SM5611/SM5612
OEM Pressure, Constant Current DIP
OEM Pressure, Constant Voltage DIP
•
OEM P
RESSURE
T
RANSDUCER
F
ULLY
T
EMPERATURE
C
OMPENSATED AND
C
ALIBRATED
D
UAL
-I
N
-L
INE
P
ACKAGE
DESCRIPTION
The
SM5600
Series of OEM pressure
sensors are fully calibrated, temperature
compensated pressure sensors in dual in-
line packages for printed circuit board
mounting. These sensors offer improved
performance as well as the option for either
constant current or constant voltage
excitation. Ultra-low pressure ranges are
also available (see
SM5651/SM5652
datasheet), resulting in the broadest
selection of standard pressure ranges in the
industry.
The
SM5600
Series pressure sensors are
constructed by attaching a highly stable
piezoresistive pressure sensor chip to a
ceramic substrate. Thick film resistors on
the ceramic are laser trimmed during
manufacturing to provide zero offset
calibration, temperature compensation for
zero offset, and temperature compensation
for sensitivity. In the Model
SM5611,
an
additional resistor is trimmed to normalize
the output of an external differential amplifier
to provide span calibration when the sensor
is driven by a constant current supply. In
the Model
SM5612,
a constant voltage
supply can be used and the normalized
output span of each sensor can then be
easily amplified.
The model
SM5611
is designed for constant
current excitation.
The model
SM5612
is designed for constant
voltage excitation.
Various electrical pin and pressure port
configurations are available for flexibility in
matching this product to specific
applications.
FEATURES
•
•
•
•
•
•
•
•
15, 30, 60, and 100 PSI FS Ranges
Available
Constant voltage and constant current
versions
Easy to use dual in-line package (DIP)
Wide 0-60° compensated temperature
C
range
Span calibration to ±2%
Zero offset calibration
High performance, stable packaged
silicon chip
Gage, differential, and absolute
pressure configurations
APPLICATIONS
•
•
•
•
•
•
Barometric Pressure
Medical Instrumentation
Environmental Control
Altimeters
Automotive Diagnostics
Appliances
Rev 1.3 7_07
©
2001-2007
Silicon Microstructures, Inc.
♦
1701 McCarthy Blvd.
♦
Milpitas, CA 95035 USA
Tel: 408-577-0100
♦
Fax: 408-577-0123
♦
Sales@Si-Micro.Com
♦
WWW.Si-Micro.Com
SM5611/SM5612
OEM Pressure, Constant Current DIP
OEM Pressure, Constant Voltage DIP
CHARACTERISTICS FOR SM5611/SM5612 -
SPECIFICATIONS
o
Test Conditions: Model SM5611 w/excitation = 1.500mA @ 25 C, Model SM5612 w/excitation = 10.00Vdc @ 25 C, unless otherwise
specified.
o
Min.
Excitation
Current (SM5611)
Voltage (SM5612)
Output
Span (SM5611)
Span (SM5612)
Offset
Temperature Performance
TC Span
TC Offset
Temp Hysteresis
Accuracy
Linearity
Repeatability
Pressure Hysteresis
Sensitivity Matching
Impedance (SM5611)
Z Input
Z Output
Impedance (SM5612)
Z Input
Z Output
Temperature Range
Calibration
Operating
Storage
Dynamic Characteristics
Proof Pressure
Burst Pressure
0.00
0.00
75.0
39.5
-2.00
-0.5
-0.5
Typ.
1.50
10.00
105.0
40.0
±0.20
±0.2
±0.2
±0.1
±0.05
±0.05
±0.05
±0.20
3.00
3.30
8.00
2.50
Max.
3.00
20.00
150.0
40.5
2.00
0.5
0.5
Units
mA
V
mV
mV
mV
%FS
%FS
%FS
%FS
%FS
%FS
%FS
kΩ
kΩ
kΩ
kΩ
°C
°C
°C
FS Pressure
FS Pressure
Notes
1
2
3
3
-0.10
-0.10
-0.10
-2.00
1.80
2.70
4.50
2.00
0
-40
-55
0.10
0.10
0.10
+2.00
3.80
3.80
25.00
3.80
60
125
125
4
1, 5
3X or 225 PSI, whichever is less
5X or 225 PSI, whichever is less
Notes:
1.
