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Location:Training / Circuit Fundamentals / Micro-nano processing (semiconductor manufacturing technology) Swiss Federal Institute of Technology / Types of dry etching equipment and plasma sources

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Types of dry etching equipment and plasma sources
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Duration：16 minutes and 50 seconds
Date：2020/05/30

Uploader：桂花蒸

Introduction

keywords： Micro-nano processing UV CVD

This course will demonstrate the most efficient integrated circuit manufacturing processes in a ultra-clean environment to teach the basic principles and processes of semiconductor manufacturing.

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