP3
Digital Display
DP4
Complete functionality!
Selection from a wide
lineup
* Passed the UL 991 Environment Test
* UL 61010C-1 compatible, Passed the UL 991 Environment Test based on SEMI S2-0200.
[Category applicable for semiconductor manufacturing: TWW2, Process Equipment]
[Applicable standards: UL 61010C-1]
[Additional test / evaluation standards as per intended use: UL991, SEMI S2-0200]
Conforming to
EMC Directive
UL Recognition
(Excluding 5 m cable length type)
High accuracy
•
high resolution
•
high speed
It achieves a 2.5 ms, or less, response
time at a high resolution of 1/1,000.
It enables highly accurate sensing with its
excellent repeatability and temperature
characteristics.
Clearly visible LED display with 3
1
/
2
digits
Bright red LED 7-segment display having 3
1
/
2
digits, 10 mm
0.394 in
high. The displayed
figures are remarkably noticeable not only in
a dark area, but also in a well-lit place.
Setting with easy key operation
Initialization and threshold value
settings are easily done by key
operation while seeing the values on
the display.
PE
LED Bar Display
DP-M
Response time
2.5 ms or less
Repeatability
Within
0.2 % F.S.
1 digit
Temperature characteristics
Within
1 % F.S.
Incorporates
minus sign
‘ ’
indication
Four output modes enable versatile pressure level control
1
Hysteresis mode
Hysteresis
Comparative
Output 1
OFF
ON
Comparative
Output 2
OFF
0 Set Value 1 (P-1) Set Value 2 (P-2)
High pressure (Positive pressure type)
High vacuum (Vacuum pressure type)
ON
ON
Comparative
Output 1
OFF
ON
Comparative
Output 2
OFF
0 Set Value 1 (P-1) Set Value 2 (P-2)
High pressure (Positive pressure type)
High vacuum (Vacuum pressure type)
Selection from six pressure units
The pressure unit can be selected
from six different systems to suit your
requirement.
The selectable pressure units differ
with the sensor type. When the pres-
sure unit is changed, the measured
pressure value and the set values
are automatically converted.
International
System of
Units (SI)
2
Window comparator mode
Hysteresis
Hysteresis
(
)
The common hysteresis of the comparative
outputs can be set, as desired, with the set values.
The comparative outputs can be turned ON or
OFF by a pressure which is within the pressure
range set by Set Value 1 and Set Value 2.
3
Dual output mode
Hysteresis
ON
Comparative
Output 1
OFF
ON
Comparative
Output 2
OFF
0 Set Value 1 (P-1) Set Value 2 (P-2)
High pressure (Positive pressure type)
High vacuum (Vacuum pressure type)
4
Automatic sensitivity setting mode
Hysteresis
Comparative
Output 1
OFF
ON
Comparative
OFF
Output 2
0 Set Value 1 (P-1) Set Value 2 (P-2)
Set Value 3 (P-3)
High pressure (Positive pressure type)
High vacuum (Vacuum pressure type)
ON
inHg
mmHg
kPa
(Note)
psi
kgf/cm
2
bar
: Vacuum pressure type
: Positive pressure type
Note: ‘MPa’ in case of
DP2-22
,
DP2-42
DP2-62
.
and
The outputs can be put to different use, such as,
detection of different kinds of objects, control
function, alarm function etc.
Using actual objects, if the pressure values for OK
objects and NG objects are input, then the sensor
is automatically set to the optimum pressure value
(mid-value).
792
APPLICATIONS
Confirmation of chip component suction
The light weight type does not disturb
the movement of the suction head,
even if it is mounted close to the head.
Total weight:
70 g approx.
MO
DE
E
MOD
DP2-42
DP2-80
MO
DE
IC tray
DP2-80
Vacuum tank
IC
Vacuum pump
DP2-41
Frame
Air
MO
DE
Air
High
pressure
Nozzle A
MO
DE
MO
DE
DP2-61
Air
Low
pressure
Seats
Tank
DP2-62
Air
Analog voltage output incorporated
as a standard
Since a linear analog voltage output
(1 to 5 V) is incorporated, the sensor is
ideally suited for real time monitoring or
for remote control in combination with
an analog controller (ultra-compact
digital panel controller
CA2
series, or
digital panel controller
CA
series).
A Wide Variety of Models
Models are selectable according to mounting style, environmental resistance, and manner of use.
Standard type / DP2-2
Flat type / DP2-4
DP
2-2
0
–101
.3kP
a
OU
T1
MO
DE
Peak hold / bottom hold display
The peak value or the bottom value of
the varying pressure can be displayed.
This function is convenient for finding the
pressure variation range or for deter-
mining a reference for pressure settings.
Direct piping
Mounting on a
panel
0-AD
J
OU
T2
MO
DE
Direct mounting on a wall
Light weight type / DP2-80
Total weight
70 g approx.
IP67 type / DP2-6
Analog bar display
Pressure changes can also be dis-
played in an analog fashion using LED
bars. Hence, sudden pressure changes
can be recognized at a glance.
