A new performance class of innovative sensor technology
◾
The delivery program:
Innovative and extensive.
Besides through-beam and retroreflective types, reflective sen-
sors and optical fiber photoelectric sensors, we also offer laser
and eddy current analog sensors that provide precise mea-
surement results even in the most complicated of applications.
Our delivery program also includes safety sensors, photo-
electric sensors for special applications, inductive proximity
switches and miniature pressure sensors for relative or dif-
ferential pressure measurement, and ionizers for Electro Static
Discharge applications.
◾
Service has priority.
We are constantly striving to optimize our service sector to
enable us to react quickly to customer requests. Whether you
have specific application requests or you simply want technical
information, we are always ready to advise and assist you; you
only have to call.
Our current delivery program is assembled for you in this sen-
sor overview. Besides the most important technical data, you
will find numerous illustrations of possible applications.
Of course, detailed data sheets are available on our homepage
www.panasonic-electric-works.com. Our product managers,
sales and application engineers will be happy to advise you.
www.panasonic-electric-works.com
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04/2011
Contents
Page
Page
Fiber Optic Sensors ............................. 4
FX-100 ................................................................... 4
FX-301 ................................................................... 6
FX-311 ................................................................... 8
FX-500 ................................................................... 9
Trigonometric Sensors ...................... 88
EQ-500 ................................................................ 88
EQ-30 .................................................................. 90
MQ-W .................................................................. 91
Safety Sensors.................................... 92
ST4 ...................................................................... 92
SF2B.................................................................... 94
SF4B<V2> ........................................................... 95
SF4C ................................................................... 97
SD3-A1 .............................................................. 101
SF-C10 .............................................................. 103
Fiber Sensors Communication Units 24
FX-CH2................................................................ 24
SC-GU1-485 ........................................................ 26
Optical Fiber Heads ............................ 28
FT/FD-W .............................................................. 28
FT-WA30/A30, FT-WA8/A8, FD-A15 ................... 28
FD-H30-L32 / FD-H18-L31 .................................. 29
FD-H20-21 / FD-H35-20S.................................... 29
FR-KZ21/KZ21E .................................................. 30
FR-WKZ11 ........................................................... 30
FD-G6 .................................................................. 31
FD-WKZ1............................................................. 31
Pressure & Flow Sensors ................ 104
FM-200 .............................................................. 104
DP-100 .............................................................. 106
DPH-100/ DPC-100 ........................................... 108
DP2.................................................................... 110
DP4.................................................................... 112
DP5/DPH ........................................................... 114
Pressure & Flow Sensors .................................. 116
DP-M ................................................................. 116
Standard Fibers .................................. 32
Sensors for Semiconductor /
FPD Industry ....................................... 46
FD-L40................................................................. 46
FT/FD-V ............................................................... 47
EX-F70/F60 ......................................................... 48
FR-KV1 ................................................................ 49
CC Link Network Solutions ............. 118
CC Link .............................................................. 118
Inductive Proximity Sensors ........... 120
GX-F/H .............................................................. 120
GX-S .................................................................. 122
Fiber Heads ......................................... 50
FD-F705 .............................................................. 50
FT-F902 ............................................................... 51
Measurement Sensors ..................... 124
GP-X .................................................................. 124
HL-G1 ................................................................ 125
LM-10 ................................................................ 127
HL-C1 ................................................................ 129
HL-C135C-BK10................................................ 131
HL-C1C-M-WL ................................................... 131
HL-C2 ................................................................ 132
HL-T1................................................................. 135
Laser Sensors ..................................... 52
M18-L .................................................................. 52
LC-100 ................................................................. 54
LC-120 ................................................................. 56
EX-L200............................................................... 58
LS ........................................................................ 60
Mark Sensors ...................................... 62
LX-100 ................................................................. 62
Ionizers .............................................. 136
ER-F Series ....................................................... 136
ER-TF ................................................................ 138
ER-VW............................................................... 140
ER-V .................................................................. 142
EC-G.................................................................. 144
Photoelectronic Sensors ................... 64
CX-400 ................................................................ 64
NX5...................................................................... 68
CY........................................................................ 70
M18...................................................................... 72
EX-10................................................................... 73
EX-20................................................................... 75
EX-30................................................................... 77
PM ....................................................................... 79
PM2 ..................................................................... 83
NA1-11................................................................. 85
NA1-PK5 / NA1-PK3 ............................................ 86
Electrostatic Sensors ....................... 146
EF-S1 ................................................................ 146
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3
Fiber Optic Sensors
FX-100
FX-100
Excellent price / performance ratio
Features
◾
Easy to read
The digital dual-display allows you to check both the threshold
value and incident light intensity at the same time, and it also
makes the procedures for setting the various values much
easier.
