Model 87 UltraStable™
316 SS Pressure Sensor
High Performance, Small Profile
0-100 mV Output
Temperature Compensated
Absolute and Sealed Gage
Hydraulic Controls
Process Control
Robotics
Oceanography
Refrigeration/Compressors
Pressure Transmitters
DESCRIPTION
This is a micro machined piezoresistive silicon pressure sensor.
It is designed for OEM applications where compatibility with
corrosive media must be maintained. The sensor chip is
mounted on a TO style header, which is resistance welded to a
316 stainless steel package, sealing a small volume of silicone oil
between the diaphragm and the sensor chip. The ISO pressure
housing utilizes the oil column to couple the piezoresisteve
sensor to the isolation diaphragm. A thickfilm ceramic
compensation board with laser trimmed resistors, and
additional gain set resistor to normalize pressure sensitivity are
an integral part of the sensor package. A variety of threaded
process fittings are available. Fittings include standards like 1/4
and 1/8 NPT as well as custom process fittings. Electrical
options include cable and connector.
FEATURES
Weldable, Optional Process Fittings
±0.25 Pressure Non-linearity
±1.0% Temperature Performance
±0.25 Interchangeable Span
(provided by gain set resistor)
Solid State Reliability
Low Power
DIMENSIONS
STANDARD RANGES
Range
0 to 1000
0 to 3000
0 to 5000
psia
psis
●
●
●
●
●
●
1-70
ISO – Wide Temperature Range
316 SS Pressure Sensor
PERFORMANCE SPECIFICATIONS
Model 87 UltraStable™
All parameters measured at 1.5mA drive and at 25°C, after 10 second warm up, unless otherwise specified. Unless specifically indicated, only those parameters
indicated as tested are verified on each part. Parameters are specified for the compensation version only.
PARAMETERS
Full Scale Output Span
Zero Offset
Pressure Non Linearity
Pressure Hysteresis
Input and Output Resistance
Temp. Error - Span
Temp. Error - Zero
Thermal Hysteresis - Span
Thermal Hysteresis - Zero
Supply Current
Output Load Resistance
Insulation Resistance (50 VDC)
Compensation Operating Temperature
Operating Temperature Range
Storage Temperature Range
Media - Pressure Port
Media - Reference Port
Weight
Notes
1. All 3000 psi and 5000 psi parts are tested at 2500 psi.
2.
3.
4.
Best fit straight line.
Over temperature range -20°C to +85°C, % span, with respect to
+25°C.
Load resistance to reduce measurement errors due to output loading.
0.5
5
50
–20°C to +85°C
–40°C to +125°C
–55°C to +125°C
Liquids and Gases compatible with 316L Stainless Steel.
Liquids and Gases. Compatible with Silicon, Pyrex, Gold, Fluorosilicone
Rubber and 316L Stainless Steel.
11 g
7
2000
-0.75
-0.75
0.05
0.05
1.5
2.0
MIN
75
-1
-0.25
50
2750
4000
+0.75
+0.75
TYP
100
0
MAX
125
1
0.25
UNITS
mV
mV
% Span
µV
Ω
% Span
% Span
% Span
% Span
mA
MΩ
MΩ
4
5
6
6
6
3
3
3
3
2
NOTES
1
5.
6.
7.
Between case and sensing element.
Maximum temperature range for product with standard cable and
connector is –20°C to +105°C.
Weight depends upon configuration (cable, connector, pressure fitting).
ORDERING INFORMATION
APPLICATION SCHEMATIC
CONNECTIONS
PAD NO. / CABLE
1
2
3
4
5
6
FUNCTION
+OUT
-EX
+EX
-OUT
GAIN
GAIN
April 2000
ISO – Wide Temperature Range
1-71
Robotics Development
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