LED bars indicate the pressure level in steps
of 10 % F.S., regardless of the pressure unit.
MO
DE
(
(
The sensor can
be mounted on
the suction head
of a chip mounter.
European type
The
DP2
series covers world-
wide usage with the Asian type,
the North American type and the
European type. Each type provides
the customary pressure unit,
suitable transistor output, and
pressure port.
Pressure unit
The interna-
tional system
of unit (SI)
Asian
Output
Pressure port
Water and
dust proof
Analog bar display
Digital display
North
American
type
Asian
type
kgf/cm
2
(Positive
pressure type)
NPN and
Rc (PT)
1
/
8
or M5
mmHg (Vacuum analog voltage female thread
pressure type)
Pa
psi (Positive
NPT
1
/
8
or
pressure type) NPN and
1
inHg (Vacuum analog voltage NPTF /
8
female thread
pressure type)
bar
G (PF)
1
/
8
PNP and
analog voltage female thread
North
American
European
793
LED Bar Display
PE
DP-M
Nozzle B
Digital Display
DP3
DP2
Verifying placement of frame
High pressure is attained when the
frame is exactly seated. Hence, the
pressure change when the frame is
exactly placed is detected.
Detecting tap breakage
Two opposed nozzles are supplied air at
different pressures. If the tap breaks, the
pressure at the lower pressure side nozzle is
affected by the air of the higher pressure side
nozzle. This change in pressure is detected.
Controlling edge of winding film
With bifurcated nozzles placed on both sides
of the film, the position of the winding film is
recognized as right-shifted (high pressure),
OK (middle pressure), or left-shifted (low
pressure).
DP2-41
DP4
Head-separated
DP5/DPH
Controlling clamping force
The clamping force can be changed to
suit the workpiece by controlling the
supplied air pressure.
Inspecting orientation of glass sheet
The orientation of the glass sheet can
be recognized by detecting the change
in vacuum due to presence / absence
of indentation.
DP2-80
PRESSURE SENSORS
DP2
MO
DE
PRESSURE SENSORS
DP2
ORDER GUIDE
Type
Vacuum pressure
Asian
101 kPa type
Appearance
Rated pressure range
Model No.
DP2-20
Pressure port
Rc (PT)
1
/
8
female thread
NPTF
1
/
8
female thread
Rc (PT)
1
/
8
female thread
NPTF
1
/
8
female thread
Rc (PT)
1
/
8
female thread
NPTF
1
/
8
female thread
Comparative output
DP5/DPH
Head-separated
North
American
NPN open-collector
transistor
0 to
101.3 kPa
DP2-20F
DP2-20F-P
DP2-21
PNP open-collector
transistor
NPN open-collector
transistor
100 kPa type
Standard
DP4
North
American
Asian
0 to 100.0 kPa
DP2-21F
DP2-21F-P
DP2-22
Positive pressure
PNP open-collector
transistor
NPN open-collector
transistor
DP2
DP3
Digital Display
1 MPa type
North
American
Asian
0 to 1.000 MPa
DP2-22F
DP2-22F-P
PNP open-collector
transistor
Light weight
Vacuum pressure
101 kPa type
Asian
DP2-80
0 to
101.3 kPa
M5 female thread
NPN open-collector
transistor
North
North
North
North
North
North
Asian European
Asian European
Asian European
Asian European
Asian European
American
American
American
American
American
American
DP-M
DP2-40N
DP2-40E
DP2-41
0 to 100.0 kPa
NPT
1
/
8
female thread
G (PF )
1
/
8
female thread
Rc (PT)
1
/
8
female thread
NPT
female thread
G (PF)
1
/
8
female thread
Rc (PT)
1
/
8
female thread
NPT
female thread
G (PF)
1
/
8
female thread
Rc (PT)
1
/
8
female thread
NPT
female thread
G (PF)
1
/
8
female thread
Rc (PT)
1
/
8
female thread
NPT
1
/
8
female thread
G (PF)
1
/
8
female thread
Rc (PT)
1
/
8
female thread
NPT
1
/
8
female thread
G (PF)
1
/
8
female thread
1
/
8
1
/
8
1
/
8
PE
LED Bar Display
Flat
PNP open-collector
transistor
NPN open-collector
transistor
PNP open-collector
transistor
NPN open-collector
transistor
PNP open-collector
transistor
NPN open-collector
transistor
PNP open-collector
transistor
NPN open-collector
transistor
PNP open-collector
transistor
NPN open-collector
transistor
PNP open-collector
transistor
100 kPa type
DP2-41N
DP2-41E
DP2-42
Positive pressure
1 MPa type
0 to 1.000 MPa
DP2-42N
DP2-42E
DP2-60
Vacuum pressure
101 kPa type
0 to
101.3 kPa
DP2-60N
DP2-60E
DP2-61
100 kPa type
IP67
0 to 100.0 kPa
DP2-61N
DP2-61E
DP2-62
Positive pressure
1 MPa type
0 to 1.000 MPa
DP2-62N
DP2-62E
794
European
ORDER GUIDE
5 m
16.404 ft
cable length type
5 m
16.404 ft
cable length type is also available. (Standard: 2 m
6.562 ft)
Type
Standard
DP2-20
5 m
16.404 ft
cable length type
DP2-20-C5
Vacuum pressure
101 kPa type
DP2-20F
DP2-20F-P
Standard
DP2-21
100 kPa type
Positive pressure
1 MPa type
DP2-21-C5
DP2-21F
DP2-21F-P
DP2-22
DP2-22F
DP2-22-C5
DP2-80
Vacuum pressure
101 kPa type
DP2-80-C5
DP2-40N
DP2-40E
DP2-41
DP2-41-C5
100 kPa type
Positive pressure
1 MPa type
DP2-41N
DP2-41E
DP2-42
DP2-42N
DP2-42-C5
DP2-60
Vacuum pressure
101 kPa type
DP2-60N
DP2-60E
DP2-61
IP67
100 kPa type
Positive pressure
1 MPa type
DP2-61N
DP2-61E
DP2-62
DP2-62N
DP2-62E
The IP67 type is the standard
type with a 5 m
16.404 ft
cable.
