Micromachined Silicon Pressure Sensors
Uncompensated and
XPXL, XPX,
Compensated and Calibrated
XPCL, XPC Series
FEATURES
•
Low Cost, Small Size
•
Temperature
Compensated
•
Zero and Span Calibrated
•
MilliVolt Output
•
Differential, Gage and
Absolute Pressure
•
Constant Voltage
Excitation
•
High Impedance — Low
Current
TYPICAL APPLICATIONS
•
Medical Applications
•
Applications Requiring
Small Size
•
Applications Requiring
Vacuum and Positive
Pressure Reference, or
Both
The XPXL/XPX and XPCL/XPC Series sensors integrate silicon
micromachined sensing technology, temperature compensation, and
calibration in a complete family of low-cost packages. This series offers
the most cost-effective solution for design requirements.
These piezoresistive pressure sensors use micromachined silicon
chips mounted on a ceramic and protected with a plastic cap. Several
tube arrangements with nylon housings are available for various pressure
applications.
On devices of 5 psi and above, the topside of the chip is protected
against humidity by a Silgel coating. While the sensors are designed for
use with noncorrosive, nonionic pressure media, they accommodate
many gases that are used in medical applications.
WARNING
PERSONAL INJURY
DO NOT USE these products
as safety or emergency stop
devices or in any other
application where failure of
the product could result in
personal injury.
Failure to comply with these
instructions could result in
death or serious injury.
WARNING
MISUSE OF DOCUMENTATION
•
The information presented in this product sheet is for reference only.
Do not use this document as product installation information.
•
Complete installation, operation, and maintenance information is
provided in the instructions supplied with each product.
Failure to comply with these instructions could result in death or
serious injury.
Sensing and Control
Micromachined Silicon Pressure Sensors
Uncompensated and
XPXL, XPX,
Compensated and Calibrated
XPCL, XPC Series
XPXL/XPX and XPCL/XPC Electrical Specifications at 12
±0.01
Vdc Excitation @ 25
°C*
XPXL and XPX
Excitation Voltage
Null
Offset Temperature Shift
(0
°C
to 70
°C)**
Full Scale Temperature Shift
(0
°C
to 70
°C)**
Linearity, Hysteresis Error***
Input Resistance
Output Resistance
Operating Temperature
Storage Temperature
Common Mode Pressure
Proof Pressure
Proof Pressure XPXL/XPCL
Burst Pressure
Weight
*Note 1:
**Note 2:
***Note 3:
XPCL and XPC
Max.
16.0
+120
--
--
1.0
--
--
+85
+125
50
--
--
Min.
3.0
-1.0
--
--
--
5.0
--
-25
-40
3X
100
5X
Typ.
12.0
0
--
--
0.25
--
3.0
--
--
--
--
2
Max.
16.0
+1.0
±1.0
±2
1.0
--
--
+85
+125
50
--
--
Units
Vdc
mV
mV
% Span
% Span
kΩ
kΩ
°C
°C
psi
FS
in H
2
O
FS
gram
Min.
3.0
-120
--
--
--
5.0
--
-25
-40
3X
100
5X
Typ.
12.0
0
±0.5
-2050
PPM/°C
0.25
--
3.0
--
--
--
--
2
All parameters are measured at 12 Vdc excitation, pressure specs obtained with pressure applied to the front of the sensor.
Shift is relative to 25
°C.
Measured at ½ full scale rated pressure using BFSL.
Equivalent Circuit
3
4
2
Pinout
1. -V Excitation
2. + Output Signal
3. +V Excitation
4. - Output Signal
1
MEDIA COMPATIBILITY
P1 PORT: DRY GASES ONLY.
Media must be compatible with
epoxy-based adhesive.
P2 PORT:
Media must be
compatible with nylon housing,
epoxy adhesive and silicon.
2
Honeywell
•
Sensing and Control
Micromachined Silicon Pressure Sensors
Uncompensated and
XPXL, XPX,
Compensated and Calibrated
XPCL, XPC Series
XPX and XPC Absolute Output at 12
±
0.01 Vdc Excitation, 25
°C
FS Pressure
(psi)
5
15
30
60
100
XPX
Output Full Scale Span, (mV)
Min.
Typ.
Max.
270
420
540
405
630
810
405
630
810
454
634
813
504
708
912
XPC
Output Full Scale Span, (mV)
Min.
Typ.
Max.
57
60
63
85
90
95
85
90
95
85
90
95
95
100
105
XPXL, XPX and XPCL and XPC Gage and Differential* Output at 12
±
0.01 Vdc Excitation, 25
°C
XPXL and XPX
XPCL and XPC
FS Pressure
Output Full Scale Span, (mV)
Output Full Scale Span, (mV)
(psi)
Min.
Typ.
Max.
Min.
Typ.
Max.
4 in H
2
O
50
68
86
23
25
27
10 in H
2
O
22
42
62
19
20
21
1
96
180
264
17
18
19
5
270
420
540
57
60
63
15
405
630
810
85
90
95
30
406
630
810
85
90
95
60
454
634
813
85
90
95
100
504
708
912
95
100
105
150
450
630
810
85
90
95
*Differential
Common Mode Pressure should not exceed 50 psi.
Honeywell
•
Sensing and Control
3
Micromachined Silicon Pressure Sensors
Uncompensated and
XPXL, XPX,
Compensated and Calibrated
XPCL, XPC Series
MOUNTING DIMENSIONS
(for reference only) mm/in
XPXL/XPX and XPCL/XPC Series
D/A Housing
GFS/AFS Housing
GBFS Housing
DF Housing
GF/AF Housing
DT Housing
4
Honeywell
•
Sensing and Control
Micromachined Silicon Pressure Sensors
Uncompensated and
XPXL, XPX,
Compensated and Calibrated
XPCL, XPC Series
MOUNTING DIMENSIONS
(for reference only) mm/in
XPXL/XPX and XPCL/XPC Series
GT/AT Housing
GBT Housing
GBF Housing
Honeywell
•
Sensing and Control
5
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