D6F
MEMS Flow Sensors
Series Catalog
Faster and more accurate than ever before
MEMS
flow
sensor : the ideal means for mass
flow
measurement
Omron flow sensor
so precise
even the flap of a butterfly’s
wings will not be missed.
Realizing a highly accurate flow measurement,
Omron’s MEMS flow sensor accurately detects minute airflow so much as a single flap of a butterfly’s wings.
butterfly s win
butterf y w ngs.
A gas flow sensor is capable of "measuring mass flow" independent of temperature and pressure.
nt
d pressure
sure.
D6F-A6
D6F-W
Q&A on Mass Flow Measurement
Q1 There are two balloons; each having different volumes.
But these balloons have the same mass. Why is that?
A
The volume increases/decreases according to the pressure and
temperature changes. The mass, on the other hand,
remains constant regardless of the environmental changes.
The mass flow measurement allows measurement performance
that is not affected by changes in the environment.
Q2 Why is mass flow measurement required?
Principles of MEMS Flow
D6F Series
No airflow
Temperature distribution
Heater
Thermopile A
Thermopile B
Cross-sectional view of flow sensor chip
During the absence of airflow, the temperature
distribution around the heater is symmetrical.
When there is airflow, the temperature of the
upwind side cools down and the temperature
of the downwind side warms up, disrupting the
symmetry of the temperature distribution.
A
An accurate measurement of the flow is required especially for
combustion control. Omron’s flow sensor enables measuring the
gas flow based on the mass flow measurement.
2
sensing even a single flap of a butterfly’s wings
Operating
characteristic
6%
4%
2%
Standard upper limit
High
Accuracy
±3%RD (25-100%F.S.) is realized by
linear temperature correction using
ASIC technology
Ambient temperature = 25degC (Model: D6F-20A7D-000-0)
Error
0%
-2%
-4%
-6%
0
4
Standard lower limit
8
12
Flow rate (L/min)
16
20
Output voltage (V)
High
Sensitivity
Output voltage (V)
Omron’s unique MEMS
technology allows
detection of very low
air velocities
6
Magnified
5
view
1.04
4
3
1.02
2
1
1.00
0
-0.2 0.0 0.2 0.4 0.6 0.8 1.0
Output voltage (V)
Output voltage characteristic
Flow rate(SLM)
0.98
Flow rate of 1L: Output corresponding to flow rate change below 1/1000 of full scale.
1SLM =1000sccm
0.96
-3.2
-1.6
0.0
1.6
Flow rate (sccm)
3.2
Compact
The product size is reduced by using the
world-smallest class size MEMS sensor element
Dimension of D6F-V model: 24x8x14mm.
Sensor Measurement
Airflow
Upwind
Flow of gas
Energy
saving
Highly Resistant to Dust
The sensor can be placed anywhere
thanks to its dust-resistant structure.
Omron’s unique design of 3D flow path
provides a high level of reliability by
separating dust particles to reduce its
effect on the sensor chip. Additionally,
Omron succeeded in reducing the
sensor size, allowing it to be used in
wider range of applications.
Pattent
No.4534526
Built-in Dust Segregation System (cyclonic)
D6F-W/-V/-P
External flow
Downwind
Cross-sectional view of flow sensor chip
By detecting this temperature difference appearing as a
difference in the electromotive forces developed by the
thermopiles, it allows the mass flow rate and mass flow
velocity to be measured without the influence of
temperature and pressure. Since the thermopile generates
the thermo-electromotive force, the power consumption is
much lower than when using the resistivity method.
Centrifugal
separation
chambers
MEMS sensor
element
= leads the flow
of clean air in
here
Dust vent
Model : D6F-W
3
Applications
Omron flow sensors cover a wide range of applications and can be used for different purposes.
Application Examples
Combustion
Flow rate
Differential
pressure
For optimal control of the amount of gas
by measuring the mass flow rate
HVAC
Velocity
Differential
pressure
For feedback control of air conditioning
by measuring the amount of air and amount
of ventilation
Fuel cell
Ventilation system
VAV (central air conditioning)
Boiler
Welder
Fans
Optimizing combustion efficiency
For optimal control of pumps by measuring the flow rate
For management of positive pressure and negative
pressure by measuring the differential pressure
Controlling the amount of air at the required level
and monitoring the amount of ventilation
Clogging
Detection
Flow rate
Velocity
Differential
pressure
Measurement
Flow rate
Differential
pressure
For monitoring the flow of the cooling air to
optimize the cooling efficiency and
avoid malfunctions.
Gas detector
Gas analyzer
Projector
Low differential
pressure transmission
Industrial air conditioner
Server
Accurately detecting gas concentrations
Monitoring the positive/negative pressure in a room
4
Quiet, low maintenance cost
Selection of Products
Select the most suitable sensor from many variations.
Flow Rate
e
Combustible gas
e
Natural gas, LP gas
D6F-N2/-L2
D6F-N7/-L7
D6F N7/ L7
Types of gas
D6F-A5/-A6/-A7/-A7D
D6F-AB71/-AB71D
Air
N2, Air
D6F-P
D6F-A1
D6F-A3
D6F-P
(for bypass use)
Flow rate
1
2
3
5
10
20
50
100
Note: The pictures are representative examples of our sensors
re
200
L / min
Flow Velocity
Differential Pressure
Delivers high sensitivity even
at low flow rate, low differential pressure
Air
D6F-V
N2, Air
MEMS differential
pressure sensor
High precision
D6F-PH
Accurate measurement
Low piping effects
High impedance to reduce the influence of
piping variations
D6F-W
High reliability
Detect sensor anomaly
Flow velocity
1
2
3
4
5
10
m/ s
5
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