Accessories
•
DPX-01
[Pressure port attachment (Standard type only)]
•
DPX-02
[Hexagon-socket-head plug for pressure port (Standard type only)]
Pressurer port attachment
DPX-01
Hexagon-socket-head plug
for pressure port
DPX-02
795
LED Bar Display
PE
DP-M
DP2-42E
Digital Display
DP3
DP2
DP2-22F-P
Light weight
Flat
DP4
Head-separated
DP5/DPH
PRESSURE SENSORS
DP2
PRESSURE SENSORS
DP2
OPTIONS
Sensor mounting bracket
Designation
Model No.
Description
Mounting bracket for standard type
Two M4 (length 6 mm
0.236 in)
pan head screws and two spring
washers are attached.
•
MS-DPX
•
MS-DPX-4
DP5/DPH
Head-separated
Sensor
mounting
bracket
(For standard type)
MS-DPX
[
[
]
]
Two M4 (length 6 mm
0.236 in)
pan head screws and two
spring washers are attached.
DP
2-2
0
–101
.3kP
a
MS-DPX-4
Back angled mounting bracket for standard type
Two M4 (length 6 mm
0.236 in)
pan head screws and two spring
washers are attached.
Changes the pressure port from female thread [Rc (PT)
1
/
8
] to
male thread [R (PT)
1
/
8
]
OU
T1
0-A
DJ
OU
T2
MO
DE
DP4
Straight bush
DPX-03
Two M4 (length 6 mm
0.236 in)
pan head screws and two
spring washers are attached.
Panel mounting
bracket
(For standard type)
Front protection
cover
(For standard type)
Straight bush
MS-DPX-2
It can be used for mounting on a panel
(1 to 3.2 mm
0.039 to 0.126 in
thick).
•
DPX-03
Straight
bush
DP2
DP3
Digital Display
DPX-04
It protects the sensor’s adjustment panel.
(It can be fitted when the panel mounting bracket is used.)
CA2-T2
NPN open-collector
transistor
DP-M
Digital panel
controller
(Note)
This is a very small controller which allows two
independent threshold level settings.
•
Supply voltage: 24 V DC 10 %
•
No. of inputs: 1 No. (sensor input)
•
Input range: 1 to 5 V DC
•
Main functions:
Threshold level setting function, zero-adjust
function, scale setting function, hysteresis
setting function, start / hold function, auto-
reference function, power supply ON-delay
function, etc.
Panel mounting bracket,
Front protection cover
•
MS-DPX-2
•
DPX-04
Front protection
cover
DPX-04
DP
2-20
–101
.3k
Pa
OU
T1
OU
0-A
DJ
T2
MO
DE
CA-R2
PE
LED Bar Display
CA-T2
CA-B2
This is a multi-functional controller having
mathematical functions, hold function, etc.
Relay contact
•
Supply voltage: 100 to 240 V AC 10 %
•
No. of inputs: 2 Nos. (sensor inputs)
•
Input range: 1 to 5 V DC
NPN open-collector
•
Power supply for sensor: 12 V DC, 150 mA
•
Main functions:
transistor
Mathematical functions, process number
selection function, hold function, scaling
NPN open-collector function, auto-reference function, power supply
transistor
ON-delay function, measurement start delay
With BCD output
function, hysteresis setting function, etc.
(
•
CA2
series
Panel mounting bracket
MS-DPX-2
Suitable for 1 to 3.2 mm
0.039 to 0.126 in
thick panel
)
Digital panel controller
Note: For further details, refer to
p.864
l
for the ultra-compact digital panel controller
CA2
series, and to
p.854l
for the digital panel controller
CA
series.
•
CA
series
796