◾
Designed in a 3-layer structure to
accommodate basic settings through to
advanced settings.
Setting details are divided into three levels for clearer opera-
tion, so that setting for normal operation are made in ‘RUN
mode’, basic settings are made in ‘SET mode’, and advanced
functions are set in ‘PRO mode’. This makes setting operations
much easier to understand and carry out.
◾
Multipurpose, M8 connector type
The connectors used are commercially-available M8 connec-
tors, so that processing costs and lead time required for carry-
ing out processing after purchase of the sensors can be great-
ly reduced.
Typical Applications
◾
Wafer detection
FD-WKZ + FX 10□
◾
Wafer detection
FT-L80Y + FX10□
Detects wafer carrier cases through vacuum chamber´s view
port.
Sensing possible in corrosive environment.
Lenses at the ends of the fiber heads expand the sensing
range.
Thru-beam type
chemical-
resistant fiber
FT-L8Y
FT-L8Y
FD-WKZ1
Wafer carrier case
Wafer
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04/2011
FX-100
Detection of break /
crack of glass
FV-SV2 + FX10□
Detection over long ranges
FT-LE1 + FX10□
Detection of glass substrate
in vacuum chamber
FD-H30-KZ1V + FX10□
Detection of glass substrate
on robot hand
FD-H30-L32V + FX10□
FV-SV2
FT-H30-M1V-S
Technical Specifications
Standard type
Type
Connector type
NPN output
Model no.
PNP output
Supply voltage
Power consumption
<NPN output type>
NPN open-collector transistor
FX-101P (-Z) (Note 2)
FX-101P-CC2
FX-102P (-Z) (Note 2)
FX-102P-CC2
12 to 24VDC±10%, Ripple P-P 10% or less
Normal operation: 720mW or less (Current consumption 30mA or less at 24V supply voltage)
ECO mode: 600mW or less (Current consumption 25mA or less at 24V supply voltage)
<PNP output type>
PNP open-collector transistor
Selectable either Light-ON or Dark-ON, at SET mode
Incorporated
Response time 0:
Response time 1:
Response time 2:
Response time 3:
250μs or less
450μs or less
500μs or less
600μs or less
Response time 1:
Response time 2:
Response time 3:
Response time 4:
2-level teaching / Limit teaching / Full-auto teaching
4 digit green + 4 digit red LCD display
ON-delay / OFF-delay timer, switchable either effective or ineffective.
[Timer period:1ms, 5ms, 10ms, 20ms, 40ms, 50ms, 100ms, 500ms, 1000ms]
Incorporated
Selectable response time method (Note 1)
(Functions at response time 1, 2 or 3)
Incorporated
Selectable response time method (Note 1)
(Functions at response time 1, 2 , 3 or 4)
2.5ms or less
2.8ms or less
3.2ms or less
5.0ms or less
FX-101 (-Z) (Note 2)
Cable set
FX-101-CC2
Connector type
FX-102 (-Z) (Note 2)
Cable set
FX-102-CC2
Long sensing range type
Output
Output operation
Short-circuit protection
Response time
Sensitivity setting
Digital display
Timer function
Interference prevention
function
Ambient temperature
Emitting element (modulated)
Material
Connecting method
Cable extension
Weight
Net weight: 15g approx.
Gross weight: 35g approx.
—
−10
to
+55°C
(if 4 to 7 units are mounted close together:
−10
to
+50°C;
if 8 to 16 units are mounted close together:
−10
to
+45°C
(no dew condensation or icing allowed);
Storage:
−20
to
+70°C
Red LED (Peak emission wavelength : 632nm)
Enclosure: polycarbonate; key switch: polycarbonate; fiber lock lever: PBT
Connector (Note 2)
Extension up to total 100m is possible with 0.3mm², or more, cable.
Net weight: 15g approx.
Gross weight: 75g approx.
CN-14A-C2 (connector attached
cable, 2m long): 1pc
Net weight: 15g approx.
Gross weight: 35g approx.
—
Net weight: 15g approx.
Gross weight: 75g approx.
CN-14A-C2 (connector attached
cable, 2m long): 1pc
Accessory
Notes:
1) When using the interference prevention function, set the response time for the amplifiers to be covered by the interference prevention function to different response time values.
However, the interference prevention function does not operate at response time 0 (factory default setting) for the FX-101(P)(-Z) / FX-101(P)-CC2.
2) Connector attached cable CN-14A-C2 is not attached to the models that have no ‘-CC2’ at the end of the model names.
Make sure to use the optional cable with connector CN-14A-CM.
Model n
o
s. having the suffix ‘-Z’ are M8 plug-in connector type. Make sure to use the optional M8 plug-in connector cable, UZZ808xx.
04/2011
5
FPGA/CPLD
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