Positive Pressure is defined as entry on the bottom side of the die; gain, during factory calibration, is set using negative pressure
2.
Output span of unamplified sensor
3.
Measured over a temperature range of 0 to 60
o
C.
4.
Best fit straight line
5.
Sensitivity matching relates to part-to-part matching
Pressure Ranges
PSI
5611/ 5612
15
30
60
100
015
030
060
100
ORDERING INFORMATION:
Circuit Configuration for SM5611
Model 5611 Pin-out
1 -Signal Out
2 -Iexc
3 +Signal Out*
4 +Iexc
5 Gainset Resistor
6 Gainset Resistor
Model 5612 Pin-Out
1 -Signal Out
2 -Vexc
3 +Signal Out*
4 +Vexc
5
6
Notes:
- All dimensions are shown in inches
- Tolerance on all dimensions + 0.005” unless otherwise specified.
*
Output increases as pressure is increased on Positive
Differential Tube or Absolute Tube
DO NOT connect to unlabeled pins
Rev 1.3 7_07
©
2001-2007
Rev 1.3 7_07
Silicon Microstructures, Inc.
♦
1701 McCarthy Blvd.
♦
Milpitas, CA 95035 USA
Tel: 408-577-0100
♦
Fax: 408-577-0123
♦
Sales@Si-Micro.Com
♦
WWW.Si-Micro.Com
SM5611/SM5612
OEM Pressure, Constant Current DIP
OEM Pressure, Constant Voltage DIP
NOTICE
Information in this document is provided solely to enable software and system implementers to use Silicon
Microstructures, Inc. products and/or services. No express or implied copyright licenses are granted hereunder to design
or fabricate any silicon-based microstructures based on the information in this document.
Silicon Microstructures, Inc. makes no warranty, representation, or guarantee regarding the suitability of its products for
any particular purpose, nor does Silicon Microstructures, Inc. assume any liability arising out of the application or use of
any product or silicon-based microstructure, and specifically disclaims any and all liability, including without limitation
consequential or incidental damages. Parameters that may be provided in Silicon Microstructures, Inc. data sheets and/or
specifications can and do vary in different applications and actual performance may vary over time. Silicon
Microstructures, Inc. assumes no responsibility for any inaccuracies and/or errors in this publication. All operating
parameters, must be validated for each customer application by customer’s technical experts. Silicon Microstructures,
Inc. does not convey any license under its patent rights nor the rights of others. Silicon Microstructures, Inc. makes no
representation that the circuits are free of patent infringement. Silicon Microstructures, Inc. products are not designed,
intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications
intended to support or sustain life, or for any other application in which the failure of the Silicon Microstructures, Inc.
product could create a situation where personal injury or death may occur. Should Buyer purchase or use Silicon
Microstructures products for any such unintended or unauthorized application, Buyer shall indemnify and hold Silicon
Microstructures, Inc. and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs,
damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or
death associated with such unintended or unauthorized use, even if such claim alleges that Silicon Microstructures, Inc.
was negligent regarding the design or manufacture of the part. Silicon Microstructures, Inc. reserves the right to make
changes without further notice to any products herein
Silicon Microstructures, Inc.
TM
and the Silicon Microstructures, Inc. logo are trademarks of Silicon Microstructures, Inc. All
other service or product names are the property of their respective owners.
© Silicon Microstructures, Inc. 2001-2007. All rights reserved.
Rev 1.4 6_07
Rev 1.3 7_07
©
2001-2007
Silicon Microstructures, Inc.
♦
1701 McCarthy Blvd.
♦
Milpitas, CA 95035 USA
Tel: 408-577-0100
♦
Fax: 408-577-0123
♦
Sales@Si-Micro.Com
♦
WWW.Si-Micro.Com
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